MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples
AssigneeProtochips, Inc.
InventorsFranklin Stampley Walden, II, John Damiano, Jr., Daniel Stephen Gardiner, David P. Nackashi, William Bradford Carpenter
Life of this patent
Estimating the term…
Abstract
A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.
Claims20
A microscopy sample support device comprising:
- (a) a thermally conductive frame with a first side and a second side opposite the first side;
- (b) an observation region on a planar surface of the first side of the thermally conductive frame;
- and
- (c) at least one heat source element located across the second side of the thermally conductive frame,
- wherein the at least one heat source element is electrically insulated from the thermally conductive frame by a first dielectric layer positioned therebetween.
A sample support for heating microscopy samples, the sample support comprising:
- a MEMS frame with a top surface and a bottom surface;
- a first layer over the top surface comprising a first dielectric layer atop the MEMS frame;
- a second layer over the top surface comprising at least one heat source element;
- and
- a third layer over the top surface comprising a second dielectric layer atop the heat source element.
Dependencies are inferred from the claim text.