# US 10,770,423 B2 · Clamping system, wire bonding machine, and method for bonding wires

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- Number: US 10,770,423 B2
- Document ID: US10770423B2
- Status: Granted
- Kind: B2
- Application number: 15/472,812
- Filed: 2017-03-29
- Published: 2017-10-19
- Granted: 2020-09-08
- Earliest claimed: 2016-04-15
- Assignees: Semiconductor Manufacturing International (Shanghai) Corporation; Semiconductor Manufacturing International (Beijing) Corporation
- Applicants: Semiconductor Manufacturing International (Shanghai) Corporation; Semiconductor Manufacturing International (Beijing) Corporation
- Inventors: Qi Liu
- Web page: https://patentgrep.com/patent/US10770423B2

## CPC

- B23K 20/26: Auxiliary equipment
- H10W 72/075: {of bond wires}
- B23K 20/004: {Wire welding}
- B23K 2101/40: Semiconductor devices
- B23K 2101/42: Printed circuits
- H10W 72/07141: {Means for applying energy, e.g. ovens or lasers}
- H10W 72/07168: {Means for storing or moving the material for the connector}
- H10W 72/07173: {Means for moving chips, wafers or other parts, e.g. conveyor belts}
- H10W 72/07178: {Means for aligning}
- H10W 72/07521: {Aligning}
- H10W 72/07531: {Techniques}
- H10W 90/754: {between a chip and a stacked insulating package substrate, interposer or RDL}
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A clamping system, a wire bonding machine and a method for bonding wires are provided. An exemplary clamping system includes a clamping device. The clamping device includes: at least one linear guide rail; a first clamping rod arranged perpendicular to the linear guide rail; and a second clamping rod arranged perpendicular to the linear guide rail and parallel to the first clamping rod.

## Claims

### Claim 1

A clamping system in a wire bonding machine, comprising:
a clamping device including:
at least one linear guide rail;
a first clamping rod arranged perpendicular to the linear guide rail;
a second clamping rod arranged perpendicular to the linear guide rail and parallel to the first clamping rod; and
a plurality of card slots spaced apart from one another along a rail guiding direction on the linear guide rail, the plurality of card slots being capable of mounting one or more of the first clamping rod and the second clamping rod.

### Claim 2 (depends on 1)

The system according to claim 1, further including:
more than one the linear guide rails, arranged in parallel with one another.

### Claim 3 (depends on 1)

The system according to claim 1, further including:
a heating device formed at a bottom of the clamping device and fixedly connected to the clamping device.

### Claim 4 (depends on 3)

The system according to claim 3, wherein the heating device includes:
a positioning block, fixedly connected to the clamping device; and
a heating block, connected to the positioning block, wherein the positioning block is configured to adjust a position of the heating block.

### Claim 5 (depends on 4)

The system according to claim 4, wherein the positioning block includes:
a first positioning screw rod, screwed to the heating block, wherein the heating block moves along an axis direction of the first positioning screw rod when rotating the first positioning screw rod; and
a second positioning screw rod, arranged perpendicular to the first positioning screw rod and screwed to the heating block, wherein the heating block moves along an axis direction of the second positioning screw rod when rotating the second positioning screw rod.

### Claim 6 (depends on 4)

The system according to claim 4, wherein the heating block includes:
a base part, connected to the positioning block; and
a heating part, fixedly connected to the base part, wherein a distance between the heating part and the base part is adjustable.

### Claim 7 (depends on 6)

The system according to claim 6, wherein:
the heating part and the base part are in a threaded connection or a pin connection.

### Claim 8 (depends on 6)

The system according to claim 6, further including:
a ceramic heating rod, fixedly connected to the heating part; and
a heating rod cable, fixedly connected to the ceramic heating rod.

### Claim 9 (depends on 6)

The system according to claim 6, wherein the base part includes:
a first screw hole, wherein a first positioning screw rod is connected to the base part through the first screw hole; and
a second screw hole, wherein a second positioning screw rod is connected to the base part through the second screw hole.

### Claim 10

A wire bonding machine, comprising:
a clamping device including:
at least one linear guide rail;
a first clamping rod arranged perpendicular to the linear guide rail;
a second clamping rod arranged perpendicular to the linear guide rail and parallel to the first clamping rod; and
a plurality of card slots spaced apart from one another along a rail guiding direction on the linear guide rail, the plurality of card slots being capable of mounting one or more of the first clamping rod and the second clamping rod.

### Claim 11 (depends on 10)

The machine according to claim 10, further including:
a heating device formed at a bottom of the clamping device and fixedly connected to the clamping device.

### Claim 12 (depends on 1)

The system according to claim 1, wherein:
side surfaces, of the first clamping rod and the second clamping rod, that face toward each other include rubber coating layers.

### Claim 13 (depends on 1)

The system according to claim 1, wherein:
side surfaces, of the first clamping rod and the second clamping rod, that face toward each other are configured with grooves used to clamp ends of a clamping object.

### Claim 14 (depends on 1)

The system according to claim 1, wherein:
at least one of the first clamping rod and the second clamping rod is capable of moving along the linear guide rail.

### Claim 15 (depends on 14)

The system according to claim 14, further including:
a driving component mounted on the linear guide rail, wherein the driving component drives one or more of the first clamping rod and the second clamping rod to move along the linear guide rail, wherein the driving component includes one of a driving screw rod and a spring.

### Claim 16 (depends on 15)

The system according to claim 15, wherein:
when the driving component is the driving screw,
a guide rail groove accommodating the driving screw rod is formed on the linear guide rail along a rail guiding direction; and
the driving screw rod is driven by and thread-connected to one of the first clamping rod and the second clamping rod.

### Claim 17 (depends on 15)

The system according to claim 15, wherein:
when the driving component is the spring,
the spring has one end fixed to the linear guide rail, and has another end connected to one of the first clamping rod and the second clamping rod for driving the spring; and
the spring is elastically deformed along a rail guiding direction.

### Claim 18 (depends on 10)

The machine according to claim 10, wherein:
side surfaces, of the first clamping rod and the second clamping rod, that face toward each other include rubber coating layers.

### Claim 19 (depends on 10)

The machine according to claim 10, wherein:
side surfaces, of the first clamping rod and the second clamping rod, that face toward each other are configured with grooves used to clamp ends of a clamping object.

### Claim 20 (depends on 10)

The machine according to claim 10, wherein:
at least one of the first clamping rod and the second clamping rod is capable of moving along the linear guide rail.

### Claim 21 (depends on 20)

The machine according to claim 20, wherein the clamping device further includes:
a driving component mounted on the linear guide rail, wherein the driving component drives one or more of the first clamping rod and the second clamping rod to move along the linear guide rail, wherein the driving component includes one of a driving screw rod and a spring.
