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US 10,784,071 B2Granted
Electron emitter and method of fabricating same
AssigneeASML Netherlands B.V.
InventorsJuying Dou, Zheng Fan, Tzu-Yi Kuo, Zhongwei Chen
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Abstract
Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.
Claims13
An electron emitter comprising:
- a tip comprising single crystal tungsten and having a planar region with a diameter in a range of 1 micrometer to <10 micrometers;
- and
- a work-function-lowering material coated on the tip.
A thermal field emission cathode, comprising:
- an emitter comprising:
- a tip comprising single crystal tungsten and having a planar region with a diameter in a range of 1 micrometer to <10 micrometers, the tip configured to release field emission electrons;
- and
- a work-function-lowing material coated on the tip;
- and
- a heating component configured to provide thermal energy to the emitter.
3 more elements
A method comprising:
- applying a restraint to an electron emitter having a tip, the tip comprising single crystal tungsten:
- under the restraint, forming on the tip a planar region having a diameter in a range of 1 micrometer to <10 micrometers:
- removing the restraint:
- and
- after the restraint is removed, coating a work-function-lowering material on the tip.
2 more elements
Dependencies are inferred from the claim text.