# US 10,771,891 B2 · Method for manufacturing air pulse generating element > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,771,891 B2 - Document ID: US10771891B2 - Status: Granted - Kind: B2 - Application number: 16/380,988 - Filed: 2019-04-10 - Published: 2020-02-20 - Granted: 2020-09-08 - Earliest claimed: 2018-08-19 - Assignees: xMEMS Labs, Inc. - Applicants: xMEMS Labs, Inc. - Inventors: David Hong; Chiung C. Lo; Chun-I Chang - Web page: https://patentgrep.com/patent/US10771891B2 ## CPC - G10K 9/122: using piezoelectric driving means {(G10K9/121 takes precedence)} - H04R 1/323: {for loudspeakers (H04R1/34 and H04R1/40 take precedence)} - G10K 9/12: electrically operated - G10K 9/13: using electromagnetic driving means - H04R 17/00: Piezoelectric transducers; Electrostrictive transducers (piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners {H10N30/00}) - H04R 17/005: {using a piezoelectric polymer} - H04R 19/005: {using semiconductor materials} - H04R 19/02: Loudspeakers (H04R19/01 takes precedence) - H04R 9/063: {using a plurality of acoustic drivers (H04R1/24 and H04R1/403 take precedence)} - H04R 2201/003: Mems transducers or their use - H04R 2217/03: Parametric transducers where sound is generated or captured by the acoustic demodulation of amplitude modulated ultrasonic waves - G10K: SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR - H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K) ## Abstract A method for manufacturing an air pulse generating element is provided. First, a thin film layer including a membrane is provided, and then, a plurality of actuators are formed on the thin film layer. After that, a first chamber is formed between the thin film layer and a first plate and followed by patterning the thin film layer to form a plurality of valves, in which the membrane and the valves are formed of the thin film layer. Subsequently, a second chamber is formed between the thin film layer and a second plate, and a plurality of channels are formed in the first plate and the second plate. ## Claims ### Claim 1 A method for manufacturing an air pulse generating element, comprising: providing a thin film layer, wherein the thin film layer comprises a membrane; forming a plurality of actuators on the thin film layer; forming a first chamber between the thin film layer and a first plate, wherein forming the first chamber comprises bonding the first plate on a first surface of the thin film layer through a first bonding agent; patterning the thin film layer to form a plurality of valves, wherein the membrane and the valves are formed of the thin film layer; forming a second chamber between the thin film layer and a second plate, wherein forming the second chamber comprises bonding the second plate on a second surface of the thin film layer opposite to the first surface through a second bonding agent; and forming a plurality of channels in the first plate and the second plate. ### Claim 2 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein forming the actuators comprises forming a plurality of first electrodes, forming a plurality of deformable blocks and forming a plurality of second electrodes, and the deformable blocks are formed by patterning a same deformable layer. ### Claim 3 (depends on 2) The method for manufacturing the air pulse generating element according to claim 2, wherein the deformable layer is deformed by a piezoelectric force, an electrostatic force, an electromagnetic force or an electrothermal force. ### Claim 4 (depends on 2) The method for manufacturing the air pulse generating element according to claim 2, wherein the deformable blocks electrically insulate the first electrodes from the second electrodes. ### Claim 5 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein forming the actuators comprises forming a membrane actuator on the membrane and forming a plurality of valve actuators on the valves respectively. ### Claim 6 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein the first bonding agent is formed on the first plate before bonding the first plate on the first surface. ### Claim 7 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein the first bonding agent is formed on the thin film layer before bonding the first plate on the first surface. ### Claim 8 (depends on 7) The method for manufacturing the air pulse generating element according to claim 7, wherein patterning the thin film layer comprises forming at least one opening in the membrane, and the first bonding agent covers the at least one opening. ### Claim 9 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein providing the thin film layer further comprises providing a support substrate and a protection layer, the protection layer and the thin film layer being sequentially stacked on the support substrate, and the support substrate is removed after forming the first chamber. ### Claim 10 (depends on 9) The method for manufacturing the air pulse generating element according to claim 9, further comprising patterning the protection layer to form a protection block on one of the valves corresponding to one of the channels. ### Claim 11 (depends on 10) The method for manufacturing the air pulse generating element according to claim 10, further comprising forming an insulation block on the one of the valves before forming the first chamber, wherein the one of the valves is disposed between the protection block and the insulation block. ### Claim 12 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, further comprising patterning the thin film layer to form at least one opening in the membrane between providing the thin film layer and forming the actuators, and forming an elastic layer to cover the at least one opening between forming the at least one opening and forming the first chamber. ### Claim 13 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, further comprising forming an elastic layer on the membrane before forming the first chamber and patterning the thin film layer further comprises forming at least one opening corresponding the elastic layer in the membrane. ### Claim 14 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, further comprising patterning the thin film layer to form a plurality of traces and the membrane between providing the thin film layer and forming the actuators and forming an insulation layer for insulating the traces and the membrane from one another. ### Claim 15 (depends on 14) The method for manufacturing the air pulse generating element according to claim 14, wherein forming the actuators further comprises forming a plurality of bonding pads, and the actuators are electrically connected to the bonding pads through the traces. ### Claim 16 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein forming the actuators further comprises forming a plurality of bonding pads on the thin film layer, and the method further comprises: forming a plurality of through vias to penetrate through one of the first plate and the second plate, the through vias being electrically connected to the bonding pads. ### Claim 17 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein before forming the first chamber, the method further comprises: providing a substrate; and forming at least two recesses with different depths on a surface of the substrate to form the first plate. ### Claim 18 (depends on 17) The method for manufacturing the air pulse generating element according to claim 17, further comprising forming a protrusion in one of the recesses, wherein the protrusion surrounds one of the channels. ### Claim 19 (depends on 1) The method for manufacturing the air pulse generating element according to claim 1, wherein the first plate comprises a semiconductor substrate, a printed circuit board or an integrated circuit chip.