# US 10,770,645 B2 · Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head

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- Number: US 10,770,645 B2
- Document ID: US10770645B2
- Status: Granted
- Kind: B2
- Application number: 16/435,998
- Filed: 2019-06-10
- Published: 2019-12-26
- Granted: 2020-09-08
- Earliest claimed: 2018-06-20
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Yoshihiro Ohashi; Yoshinori Kotani; Motokazu Kobayashi
- Web page: https://patentgrep.com/patent/US10770645B2

## CPC

- H10N 30/8554: {Lead-zirconium titanate [PZT] based}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- C04B 35/4682: {based on BaTiO3 perovskite phase}
- C04B 35/62218: {obtaining ceramic films, e.g. by using temporary supports}
- C04B 41/0072: {Heat treatment}
- C04B 41/009: {characterised by the material treated}
- C30B 1/10: by solid state reactions or multi-phase diffusion
- C30B 29/32: Titanates; Germanates; Molybdates; Tungstates
- H10N 30/078: by sol-gel deposition
- H10N 30/2047: {Membrane type}
- H10N 30/704: {based on piezoelectric or electrostrictive films or coatings}
- H10N 30/8536: {Alkaline earth metal based oxides, e.g. barium titanates}
- H10N 30/877: {Conductive materials}
- B41J 2202/03: Specific materials used
- C04B 2235/3208: Calcium oxide or oxide-forming salts thereof, e.g. lime
- C04B 2235/3244: Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
- C04B 2235/44: Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
- C04B 2235/441: Alkoxides, e.g. methoxide, tert-butoxide
- C04B 2235/449: Organic acids, e.g. EDTA, citrate, acetate, oxalate
- C04B 2235/48: Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
- C04B 2235/6567: Treatment time
- C04B 2235/768: Perovskite structure ABO3
- C04B 2235/787: Oriented grains
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR

## Abstract

An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.

## Claims

### Claim 1

An oriented piezoelectric film comprising a perovskite type crystal represented by general formula (1):
Ba1-xCaxTi1-yZryO3(0≤x≤0.2, and 0≤y≤0.2) (1),
wherein the oriented piezoelectric film is formed on a metallic electrode having a (111) orientation, and has the (111) orientation according to a pseudocubic crystal notation.

### Claim 2 (depends on 1)

The oriented piezoelectric film according to claim 1, wherein an abundance of the (111) orientation determined by a backscattered electron diffraction (EBSD) method is 50% or more on a surface of the oriented piezoelectric film, and in view of an inverse pole figure in a normal line direction of the oriented piezoelectric film, variation in angles of the (111) orientation is within 5 degrees.

### Claim 3 (depends on 1)

The oriented piezoelectric film according to claim 1, wherein the metallic electrode comprises at least one of platinum and gold.

### Claim 4 (depends on 1)

A liquid dispensing head comprising:
a liquid dispensing hole;
a pressure chamber in communication with the liquid dispensing hole; and
an actuator for changing a volume of a liquid to dispense the liquid from the liquid dispensing hole to the pressure chamber,
wherein the actuator comprises:
a vibration plate, a lower electrode, the oriented piezoelectric film according to claim 1, wherein the lower electrode is the metallic electrode, and an upper electrode, which are sequentially disposed with respect to a pressure chamber side of the actuator.