# US 10,770,641 B2 · Piezoelectric element

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- Number: US 10,770,641 B2
- Document ID: US10770641B2
- Status: Granted
- Kind: B2
- Application number: 15/720,288
- Filed: 2017-09-29
- Published: 2018-03-29
- Granted: 2020-09-08
- Earliest claimed: 2016-09-29
- Assignees: TDK Corporation
- Applicants: TDK Corporation
- Inventors: Yoshiki Ohta; Hideya Sakamoto; Kazushi Tachimoto; Nobuo Furukawa; Akihiro Takeda
- Web page: https://patentgrep.com/patent/US10770641B2

## CPC

- H10N 30/508: {adapted for alleviating internal stress, e.g. cracking control layers}
- H10N 30/871: {Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes}
- H10N 30/874: {embedded within piezoelectric or electrostrictive material, e.g. via connections}
- H10N 30/2045: {adapted for in-plane bending displacement}
- H10N 30/8536: {Alkaline earth metal based oxides, e.g. barium titanates}
- H10N 30/8542: {Alkali metal based oxides, e.g. lithium, sodium or potassium niobates}
- H10N 30/8548: {Lead-based oxides}
- H10N 30/8554: {Lead-zirconium titanate [PZT] based}
- H10N 30/8561: {Bismuth-based oxides}
- H10N 30/877: {Conductive materials}
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

A piezoelectric element includes first and second electrodes, a first piezoelectric body layer, and a plurality of first through-hole conductors. The first and second electrodes oppose each other. The first piezoelectric body layer is disposed between the first electrode and the second electrode. The plurality of first through-hole conductors penetrates the first piezoelectric body layer and is connected to the first electrode and the second electrode. When seen in an opposing direction of the first and second electrodes, the plurality of first through-hole conductors is arrayed in a matrix.

## Claims

### Claim 1

A piezoelectric element comprising:
first and second electrodes opposing each other;
a first piezoelectric body layer disposed between the first electrode and the second electrode;
a plurality of through-holes penetrating the first piezoelectric body layer; and
a plurality of first through-hole conductors disposed in the plurality of through-holes, wherein;
each of the plurality of first through-hole conductors is (1) directly connected to the first electrode and the second electrode and (2) surrounded by material of the first piezoelectric body layer; and
the plurality of first through-hole conductors includes at least three through-hole conductors that are arrayed in a matrix when seen in an opposing direction of the first and second electrodes.

### Claim 2 (depends on 1)

The piezoelectric element according to claim 1, further comprising:
a second piezoelectric body layer opposing the first piezoelectric body layer via the second electrode;
a third electrode opposing the second electrode via the second piezoelectric body layer; and
a plurality of second through-hole conductors penetrating the second piezoelectric body layer, wherein;
each of the plurality of second through-hole conductors is (1) directly connected to the second electrode and the third electrode and (2) surrounded by material of the second piezoelectric layer; and
the plurality of first through-hole conductors and the plurality of second through-hole conductors are disposed in such a way as to be separated from each other when seen in the opposing direction.

### Claim 3 (depends on 1)

The piezoelectric element according to claim 1, wherein a region demarcated by the plurality of first through-hole conductors has an n-gon shape when seen in the opposing direction, where n is an integer number equal to or larger than 4.

### Claim 4 (depends on 1)

The piezoelectric element according to claim 1, wherein the first electrode and the second electrode have a same polarity.

### Claim 5 (depends on 1)

The piezoelectric element according to claim 1, wherein the plurality of through-holes and the plurality of first through-hole conductors are each more than three.

### Claim 6 (depends on 1)

The piezoelectric element according to claim 1, wherein:
the piezoelectric body layer includes a region that includes the plurality of first through-hole conductors; and
the region is not piezoelectrically active.

### Claim 7 (depends on 1)

The piezoelectric element according to claim 1, wherein the first piezoelectric body layer includes an area sandwiched between the first electrode and the second electrode that is not piezoelectrically active.

### Claim 8 (depends on 1)

The piezoelectric element according to claim 1, wherein the plurality of first through-hole conductors form a lattice when viewed in the opposing direction, with one of the plurality of first through-hole conductors being at each intersection of lines forming the lattice.

### Claim 9 (depends on 8)

The piezoelectric element according to claim 8, wherein the lattice is a square lattice.

### Claim 10 (depends on 1)

The piezoelectric element according to claim 1, wherein the each of the plurality of first through-hole conductors is an elongated conductor with an axis in the opposing direction.
