# US 10,771,042 B2 · Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof

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- Number: US 10,771,042 B2
- Document ID: US10771042B2
- Status: Granted
- Kind: B2
- Application number: 15/976,611
- Filed: 2018-05-10
- Published: 2018-11-29
- Granted: 2020-09-08
- Earliest claimed: 2017-05-25
- Assignees: STMicroeletronics S.r.l.
- Applicants: STMicroelectronics S.r.l.
- Inventors: Gabriele Gattere; Lorenzo Corso; Alessandro Tocchio; Carlo Valzasina
- Web page: https://patentgrep.com/patent/US10771042B2

## CPC

- H03H 9/02448: {of temperature influence}
- H03H 3/0076: {for obtaining desired frequency or temperature coefficients}
- H03H 9/02259: {Driving or detection means}
- H03H 9/02338: {Suspension means}
- H03H 9/2405: {of microelectro-mechanical resonators}
- H03H 9/2431: {Ring resonators}
- H03H 9/2447: {Beam resonators (H03H9/2468 takes precedence)}
- H03H 2009/02322: {Material}
- H03H 2009/02496: {Horizontal, i.e. parallel to the substrate plane}
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.

## Claims

### Claim 1

A microelectromechanical device, comprising:
a resonator that includes:
a mobile structure having a core region of a first material and a second material on the core region, the mobile structure including:
mobile arms extending in a first direction,
connecting elements connected to the mobile arms and extending in a second direction that is transverse to the first direction;
a window extending through the mobile arms and the connecting elements;
a suspension arm coupled to the connecting elements, the suspension arm extending across the window in spaced relationship with the mobile arms;
at least one anchor coupled to the suspension arm, the at least one anchor positioned inside the window; and
a fixed structure coupled to the mobile structure, the fixed structure including at least one actuating electrode and at least one detection electrode that are capacitively coupled to one of the mobile arms, one of the at least one actuating electrode and one of the at least one detection electrode being arranged inside the window and the other one of the at least one actuating electrode and the other one of the at least one detection electrode being arranged outside the window.

### Claim 2 (depends on 1)

The microelectromechanical device according to claim 1, wherein the first material is silicon oxide.

### Claim 3 (depends on 2)

The microelectromechanical device according to claim 2, wherein the fixed structure includes the first material and the second material on the first material.

### Claim 4 (depends on 1)

The device of claim 1, wherein the at least one actuating electrode includes a first actuating electrode and a second actuating electrode and the at least one detection electrode includes a first detection electrode and a second detection electrode, the first actuating electrode and the second actuating electrode positioned outside the quadrilateral and the first detection electrode and the second detection electrode positioned inside the quadrilateral.

### Claim 5 (depends on 1)

The microelectromechanical device of claim 1 wherein the suspension arm has a first side and a second opposite the first side, the at least one anchor including a first anchor and a second anchor, the first anchor coupled to the first side of the suspension arm and the second anchor coupled to the second side of the suspension arm.

### Claim 6 (depends on 1)

The microelectromechanical device according to claim 1, wherein the at least one anchor includes two anchors, the microelectromechanical device further comprising:
a connection element coupled to the suspension arm and each of the two anchors.

### Claim 7 (depends on 1)

The microelectromechanical device according to claim 1 further comprising:
a substrate, the substrate having a first surface, the mobile structure and the fixed structure extending over the first surface of the substrate;
a first insulating layer on the first surface of the substrate, the first insulating layer having a second surface spaced from the first surface of the substrate; and
a plurality of electrical connection lines on the second surface of the first insulating layer and electrically coupled to the mobile and fixed structures.

### Claim 8

An electronic apparatus, comprising:
a timing circuit configured to generate a clock signal, the timing circuit including a microelectromechanical device including:
a mobile structure including:
mobile arms having a composite structure including an insulating material and a coating material that completely surrounds the core region;
connecting elements coupled to the mobile arms; and
a window;
a suspension arm in the window and coupled to each of the connecting elements, the suspension arm having a first side and a second side opposite the first side;
a first pair of anchors coupled to the first side of the suspension arm;
a second pair of anchors coupled to the second side of the suspension arm; and
a fixed structure including an actuating electrode and a detection electrode electrically coupled to one of the mobile arms, one of the actuating electrode and the detection electrode being in the window of the mobile structure and the other one of the actuating electrode and the detection electrode being outside the window of the mobile structure; and
an application circuit coupled to the timing circuit to receive the clock signal.

### Claim 9 (depends on 8)

The electronic apparatus of claim 8, wherein the insulating material is silicon oxide and the coating material is silicon.

### Claim 10 (depends on 9)

The electronic apparatus of claim 9, wherein the fixed structure has the composite structure including silicon oxide and silicon.

### Claim 11 (depends on 8)

The electronic apparatus of claim 8, wherein the mobile arms of the mobile structure are a pair of mobile arms and the connecting elements of the mobile structure are a pair of connecting arms connected to the pair of mobile arms around a quadrilateral perimeter of the mobile structure, the window being a quadrilateral window.

### Claim 12 (depends on 11)

The electronic apparatus of claim 11, wherein the actuating electrode is one of a pair of actuating electrodes and the detection electrode is one of a pair of detection electrodes, the pairs of actuating and detection electrodes being capacitively coupled to the pair of mobile arms, wherein each of the detection electrodes is positioned in the quadrilateral window and each of the actuation electrodes is positioned outside the quadrilateral window.

### Claim 13 (depends on 12)

The electronic apparatus of claim 12, further comprising:
a substrate; and
a plurality of connection elements, a first one of the plurality of connection elements coupled to the suspension arm and each of the first pair of anchors and a second one of the plurality of connection elements coupled to the suspension arm and each of the second pair of anchors.

### Claim 14 (depends on 13)

The electronic apparatus of claim 13, wherein the substrate includes a pair of electrical connection lines electrically coupled to the actuating electrodes.

### Claim 15

A microelectromechanical device, comprising:
a substrate;
a mobile structure coupled to the substrate including:
a pair of flexible arms; and
a pair of connecting elements coupled to the pair of flexible arms around a window;
a suspension arm coupled to each connecting element of the pair of connecting elements, at least one of flexible arm of the pair of flexible arms and the suspension arm have a composite structure including a core region including a first material and a coating layer on the core region including a second material different than the first material;
a plurality of anchors in the window;
a connection element in the window and coupled to two anchors of the plurality of anchors and the suspension arm;
a first detection electrode coupled to the substrate and positioned inside the window; and
a first actuating electrode coupled to the substrate and positioned outside the window, wherein a first one of the flexible arms is capacitively coupled to the first actuating electrode and the first detection electrode.

### Claim 16 (depends on 15)

The microelectromechanical device of claim 15, wherein the suspension arm is positioned centrally with respect to the pair of flexible arms and the pair of connecting elements.

### Claim 17 (depends on 15)

The microelectromechanical device of claim 15, wherein the suspension arm includes a first side and a second side, the plurality of anchors including a first anchor on the first side of the suspension arm and a second anchor on the second side of the suspension arm.

### Claim 18 (depends on 17)

The microelectromechanical device of claim 17, further comprising:
a second detection electrode coupled to the substrate and positioned inside the window; and
a second actuating electrode coupled to the substrate and positioned outside the window, wherein a second one of the flexible arms is capacitively coupled to the second actuating electrode and the second detection electrode.

### Claim 19 (depends on 18)

The microelectromechanical device of claim 18, wherein the first detection electrode is on the first side of the suspension arm and the second detection electrode is on the second side of the suspension arm.

### Claim 20 (depends on 15)

The microelectromechanical device of claim 15, further comprising:
an insulating layer on the substrate; and
an electrical connection line on the insulating layer connected to the first actuating electrode.