Microstructure patterned surfaces for integrated lead disk drive head suspensions
AssigneeHutchinson Technology Incorporated
InventorsKyle T. Tobias, Lawrence E. LaLonde, Darrell C. Sydlo
Life of this patent
Estimating the term…
Loading patent…
AssigneeHutchinson Technology Incorporated
InventorsKyle T. Tobias, Lawrence E. LaLonde, Darrell C. Sydlo
Estimating the term…
Disk drive head suspension components having microstructured surfaces and a method for making the components. One embodiment of the method includes depositing a layer of photoimageable polymer having an associated set of process parameters including a minimum resolution and exposing the photoimageable polymer through a photomask having a microstructure-producing region with features below the minimum resolution for the photoimageable polymer. The exposed photoimageable polymer is developed to produce a layer of polymer having a thickness and a microstructured surface region with depressions that are less than the thickness of the polymer. In one embodiment the photomask has a microstructure-producing region with features sized and spaced between about 1 μm and 10 μm. Microstructured surfaces on structures such as flying leads, flying termination pads, cover coat layers and at insulating layer-trace interfaces and insulating layer-cover coat interfaces can be manufactured.
A disk drive head suspension component having a microstructured covercoat layer manufactured by a method comprising:
A disk drive head suspension component manufactured by a method comprising:
A disk drive head suspension component manufactured by a method comprising:
Dependencies are inferred from the claim text.