# US 10,770,504 B2 · Wide spectrum optical sensor

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- Number: US 10,770,504 B2
- Document ID: US10770504B2
- Status: Granted
- Kind: B2
- Application number: 16/207,622
- Filed: 2018-12-03
- Published: 2019-04-04
- Granted: 2020-09-08
- Earliest claimed: 2015-08-27
- Assignees: Artilux, Inc.
- Applicants: Artilux, Inc.
- Inventors: Yun-Chung Na; Szu-Lin Cheng; Shu-Lu Chen; Han-Din Liu; Hui-Wen Chen; Che-Fu Liang
- Web page: https://patentgrep.com/patent/US10770504B2

## CPC

- H10F 39/1825: {Multicolour image sensors having stacked structure, e.g. NPN, NPNPN or multiple quantum well [MQW] structures}
- H02S 40/44: Means to utilise heat energy, e.g. hybrid systems producing warm water and electricity at the same time (directly associated with the PV cell or integrated with the PV cell H10F77/67)
- H10F 30/221: the potential barrier being a PN homojunction
- H10F 30/223: the potential barrier being a PIN barrier
- H10F 30/288: {the devices being sensitive to multiple wavelengths, e.g. multi-spectrum radiation detection devices}
- H10F 39/103: {the at least one element covered by H10F30/00 having potential barriers, e.g. integrated devices comprising photodiodes or phototransistors}
- H10F 39/1847: {Multispectral infrared image sensors having a stacked structure, e.g. NPN, NPNPN or multiple quantum well [MQW] structures}
- H10F 77/122: comprising only Group IV materials
- H10F 77/147: {Shapes of bodies}
- Y02E 10/50: Photovoltaic [PV] energy
- Y02E 10/60: Thermal-PV hybrids
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H02S: GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES (obtaining electrical energy from radioactive sources G21H1/12; light sensitive inorganic semiconductor devices H10F; light sensitive organic semiconductor devices H10K30/00; thermoelectric devices H10N10/00; pyroelectric devices H10N15/00)
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

## Abstract

An optical sensor including a semiconductor substrate; a first light absorption region formed in the semiconductor substrate, the first light absorption region configured to absorb photons at a first wavelength range and to generate photo-carriers from the absorbed photons; a second light absorption region formed on the first light absorption region, the second light absorption region configured to absorb photons at a second wavelength range and to generate photo-carriers from the absorbed photons; and a sensor control signal coupled to the second light absorption region, the sensor control signal configured to provide at least a first control level and a second control level.

## Claims

### Claim 1

An optical sensor comprising:
a semiconductor substrate;
a first gate formed on the semiconductor substrate;
a die supported by the semiconductor substrate;
a first light absorption region formed in the die, wherein the first light absorption region is configured to:
absorb first photons at a first wavelength range; and
generate first photo-carriers from the absorbed first photons;
a bonding layer between the semiconductor substrate and the die, wherein a part of the bonding layer is between the first gate and the die;
a second light absorption region formed in the semiconductor substrate, wherein the second light absorption region is configured to:
absorb second photons at a second wavelength range; and
generate second photo-carriers from the absorbed second photons; and
a first carrier-collection region formed in the semiconductor substrate, wherein the first carrier-collection region is configured to collect a portion of the first photo-carriers and has a polarity; and
a second carrier-collection region formed in the semiconductor substrate, wherein the second carrier-collection region is configured to collect a portion of the second photo-carriers and has a polarity opposite to the polarity of the first carrier-collection region.

### Claim 2 (depends on 1)

The optical sensor of claim 1, wherein the portion of the first photo-carriers collected by the first carrier-collection region are provided by the first light absorption region, the optical sensor further comprising:
a first readout region coupled to a first readout circuitry and has a polarity, the first readout region configured to provide the portion of the first photo-carriers collected by the first carrier-collection region to the first readout circuitry;
and a second readout region coupled to a second readout circuitry, wherein the second readout region has a polarity opposite to the polarity of the first readout region.

### Claim 3 (depends on 2)

The optical sensor of claim 2, further comprising:
a first control signal source coupled to the first gate, wherein a first control signal from the first control signal source controls carrier transport between the first carrier-collection region and the first readout region.

### Claim 4 (depends on 3)

The optical sensor of claim 3, further comprising:
a second gate formed on the semiconductor substrate, wherein:
the second gate is coupled to a second control signal source; and
a second control signal from the second control signal source controls carrier transport between the second carrier-collection region and the second readout region.

### Claim 5 (depends on 2)

The optical sensor of claim 2, wherein the portion of the second photo-carriers are distinct from the portion of the first photo-carriers.

### Claim 6 (depends on 2)

The optical sensor of claim 2, further comprising:
a second gate formed on the semiconductor substrate, wherein:
the second gate is coupled to a second control signal source; and
a second control signal from the second control signal source controls carrier transport between the second carrier-collection region and the second readout region.

### Claim 7 (depends on 2)

The optical sensor of claim 2, wherein the portion of the second photo-carriers collected by the second carrier-collection region are provided by the second light absorption region,
and the second readout region configured to provide the portion of the second photo-carriers collected by the second carrier-collection region to the second readout circuitry.

### Claim 8 (depends on 2)

The optical sensor of claim 2, wherein the first wavelength range is distinct from the second wavelength range.

### Claim 9 (depends on 1)

The optical sensor of claim 1, wherein the first carrier-collection region is between the second carrier-collection region and the first light absorption region.

### Claim 10

An optical sensor comprising:
a semiconductor substrate;
a first gate formed on the semiconductor substrate;
a die supported by the semiconductor substrate;
a first light absorption region formed in the die, wherein the first light absorption region is configured to:
absorb first photons at a first wavelength range; and
generate first photo-carriers from the absorbed first photons;
a bonding layer between the semiconductor substrate and the die, wherein a part of the bonding layer is between the first gate and the die;
a second light absorption region formed in the semiconductor substrate, wherein the second light absorption region is configured to:
absorb second photons at a second wavelength range; and
generate second photo-carriers from the absorbed second photons;
a first readout region coupled to a first readout circuitry, wherein the first readout region has a polarity; and
a second readout region coupled to a second readout circuitry, wherein the second readout region has a polarity opposite to the polarity of the first readout region.

### Claim 11 (depends on 10)

The optical sensor of claim 10, further comprising:
a second gate formed on the semiconductor substrate, wherein a part of the bonding layer is between the second gate and the die.

### Claim 12 (depends on 10)

The optical sensor of claim 10, wherein the first wavelength range is distinct from the second wavelength range.

### Claim 13 (depends on 10)

The optical sensor of claim 10, wherein the second light absorption region and the first light absorption region overlap along a direction of an optical signal.

### Claim 14

An optical sensor comprising:
a semiconductor substrate;
a first gate formed on the semiconductor substrate;
a die supported by the semiconductor substrate;
a first light absorption region formed in the die, wherein the first light absorption region is configured to:
absorb first photons at a first wavelength range; and
generate first photo-carriers from the absorbed first photons; and
a bonding layer between the semiconductor substrate and the die, wherein a part of the bonding layer is between the first gate and the die;
a second light absorption region formed in the semiconductor substrate, wherein the second light absorption region is configured to:
absorb second photons at a second wavelength range; and
generate second photo-carriers from the absorbed second photons;
a first carrier-collection region formed in the semiconductor substrate; and
a second carrier-collection region formed in the semiconductor substrate, wherein the first carrier-collection region is between second carrier-collection region and the first light absorption region.

### Claim 15 (depends on 14)

The optical sensor of claim 14, wherein a surface of the first light absorption region is flush with a surface of the die.

### Claim 16 (depends on 14)

The optical sensor of claim 14, wherein the first light absorption region comprises a p-doped region, an n-doped region, and an intrinsic region formed between the p-doped region and the n-doped region.

### Claim 17 (depends on 14)

The optical sensor of claim 14, wherein the first light absorption region comprises an intrinsic region comprising germanium.

### Claim 18 (depends on 14)

The optical sensor of claim 14, wherein the optical sensor further comprises:
a first readout region coupled to a first readout circuitry, the first readout region configured to provide a portion of the first photo-carriers collected by the first carrier-collection region to the first readout circuitry.

### Claim 19 (depends on 18)

The optical sensor of claim 18, further comprising:
a second readout region coupled to a second readout circuitry, the second readout region configured to provide the portion of the second photo-carriers collected by the second carrier-collection region to the second readout circuitry.
