Compound, resin, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsTatsuro Masuyama, Satoshi Yamamoto, Koji Ichikawa
Life of this patent
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Abstract
A compound represented by the formula (I). wherein R1 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group that may have a halogen atom; R2 represents a C1 to C12 fluorinated saturated hydrocarbon group; W1 represents a C5 to C18 divalent alicyclic hydrocarbon group; A1 and A2 independently represents a single bond or *-A3-X1-(A4-X2)a—; A3 and A4 independently represents a C1 to C6 alkanediyl group; X1 and X2 independently represents —O—, —CO—O— or —O—CO—; a represents 0 or 1; and * represents a bond to an oxygen atom.
Claims7
A compound represented by formula (I),
- wherein R1 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group that may have a halogen atom;
- R2 represents —(CH2)n—Rf or —CH(Rfa)(Rfb), where n represents an integer of 1 to 6, and Rf, Rfa and Rfb each independently represent a C1 to C6 perfuloroalkyl group;
- represents a C5 to C18 divalent alicyclic hydrocarbon group;
- A1 and A2 each independently represent a single bond or *-A3-X1-(A4-X2)a—;
- A3 and A4 each independently represent a C1 to C6 alkanediyl group;
- X1 and X2 each independently represents —O—, —CO—O— or —O—CO—;
- a represents 0 or 1;
- and
- * represents a binding site to an oxygen atom.
A compound represented by formula (I′):
- wherein R1 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group that may have a halogen atom;
- R2 represents —(CH2)n—Rf where n represents an integer of 2 to 6, and Rf represents a C1 to C6 perfluoroalkyl group;
- represents a cyclopentanediyl group, a cyclohexanediyl group, an adamantanediyl group, or a norbornanediyl group;
- A1 and A2 each independently represent a single bond or *-A3-X1-(A4-X2)a—;
- A3 and A4 each independently represent a C1 to C6 alkanediyl group;
- X1 and X2 each independently represents —O—, —CO—O— or —O—CO—;
- a represents 0 or 1;
- and
- * represents a binding site to an oxygen atom.
Dependencies are inferred from the claim text.