Pressure sensor and sensor system comprising one or more pressure sensors
AssigneeOptics11 B.V.
InventorsDevrez Mehmet Karabacak, Bastiaan Meulblok, German Enrique Knoppers
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AssigneeOptics11 B.V.
InventorsDevrez Mehmet Karabacak, Bastiaan Meulblok, German Enrique Knoppers
Estimating the term…
The present document relates to a pressure sensor comprising a structural element, the structural element comprising a first and second structural part. The sensor further comprises a first cavity being in fluid connection with an exterior of the sensor for establishing a first pressure which is dependent on an external pressure in the first cavity and a second cavity configured to be at a second pressure in use. A deformable structure is deformable dependent on a pressure difference between the first pressure and the second pressure. The sensor comprises a fiber including an intrinsic fiber optic sensor fixed to the structural element and to the deformable structure for providing an optical sensor signal dependent on said pressure difference.
A sensor for sensing a physical parameter comprising:
A sensor system comprising:
A sensor comprising:
Dependencies are inferred from the claim text.