# US 10,770,579 B2 · SiC-MOSFET and method of manufacturing the same

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- Number: US 10,770,579 B2
- Document ID: US10770579B2
- Status: Granted
- Kind: B2
- Application number: 15/816,697
- Filed: 2017-11-17
- Published: 2018-06-28
- Granted: 2020-09-08
- Earliest claimed: 2016-12-27
- Assignees: Toyota Jidosha Kabushiki Kaisha; Denso Corporation
- Applicants: Toyota Jidosha Kabushiki Kaisha; Denso Corporation
- Inventors: Hidefumi Takaya; Yasushi Urakami; Yukihiko Watanabe
- Web page: https://patentgrep.com/patent/US10770579B2

## CPC

- H10D 30/668: {having trench gate electrodes, e.g. UMOS transistors}
- H10D 12/031: {of IGBTs}
- H10D 30/0295: {using recessing of the source electrodes}
- H10D 30/0297: {using recessing of the gate electrodes, e.g. to form trench gate electrodes}
- H10D 62/393: {Body regions of DMOS transistors or IGBTs (cell layout of DMOS H10D62/127)}
- H10D 62/8325: {Silicon carbide}
- H10D 64/2527: {for vertical devices wherein the source or drain electrodes are recessed in semiconductor bodies}
- H10D 64/256: {for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies (source or drain electrodes of TFTs H10D30/673)}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

An n-type drift region, a p-type first body region and a p-type contact region are formed on an SiC substrate by epitaxial growth. An opening is formed within the contact region by etching such that the first body region is exposed through the opening, and a p-type second body region is formed on the first body region exposed through the opening by epitaxial growth. An n-type source region is formed by epitaxial growth, and an opening is formed within a part of the source region located on the contact region by etching such that the contact region is exposed through the opening. A trench is formed by etching such that the trench extends from the source region to the drift region through the opening of the contact region, and a gate insulating film and a gate electrode are formed within the trench.

## Claims

### Claim 1

A metal-oxide-semiconductor field-effect transistor using silicon carbide as a semiconductor material (SiC-MOSFET), comprising:
a silicon carbide (SiC) substrate; and
a gate electrode located within a trench defined on the SiC substrate,
wherein the SiC substrate comprises:
an n-type drain region;
an n-type drift region located on the n-type drain region, a concentration of n-type impurities in the n-type drift region being lower than a concentration of the n-type impurities in the n-type drain region;
a p-type body region located on the n-type drift region;
a p-type contact region located on the p-type body region, the p-type contact region appearing on a surface of the SiC substrate and a concentration of p-type impurities in the p-type contact region being higher than a concentration of the p-type impurities in the p-type body region; and
an n-type source region located on the p-type body region, the n-type source region appearing on the surface of the SiC substrate and a concentration of the n-type impurities in the n-type source region being higher than the concentration of the n-type impurities in the n-type drift region,
the trench extends from the surface of the SiC substrate to the n-type drift region through the p-type body region,
the gate electrode faces the n-type source region, the p-type body region and the n-type drift region via a gate insulating film,
the p-type contact region is a layer formed by epitaxial growth and includes a portion located between the n-type source region and the p-type body region at a location apart from the trench,
the p-type body region comprises a first body region and a second body region,
a concentration of the p-type impurities in the second body region is lower than a concentration of the p-type impurities in a portion of the first body region that is in direct contact with the p-type contact region,
the second body region is in direct contact with both the n-type source region and the p-type contact region, and appears on a side surface of the trench,
the portion of the p-type contact region located between the n-type source region and the p-type body region is in direct contact with each of the first body region, the second body region and the n-type source region, and
the second body region is separated from the n-type drift region via the first body region.

### Claim 2 (depends on 1)

The SiC-MOSFET according to claim 1, wherein the first body region is separated from the n-type source region via the second body region and the p-type contact region.

### Claim 3 (depends on 1)

The SiC-MOSFET according to claim 1, wherein the second body region is separated from the n-type drift region via the first body region such that the second body region does not directly contact with the n-type drift region.

### Claim 4 (depends on 3)

The SiC-MOSFET according to claim 3, wherein the first body region is separated from the n-type source region via the second body region and the p-type contact region.

### Claim 5 (depends on 1)

The SiC-MOSFET according to claim 1, further comprising a source electrode provided on the surface of the SiC substrate,
wherein the surface of the SiC substrate comprises projections and recesses that are in direct contact with the source electrode, each recess being defined by adjacent two of the projections.

### Claim 6 (depends on 5)

The SiC-MOSFET according to claim 5, wherein
the n-type source region is in direct contact with the source electrode at top surfaces of the projections, and
the p-type contact region is in direct contact with the source electrode at bottom surfaces of the recesses.

### Claim 7 (depends on 6)

The SiC-MOSFET according to claim 6, wherein the n-type source region is further in direct contact with the source electrode at side surfaces of the projections.

### Claim 8 (depends on 6)

The SiC-MOSFET according to claim 6, wherein the source electrode is in direct contact with both the n-type source region and the p-type contact region within the recesses.

### Claim 9 (depends on 1)

The SiC-MOSFET according to claim 1, wherein
the second body region is separated from the n-type drift region via the first body region such that the second body region does not directly contact with the n-type drift region,
the first body region is separated from the n-type source region via the second body region and the p-type contact region,
the SiC-MOSFET further comprises a source electrode provided on the surface of the SiC substrate,
the surface of the SiC substrate comprises projections and recesses that are in direct contact with the source electrode, each recess being defined by adjacent two of the projections,
the n-type source region is in direct contact with the source electrode at both top surfaces and side surfaces of the projections,
the p-type contact region is in direct contact with the source electrode at bottom surfaces of the recesses, and
the source electrode is in direct contact with both the n-type source region and the p-type contact region within the recesses.