# US 10,770,587 B2 · Semiconductor device having tipless epitaxial source/drain regions

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- Number: US 10,770,587 B2
- Document ID: US10770587B2
- Status: Granted
- Kind: B2
- Application number: 16/661,478
- Filed: 2019-10-23
- Published: 2020-02-20
- Granted: 2020-09-08
- Earliest claimed: 2007-05-14
- Assignees: Intel Corporation
- Applicants: Intel Corporation
- Inventors: Mark T. Bohr
- Web page: https://patentgrep.com/patent/US10770587B2

## CPC

- H10D 30/797: {being in source or drain regions, e.g. SiGe source or drain}
- H10D 30/024: {of fin field-effect transistors [FinFET]}
- H10D 30/0275: {forming single crystalline semiconductor source or drain regions resulting in recessed gates, e.g. forming raised source or drain regions}
- H10D 30/608: {having non-planar bodies, e.g. having recessed gate electrodes}
- H10D 30/62: Fin field-effect transistors [FinFET]
- H10D 30/6211: {having fin-shaped semiconductor bodies integral with the bulk semiconductor substrates}
- H10D 62/021: {Forming source or drain recesses by etching e.g. recessing by etching and then refilling}
- H10D 62/116: {adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions}
- H10D 62/151: {of IGFETs (of IGFETs having LDD or DDD structure H10D30/601; of thin film transistors H10D30/6713)}
- H10D 62/405: {Orientations of crystalline planes}
- H10D 62/822: comprising only Group IV materials heterojunctions, e.g. Si/Ge heterojunctions
- H10D 62/832: being Group IV materials comprising two or more elements, e.g. SiGe
- H10D 62/834: further characterised by the dopants
- H10D 64/017: {using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes}
- H10D 10/891: {comprising lattice-mismatched active layers, e.g. SiGe strained-layer transistors}
- H10D 30/605: {having significant overlap between the lightly-doped extensions and the gate electrode}
- H10D 86/011: {comprising FinFETs}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A semiconductor device having tipless epitaxial source/drain regions and a method for its formation are described. In an embodiment, the semiconductor device comprises a gate stack on a substrate. The gate stack is comprised of a gate electrode above a gate dielectric layer and is above a channel region in the substrate. The semiconductor device also comprises a pair of source/drain regions in the substrate on either side of the channel region. The pair of source/drain regions is in direct contact with the gate dielectric layer and the lattice constant of the pair of source/drain regions is different than the lattice constant of the channel region. In one embodiment, the semiconductor device is formed by using a dielectric gate stack placeholder.

## Claims

### Claim 1

A semiconductor structure, comprising:
a fin comprising semiconductor material;
a gate structure on top and side surfaces of a part of the fin, the gate structure comprising a gate electrode and a gate dielectric, the gate electrode comprising metal, the gate dielectric comprising a first portion and a second portion, the first portion at least between the gate electrode and the part of the fin and comprising a high-k dielectric material, the second portion at least between the first portion and the part of the fin and comprising oxygen, and the second portion compositionally different from the first portion;
a source region laterally adjacent to and in contact with the part of the fin, the source region extending under the gate structure and also in contact with the second portion of the gate dielectric, wherein an upper surface of the source region is above a part of the gate dielectric that is between the gate electrode and the part of the fin;
a drain region laterally adjacent to and in contact with the part of the fin, such that the part of the fin is at least partly laterally between the source region and the drain region, the drain region extending under the gate structure and also in contact with the second portion of the gate dielectric, wherein an upper surface of the drain region is above the part of the gate dielectric that is between the gate electrode and the part of the fin; and
a trench isolation structure laterally adjacent to one of the source region or the drain region, wherein a sidewall of the trench isolation structure is at an acute angle with respect to, and in contact with, the one of the source region or the drain region.

### Claim 2 (depends on 1)

The semiconductor structure of claim 1, wherein the first portion of the gate dielectric comprises one or more of hafnium, oxygen, nitrogen, silicon, lanthanum, zirconium, tantalum, barium, strontium, titanium, yttrium, aluminum, lead, scandium, niobium, or zinc.

### Claim 3 (depends on 1)

The semiconductor structure of claim 1, wherein the first portion of the gate dielectric comprises hafnium and oxygen.

### Claim 4 (depends on 1)

The semiconductor structure of claim 1, wherein the source region extends under the gate electrode, and the drain region extends under the gate electrode.

### Claim 5 (depends on 1)

The semiconductor structure of claim 1, wherein at least one of the source region or the drain region has an undercut profile of approximately 55 degrees with respect to a surface of the part of the fin adjacent to the source region or the drain region.

### Claim 6 (depends on 1)

The semiconductor structure of claim 1, further comprising: regions of dopant out-diffusion in the fin and adjacent to a periphery of the source and drain regions.

### Claim 7 (depends on 1)

The semiconductor structure of claim 1, wherein a lattice constant of the source and drain regions is larger than a lattice constant of the fin by a factor of at least 0.1%.

### Claim 8 (depends on 1)

The semiconductor structure of claim 1, wherein the source and drain regions comprise silicon and germanium and are strain-inducing with respect to the part of the fin.

### Claim 9 (depends on 1)

The semiconductor structure of claim 1, wherein the gate electrode comprises a workfunction portion and a fill portion, the workfunction portion between the fill portion and the gate dielectric.

### Claim 10 (depends on 1)

The semiconductor structure of claim 1, wherein the semiconductor structure is gate spacer-free, such that the gate electrode is not between opposing gate spacers.

### Claim 11

An integrated circuit, comprising:
a first body comprising semiconductor material;
a gate structure comprising (i) a gate electrode comprising metal, and (ii) a gate dielectric comprising an upper portion and a lower portion, the upper portion comprising high-k dielectric material between the gate electrode and the first body and along sidewalls of the gate electrode, the lower portion between the upper portion and the first body, the lower portion comprising silicon and oxygen, the lower portion compositionally different from the upper portion, the first body underneath the gate electrode;
a source region and a drain region, a portion of the source region in contact with a first portion of a bottom surface of the lower portion of the gate dielectric, the portion of the source region extends underneath at least a portion of the gate structure, a portion of the drain region in contact with a second portion of the bottom surface of the lower portion of the gate dielectric, the portion of the drain region extends under at least a portion of the gate structure;
a second body comprising one or more insulator materials, the second body including a first portion and a second portion, the first portion of the second body being laterally adjacent to the source region, the second portion of the second body laterally adjacent to the gate dielectric, the second portion of the second body over the first portion of the second body and over the source region;
wherein an upper surface of the source region is higher than an upper surface of the first portion of the second body,
wherein the upper surface of the source region is higher than the lower portion of the gate dielectric between the upper portion of the gate dielectric and the first body,
wherein the upper surface of the source region is higher than the upper portion of the gate dielectric between the gate electrode and the first body, and
wherein a sidewall of the first portion of the second body is at an acute angle with respect to, and in contact with, a sidewall of the source region.

### Claim 12 (depends on 11)

The integrated circuit of claim 11, wherein the upper portion of the gate dielectric comprises one or more of hafnium, oxygen, nitrogen, silicon, lanthanum, zirconium, tantalum, barium, strontium, titanium, yttrium, aluminum, lead, scandium, niobium, or zinc.

### Claim 13 (depends on 11)

The integrated circuit of claim 11, wherein the upper portion of the gate dielectric comprises hafnium and oxygen.

### Claim 14 (depends on 11)

The integrated circuit of claim 11, wherein the portion of the source region extends under at least a first portion of the gate electrode, and the portion of the drain region extends under at least a second portion of the gate electrode.

### Claim 15 (depends on 11)

The integrated circuit of claim 11, wherein the first body is a part of a fin, and the source region is at least in part on the fin and laterally adjacent and in contact with the first body, and the source region has an undercut profile of approximately 55 degrees with respect to a surface of the fin.

### Claim 16 (depends on 11)

The integrated circuit of claim 11, wherein the first body is a part of a fin, and the source region is at least in part on the fin and laterally adjacent and in contact with the first body, the integrated circuit further comprising:
regions of boron out-diffusion in the fin and adjacent to a periphery of the source and drain regions.

### Claim 17 (depends on 11)

The integrated circuit of claim 11, wherein a lattice constant of the source and drain regions is larger than a lattice constant of the first body by a factor of at least 0.1%.

### Claim 18 (depends on 11)

The integrated circuit of claim 11, wherein:
the source and drain regions comprise silicon and germanium and are strain-inducing with respect to the first body; and
both the first and second portions of the second body comprise silicon and oxygen.

### Claim 19 (depends on 11)

The integrated circuit of claim 11, wherein the gate electrode comprises a metal-containing layer selected from the group consisting of metal nitrides, metal carbides, metal silicides, metal aluminides, hafnium, zirconium, titanium, tantalum, aluminum, ruthenium, palladium, platinum cobalt, nickel, and conductive metal oxides.

### Claim 20 (depends on 11)

The integrated circuit of claim 11, wherein the gate structure is not between opposing gate spacers.