# US 10,770,538 B2 · Method and structure for dual sheet resistance trimmable thin film resistors > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,770,538 B2 - Document ID: US10770538B2 - Status: Granted - Kind: B2 - Application number: 15/976,357 - Filed: 2018-05-10 - Published: 2018-09-13 - Granted: 2020-09-08 - Earliest claimed: 2016-07-13 - Assignees: Texas Instruments Incorporated - Applicants: Texas Instruments Incorporated - Inventors: Christoph Andreas Othmar Dirnecker; Wolfgang Schwartz; Doug Weiser; Joel Martin Halbert; Joseph Anthony DeSantis; Karsten Jens Spinger - Web page: https://patentgrep.com/patent/US10770538B2 ## CPC - H10D 1/474: {comprising refractory metals, transition metals, noble metals, metal compounds or metal alloys, e.g. silicides} - H10P 34/42: with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) - H10P 50/71: {using masks for conductive or resistive materials} - H10P 76/204: {of organic photoresist masks} - H10W 20/42: Vias, e.g. via plugs - H10W 20/498: {Resistive arrangements or effects of, or between, wiring layers} - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A method of forming an electronic device includes forming an opening through a dielectric layer located over a first resistive layer, the first resistive layer having a first sheet resistance. A second resistive layer is deposited over the dielectric layer and into the opening. The second resistive layer has a second sheet resistance different from the first sheet resistance. A portion of the second resistive layer is removed, thereby forming first and second noncontiguous portions of the second resistive layer, wherein the second portion of the second resistive layer contacts the first resistive layer. ## Claims ### Claim 1 A method of forming an electronic device, comprising: forming an opening through a dielectric layer located over a first resistive layer with a first sheet resistance; depositing a second resistive layer over said dielectric layer and into said opening, said second resistive layer having a lower second sheet resistance; and removing a portion of said second resistive layer, thereby forming a first portion of said second resistive layer over said dielectric layer, and a noncontiguous second portion of said second resistive layer in contact with said first resistive layer. ### Claim 2 (depends on 1) The method of claim 1, wherein said first resistive layer is thinner than said second resistive layer. ### Claim 3 (depends on 1) The method of claim 1, wherein said first and second resistive layers are formed from a same material. ### Claim 4 (depends on 3) The method of claim 3, wherein said same material comprises polysilicon. ### Claim 5 (depends on 1) The method of claim 1, further comprising forming a second dielectric layer, between said first resistive layer and said first dielectric layer. ### Claim 6 (depends on 5) The method of claim 5, wherein said second resistive layer contacts a noncontiguous portion of said first resistive layer through an opening in said second dielectric layer. ### Claim 7 (depends on 1) The method of claim 1, wherein said opening is a first opening, and further comprising: forming a second opening in said dielectric layer located over a noncontiguous portion of said first resistive layer; and depositing said second resistive layer into said second opening. ### Claim 8 (depends on 1) The method of claim 1, further comprising: forming first and second vias that contact said second resistive layer at respective first and second locations; and forming a third via that contacts said noncontiguous second portion, and a fourth via that contacts said first resistive layer via a noncontiguous third portion of said second resistive layer. ### Claim 9 (depends on 1) The method of claim 1, wherein said first portion of said second resistive layer is spaced apart from a substrate by a first distance, and a part of said noncontiguous second portion is spaced apart from said substrate by a second greater distance. ### Claim 10 (depends on 1) The method of claim 1, wherein a part of said noncontiguous layer is spaced apart from said first resistive layer by a first thinner dielectric layer and a second thicker dielectric layer. ### Claim 11 (depends on 10) The method of claim 10, wherein said first thinner dielectric layer is located between said thicker dielectric layer and said first resistive layer. ### Claim 12 (depends on 10) The method of claim 10, wherein said first thinner dielectric layer and said second thicker dielectric layer both comprise silicon dioxide. ### Claim 13 (depends on 1) The method of claim 1, further comprising laser-trimming said first resistive layer or said portion of said second resistive layer. ### Claim 14 (depends on 1) The method of claim 1, further comprising forming a first linear array of vias that connect to said first portion of said second resistive layer. ### Claim 15 A method of forming an electronic device, comprising: forming an opening through a dielectric layer located over a first resistive layer with a first thickness; depositing a second resistive layer over said dielectric layer and into said opening, said second resistive layer having a greater second thickness; and removing a portion of said second resistive layer, thereby forming a first portion of said second resistive layer over said dielectric layer, and a noncontiguous second portion of said second resistive layer in contact with said first resistive layer. ### Claim 16 (depends on 15) The method of claim 15, wherein said first resistive layer has a thickness in a range between about 1 nm and about 30 nm, and said second resistive layer has a thickness in a range between about 20 nm to about 300 nm. ### Claim 17 (depends on 15) The method of claim 15, wherein said first resistive layer has a sheet resistance greater than about 200 Ω/□, and said second resistive layer has a sheet resistance in a range between about 10 Ω/□ and 200 Ω/□. ### Claim 18 (depends on 1) The method of claim 1, wherein said noncontiguous second portion extends over said dielectric layer. ### Claim 19 (depends on 15) The method of claim 15, wherein said noncontiguous second portion extends over said dielectric layer. ### Claim 20 A method of forming an electronic device, comprising: forming a first opening through a dielectric layer located over a first resistive layer with a first sheet resistance; forming a second opening through the dielectric layer over a noncontiguous portion of the first resistive layer; depositing a second resistive layer over the dielectric layer and into the first and second openings, the second resistive layer having a second sheet resistance; and removing a portion of the second resistive layer, thereby forming a first portion of the second resistive layer over the dielectric layer, and a noncontiguous second portion of the second resistive layer in contact with the first resistive layer. ### Claim 21 (depends on 20) The method of claim 20, wherein the noncontiguous second portion of the second resistive layer contacts the first resistive layer.