# US 10,771,875 B2 · Gradient micro-electro-mechanical systems (MEMS) microphone

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- Number: US 10,771,875 B2
- Document ID: US10771875B2
- Status: Granted
- Kind: B2
- Application number: 16/214,736
- Filed: 2018-12-10
- Published: 2019-04-11
- Granted: 2020-09-08
- Earliest claimed: 2013-07-03
- Assignees: Harman International Industries, Incorporated
- Applicants: Harman International Industries, Incorporated
- Inventors: John C. Baumhauer, Jr.; Fengyuan Li; Larry A. Marcus; Alan D. Michel; Marc Reese
- Web page: https://patentgrep.com/patent/US10771875B2

## CPC

- H04R 1/04: Structural association of microphone with electric circuitry therefor (in electric hearing aids H04R25/00)
- H04R 19/005: {using semiconductor materials}
- H04R 19/04: Microphones (H04R19/01 takes precedence)
- H04R 1/38: in which sound waves act upon both sides of a diaphragm and incorporating acoustic phase-shifting means, e.g. pressure-gradient microphone
- H04R 31/00: Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor {(manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182)}
- H04R 2201/003: Mems transducers or their use
- H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K)

## Abstract

In at least one embodiment, a micro-electro-mechanical systems (MEMS) microphone assembly is provided. The assembly includes an enclosure, a MEMS transducer, and a plurality of substrate layers. The single MEMS transducer is positioned within the enclosure. The plurality of substrate layers support the single MEMS transducer. The plurality of substrate layers define a first transmission mechanism to enable a first side of the single MEMS transducer to receive an audio input signal and a second transmission mechanism to enable a second side of the single MEMS transducer to receive the audio input signal.

## Claims

### Claim 1

A micro-electro-mechanical systems (MEMS) microphone assembly comprising:
an enclosure;
a micro-electro-mechanical systems (MEMS) transducer positioned within the enclosure; and
a first substrate layer and a second substrate layer to support the MEMS transducer,
wherein the first substrate layer and the second substrate layer define a first transmission mechanism to enable a first side of the MEMS transducer to receive an audio input signal and a second transmission mechanism to enable a second side of the MEMS transducer to receive the audio input signal,
wherein the first transmission mechanism and the second transmission mechanism are positioned below the MEMS transducer;
wherein the second substrate layer defines a first sound aperture and a second sound aperture extending through the second substrate layer,
wherein a delay distance separates the first sound aperture from the second sound aperture,
wherein the delay distance is longer than an overall length of the enclosure, and
wherein the first substrate layer includes a flexible portion to form an angle of at least ninety degrees for enabling the microphone assembly to be surface mount coupled to an end user circuit board.

### Claim 2 (depends on 1)

The microphone assembly of claim 1:
wherein the enclosure defines a first acoustic port and a second acoustic port;
wherein the first acoustic port is acoustically coupled to the first transmission mechanism to enable the first side of the MEMS transducer to receive the audio input signal; and
wherein the second acoustic port is acoustically coupled to the second transmission mechanism to enable the second side of the MEMS transducer to receive the audio input signal.

### Claim 3 (depends on 1)

The microphone assembly of claim 1, wherein the enclosure defines a first acoustic cavity on the first side of the MEMS transducer and a second acoustic cavity on the second side of the MEMS transducer, wherein the first transmission mechanism includes a first acoustic hole that is directly acoustically coupled with the first acoustic cavity; and wherein the second transmission mechanism includes a second acoustic hole that is directly acoustically coupled with the second acoustic cavity.

### Claim 4 (depends on 1)

The microphone assembly of claim 1, wherein the first substrate layer is configured to electrically couple the MEMS transducer to an end user circuit assembly.

### Claim 5 (depends on 4)

The microphone assembly of claim 4 further including an electrical connector from the first substrate layer configured to electrically couple the MEMS transducer to an end user circuit board of the end user circuit assembly.

### Claim 6 (depends on 4)

The microphone assembly of claim 4, wherein the first substrate layer is configured to be surface mounted to an end user circuit board and the microphone assembly is a standalone package.

### Claim 7 (depends on 4)

The microphone assembly of claim 4, wherein the first substrate layer includes a flexible portion.

### Claim 8 (depends on 1)

The microphone assembly of claim 1, wherein the microphone assembly is formed of a surface mount technology (SMT) standalone package for being received on an end user circuit board.

### Claim 9 (depends on 8)

The microphone assembly of claim 8, wherein the SMT standalone package includes a plurality of electrical legs configured to electrically communicate with a plurality of electrical contacts on the end user circuit board.

### Claim 10 (depends on 8)

The microphone assembly of claim 8, wherein the SMT standalone package includes shared electrical routing configured to enable electrical communication with an end user circuit board.

### Claim 11 (depends on 1)

The microphone assembly of claim 1 further comprising a first acoustic resistance element including a first resistance value positioned about the first transmission mechanism and a second acoustic resistance element including a second resistance value positioned about the second transmission mechanism.

### Claim 12 (depends on 11)

The microphone assembly of claim 11, wherein the enclosure includes two outermost ends positioned opposite to one another, and wherein the delay distance is longer than an overall length between the two outermost ends of the enclosure.

### Claim 13 (depends on 1)

The microphone assembly of claim 1, wherein first sound aperture and the second sound aperture are not positioned directly below the enclosure.

### Claim 14

A micro-electro-mechanical systems (MEMS) microphone assembly comprising:
an enclosure;
a micro-electro-mechanical systems (MEMS) transducer positioned within the enclosure; and
a plurality of substrate layers including a first substrate layer and a second substrate layer to support the MEMS transducer,
wherein the first substrate layer is configured to electrically couple the MEMS transducer to an end user circuit board;
wherein the plurality of substrate layers define at least one transmission mechanism that is acoustically coupled to the MEMS transducer to enable an audio input signal to pass to the MEMS transducer,
wherein the first transmission mechanism and the second transmission mechanism are positioned below the MEMS transducer,
wherein the second substrate layer defines a first sound aperture and a second sound aperture extending through the second substrate layer,
wherein a delay distance separates the first sound aperture from the second sound aperture,
wherein the delay distance is longer than an overall length of the enclosure, and
wherein the first substrate layer includes a flexible portion to form an angle of at least ninety degrees for enabling the microphone assembly to be surface mount coupled to the end user circuit board and wherein the microphone assembly is a standalone package.

### Claim 15 (depends on 14)

The microphone assembly of claim 14, wherein the enclosure includes two outermost ends positioned opposite to one another, and wherein the delay distance is longer than an overall length between the two outermost ends of the enclosure.

### Claim 16 (depends on 14)

The microphone assembly of claim 14, wherein the first sound aperture and the second sound aperture are not positioned directly below the enclosure.

### Claim 17

A micro-electro-mechanical systems (MEMS) microphone assembly comprising:
a first enclosure;
a first micro-electro-mechanical systems (MEMS) transducer positioned within the first enclosure;
a second enclosure;
a second MEMS transducer positioned within the second enclosure; and
a plurality of substrate layers including a first substrate layer and a second substrate layer to support the first MEMS transducer and the second MEMS transducer,
wherein the plurality of substrate layers define a first transmission mechanism to enable the first MEMS transducer to receive an audio input signal and a second transmission mechanism to enable the second MEMS transducer to receive the audio input signal,
wherein the first transmission mechanism and the second transmission mechanism are positioned below the MEMS transducer;
wherein the plurality of substrate layers define a first sound aperture and a second sound aperture that are separated from one another by a delay distance, and
wherein the delay distance is longer than an overall length of the first enclosure and the second enclosure.

### Claim 18 (depends on 17)

The microphone assembly of claim 17, wherein the first sound aperture and the second sound aperture are not positioned directly below the enclosure.
