# US 10,770,511 B2 · Structures and methods for embedded magnetic random access memory (MRAM) fabrication > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,770,511 B2 - Document ID: US10770511B2 - Status: Granted - Kind: B2 - Application number: 16/264,935 - Filed: 2019-02-01 - Published: 2019-05-30 - Granted: 2020-09-08 - Earliest claimed: 2017-10-31 - Assignees: International Business Machines Corporation - Applicants: International Business Machines Corporation - Inventors: Lawrence A. Clevenger; Nicholas A. Lanzillo; Michael Rizzolo; Theodorus E. Standaert - Web page: https://patentgrep.com/patent/US10770511B2 ## CPC - H10B 61/22: {of the field-effect transistor [FET] type} - G11C 11/161: {details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell} - H10N 50/01: Manufacture or treatment - H10N 50/10: Magnetoresistive devices - H10N 50/80: Constructional details - H10B: ELECTRONIC MEMORY DEVICES - G11C: STATIC STORES (semiconductor memory devices H10B) - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract A magnetic random access memory (MRAM) device includes a conductor disposed in an insulating material of a lower wiring layer, a magnetic tunnel junction (MTJ) structure formed in an upper wiring layer, and a landing pad formed in an intermediary wiring layer between the lower and upper wiring layers, the landing pad extending from a top surface of the conductor to a height above the intermediary wiring layer, wherein the landing pad connects the MJT structure to the conductor. ## Claims ### Claim 1 A magnetic random access memory (MRAM) device, comprising: at least one conductor disposed in an insulating material of a lower wiring layer; a magnetic tunnel junction (MTJ) structure formed in an upper wiring layer; and a landing pad formed in an intermediary wiring layer between the lower and upper wiring layers, the landing pad extending from a top surface of the at least one conductor to a height above the intermediary wiring layer and traversing multiple wiring layers in addition to the intermediary wiring layer, wherein the landing pad directly contacts the MTJ and connects the MTJ structure to the at least one conductor. ### Claim 2 (depends on 1) The MRAM device of claim 1, wherein the landing pad is formed from the same material such that the landing pad is free of interfaces. ### Claim 3 (depends on 1) The MRAM device of claim 1, further comprising spacers formed on sidewalls of the MTJ structure to prevent diffusion and protect the MTJ structure from subsequent processing. ### Claim 4 (depends on 1) The MRAM device of claim 1, further comprising contacts disposed in the upper wiring level on the MTJ structure. ### Claim 5 (depends on 1) The MRAM device of claim 1, further comprising at least one etch stop layer disposed between the lower wiring layer and the intermediary wiring layer. ### Claim 6 (depends on 1) The MRAM device of claim 1, further comprising at least one etch stop layer disposed between the intermediary wiring layer and the upper wiring layer. ### Claim 7 (depends on 1) The MRAM device of claim 1, wherein the landing pad is in direct contact with the MTJ structure in the upper wiring layer and the at least one conductor in the lower wiring layer. ### Claim 8 (depends on 1) The device of claim 1, wherein the MTJ structure further comprises: at least two magnetic layers; and a non-magnetic tunnel barrier layer separating the at least two magnetic layers, wherein the at least two magnetic layers and the non-magnetic tunnel barrier layer are patterned to form the MTJ structure. ### Claim 9 A magnetic random access memory (MRAM) device, comprising: at least one conductor disposed in an insulating material of a lower wiring layer; an intermediary wiring layer having metallization lines formed in an insulating material; a via in the insulating material of the intermediary wiring layer down to the lower wiring layer in an MRAM region to expose the at least one conductor; a landing pad formed of a conductive material deposited in the via, the landing pad extending from a top surface of the at least one conductor to a height above the intermediary wiring layer and traversing multiple wiring layers in addition to the intermediary wiring layer; and a magnetic tunnel junction (MTJ) structure formed in an upper wiring layer and in direct contact with the landing pad, wherein the landing pad connects the MTJ structure to the at least one conductor. ### Claim 10 (depends on 9) The device of claim 9, wherein the landing pad is formed from a same material such that the landing pad is free of interfaces. ### Claim 11 (depends on 9) The device of claim 9, further comprising spacers formed on sidewalls of the MTJ structure to prevent diffusion and protect the MTJ structure from subsequent processing. ### Claim 12 (depends on 9) The device of claim 9, further comprising at least one etch stop layer conformally deposited between the lower wiring layer and the intermediary wiring layer. ### Claim 13 (depends on 9) The device of claim 9, further comprising at least one etch stop layer conformally deposited between the intermediary wiring layer and the upper wiring layer. ### Claim 14 (depends on 9) The device of claim 9, wherein the MTJ structure further comprises: at least two magnetic layers; and a non-magnetic tunnel barrier layer separating the at least two magnetic layers, wherein the at least two magnetic layers and the non-magnetic tunnel barrier layer are patterned to form the MTJ structure. ### Claim 15 (depends on 9) The device of claim 9, further comprising a dielectric material deposited above the intermediary wiring level and around the MTJ structure to form the upper wiring level. ### Claim 16 (depends on 9) The device of claim 9, wherein the landing pad is in direct contact with the at least one conductor in the lower wiring layer. ### Claim 17 A magnetic random access memory (MRAM) device, comprising: at least one conductor disposed in an insulating material of a lower wiring layer; at least two magnetic layers formed in an upper wiring layer; and a non-magnetic tunnel barrier layer separating the at least two magnetic layers, the at least two magnetic layers and the non-magnetic tunnel barrier layer being patterned to form a magnetic tunnel junction (MTJ) structure; a landing pad formed in an intermediary wiring layer between the lower and upper wiring layers, the landing pad extending from a top surface of the at least one conductor to a height above the intermediary wiring layer and traverses multiple wiring layers in addition to the intermediary wiring layer, wherein the landing pad is in direct contact with the MTJ structure and the at least one conductor; and at least one etch stop layer disposed between the lower wiring layer and the intermediary wiring layer. ### Claim 18 (depends on 17) The MRAM device of claim 17, wherein the landing pad is formed from the same material such that the landing pad is free of interfaces. ### Claim 19 (depends on 17) The MRAM device of claim 17, further comprising spacers formed on sidewalls of the MTJ structure to prevent diffusion and protect the MTJ structure from subsequent processing. ### Claim 20 (depends on 17) The MRAM device of claim 17, further comprising contacts disposed in the upper wiring level on the MTJ structure.