# US 10,770,497 B2 · Color filter array, imagers and systems having same, and methods of fabrication and use thereof

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- Number: US 10,770,497 B2
- Document ID: US10770497B2
- Status: Granted
- Kind: B2
- Application number: 16/508,188
- Filed: 2019-07-10
- Published: 2019-10-31
- Granted: 2020-09-08
- Earliest claimed: 2006-08-28
- Assignees: Micron Technology, Inc.
- Applicants: Micron Technology, Inc.
- Inventors: Loriston Ford; Ulrich C. Boettiger
- Web page: https://patentgrep.com/patent/US10770497B2

## CPC

- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- H10F 39/024: {of coatings or optical elements}
- H10F 39/026: {Wafer-level processing}
- H10F 39/8053: {Colour filters}
- H10F 39/8057: {Optical shielding}
- H10F 39/8063: {Microlenses}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

A pixel cell with a photosensitive region formed in association with a substrate, a color filter formed over the photosensitive region, the color filter comprising a first material layer and a second material layer formed in association with the first shaping material layer.

## Claims

### Claim 1

An imager comprising:
a pixel cell array formed in a substrate, the pixel cell array having an array of at least first, second and third photosensors; and
a color filter array corresponding to the array of photosensors, and comprising respective shaped layers formed over first, second and third base materials,
wherein at least one of the shaped layers has a top portion with a shape that is different than a further shape of a top portion of another of the shaped layers, wherein the difference in the shape and the further shape is defined at least in part by a different base material and one or more spacing objects formed between adjacent ones of the first, second and third base materials.

### Claim 2 (depends on 1)

The imager of claim 1, wherein a height of the spacing objects is substantially the same as one or more of the first, second and third base materials.

### Claim 3 (depends on 1)

The imager of claim 1, wherein a height of the spacing objects is higher than at least one of the first, second and third base materials.

### Claim 4 (depends on 1)

The imager of claim 1, wherein a height of the spacing objects is substantially the same as the second base material and higher than the first base material.

### Claim 5

A processor system, comprising:
a processor; and
an imager coupled to the processor, the imager comprising;
a pixel cell array formed in a substrate, the pixel cell array having an array of at least first, second, and third photosensors;
a color filter array comprising at least first, second, and third color filters corresponding to the first, second, and third photosensors, each of the first, second, and third color filters comprising respective first, second, and third conforming layers formed over first, second, and third base structures, wherein
the first, second, and third conforming layers are shaped according to colors associated with the corresponding first, second, and third photosensors, and
peripheral edges of the first, second, and third conforming layers are separated by one of more distances along a lateral plane; and
a microlens array formed over the color filer array.

### Claim 6 (depends on 5)

The processor system of claim 5, wherein the first, second, and third base structures have respective first, second, and third heights, and wherein the first, second, and third heights are different from one another.

### Claim 7 (depends on 6)

The processor system of claim 6, wherein the first, second, and third color filters have respective first, second, and third radius of curvatures, and wherein the first, second, and third radius of curvatures are different from one another.

### Claim 8 (depends on 7)

The processor system of claim 7, wherein the first, second, and third radius of curvatures have corresponding first, second, and third focal lengths, each corresponding to a different depth of respective photosensors.

### Claim 9 (depends on 5)

The processor system of claim 5, wherein at least one of the color filters has a conforming layer having a middle portion lower than an edge of the conforming layer.

### Claim 10 (depends on 5)

The processor system of claim 5, wherein the processing system is a digital camera system.

### Claim 11 (depends on 10)

The processor system of claim 10, wherein the processing system is a video camera system.

### Claim 12 (depends on 10)

The processor system of claim 10, wherein the processing system is a still camera system.

### Claim 13 (depends on 5)

The processor system of claim 5, further comprising spacer structures between each of the first, second, and third base structures.

### Claim 14 (depends on 13)

The processor system of claim 13, wherein a height of each of the plurality of spacers is substantially the same as one or more of the first, second, and third base structures.

### Claim 15 (depends on 13)

The processor system of claim 13, wherein a height of each of the plurality of spacers is higher than at least one of the first, second, and third base structures.

### Claim 16 (depends on 13)

The processor system of claim 13, wherein a height of each of the plurality of spacers is substantially the same as the second base structure and higher than the first base structure.

### Claim 17 (depends on 16)

The processor system of claim 16, wherein at least one of the first, second, and third conforming layers has a shape defined at least in part by the respective base material and the corresponding spacer structure.

### Claim 18 (depends on 5)

The processor system of claim 5, wherein one of the first, second, and third base structures has a different width than the other two of the first, second, and third base structures.

### Claim 19 (depends on 5)

The processor system of claim 5, wherein the base structures are separated by one or more distances along a horizontal plane.