# US 10,770,372 B2 · Fluid routing devices and methods for cooling integrated circuit packages

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- Number: US 10,770,372 B2
- Document ID: US10770372B2
- Status: Granted
- Kind: B2
- Application number: 15/274,335
- Filed: 2016-09-23
- Published: 2018-03-29
- Granted: 2020-09-08
- Earliest claimed: 2016-09-23
- Assignees: Altera Corporation
- Applicants: Altera Corporation
- Inventors: Ravi Gutala; Arif Rahman; Aravind Dasu; Thomas Sarvey; Devdatta Kulkarni
- Web page: https://patentgrep.com/patent/US10770372B2

## CPC

- H10W 40/47: by flowing liquids, e.g. forced water cooling
- G06F 1/20: Cooling means
- G06F 30/39: Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347)
- G06F 30/398: Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36)
- H10W 40/00: Arrangements for thermal protection or thermal control (integrated devices comprising arrangements for thermal protection H10D89/60)
- H10W 40/037: {Assembling together parts thereof}
- H10W 40/22: characterised by their shape, e.g. having conical or cylindrical projections
- H10W 40/226: {characterised by projecting parts, e.g. fins to increase surface area (leadframes for cooling H10W70/461)}
- H10W 40/228: {the projecting parts being wire-shaped or pin-shaped}
- H10W 40/40: involving heat exchange by flowing fluids
- G06F 2119/08: Thermal analysis or thermal optimisation
- G06F 2200/201: Cooling arrangements using cooling fluid
- H10W 40/237: {attached to additional arrangements for cooling}
- H10W 40/611: {Bolts or screws}
- H10W 72/877: {Bump connectors and die-attach connectors}
- H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)

## Abstract

A fluid routing device includes a fluid inlet, first vertical channels, a horizontal channel, a second vertical channel, and a fluid outlet. The first vertical channels are open to the fluid inlet. The horizontal channel is open to each of the first vertical channels. The first vertical channels are oriented to provide fluid coolant from the fluid inlet vertically down to the horizontal channel. The horizontal channel is open on one side such that fluid coolant in the horizontal channel directly contacts an apparatus attached to a bottom of the fluid routing device. The second vertical channel is open to the horizontal channel. The second vertical channel is oriented to provide fluid coolant vertically up away from the horizontal channel. The fluid outlet is open to the second vertical channel such that fluid coolant from the second vertical channel exits the fluid routing device through the fluid outlet.

## Claims

### Claim 1

A fluid routing device comprising:
a fluid inlet;
first vertical channels that are open to the fluid inlet;
a horizontal channel that is open to each of the first vertical channels, wherein the first vertical channels are oriented to provide fluid coolant from the fluid inlet vertically down to the horizontal channel, and wherein the horizontal channel is open on one side of the fluid routing device such that an apparatus attached to a bottom of the fluid routing device forms a sidewall of the horizontal channel;
second vertical channels that are open to the horizontal channel, wherein the second vertical channels are oriented to provide fluid coolant vertically up away from the horizontal channel, wherein the first vertical channels are interleaved between the second vertical channels, and wherein each of the first vertical channels and each of the second vertical channels is directly connected at one end to the horizontal channel; and
a fluid outlet that is open to the second vertical channels such that fluid coolant from the second vertical channels exits the fluid routing device through the fluid outlet,
wherein each of the first vertical channels has a constricted opening to the horizontal channel directly above the horizontal channel, wherein a width of the constricted opening of each of the first vertical channels is narrower than a width of the first vertical channel above the constricted opening, and wherein an opening of each of the second vertical channels to the horizontal channel directly above the horizontal channel is wider than the constricted opening to the horizontal channel of each of the first vertical channels.

### Claim 2 (depends on 1)

The fluid routing device of claim 1, wherein the first vertical channels comprise at least four vertical channels, and wherein the second vertical channels comprise at least four vertical channels.

### Claim 3 (depends on 1)

The fluid routing device of claim 1, wherein each of the first and second vertical channels is rectangular in shape from a bottom up perspective of the fluid routing device.

### Claim 4 (depends on 1)

The fluid routing device of claim 1, wherein each of the first and second vertical channels is circular in shape from a bottom up perspective of the fluid routing device.

### Claim 5 (depends on 1)

The fluid routing device of claim 1, wherein each of the first vertical channels is circular in shape from a bottom up perspective of the fluid routing device.

### Claim 6 (depends on 1)

The fluid routing device of claim 1, wherein the first vertical channels comprise at least three vertical channels, and wherein the second vertical channels comprise at least three vertical channels.

### Claim 7 (depends on 1)

The fluid routing device of claim 1, wherein the first and second vertical channels are circular in shape and are arranged in multiple rows in the fluid routing device from a bottom up perspective of the fluid routing device.

### Claim 8 (depends on 1)

The fluid routing device of claim 1 further comprising:
a groove in the bottom of the fluid routing device, wherein the groove surrounds the first and second vertical channels, and wherein the groove is sized to receive an O-ring in an apparatus attached to the bottom of the fluid routing device.

### Claim 9 (depends on 1)

The fluid routing device of claim 1 further comprising:
an O-ring attached to the bottom of the fluid routing device, wherein the O-ring surrounds the first and second vertical channels, and wherein the O-ring is sized to fit into a groove in an apparatus attached to the bottom of the fluid routing device.

### Claim 10

A fluidic cooling system comprising:
an integrated circuit package; and
a fluid routing device attached to the integrated circuit package, wherein the fluid routing device comprises:
first vertical channels,
a horizontal channel that opens to each of the first vertical channels, and
second vertical channels that are open to the horizontal channel, wherein the first vertical channels are interleaved between the second vertical channels, and wherein each of the first vertical channels and each of the second vertical channels is directly connected at one end to the horizontal channel,
wherein the first vertical channels are oriented to provide fluid coolant vertically down to the horizontal channel, wherein the horizontal channel is open on one side of the fluid routing device such that a surface of the integrated circuit package that is attached to a bottom of the fluid routing device forms a sidewall of the horizontal channel, and wherein the second vertical channels are oriented to provide fluid coolant vertically up away from the horizontal channel,
wherein each of the first vertical channels has a constricted opening to the horizontal channel directly above the horizontal channel, wherein a width of the constricted opening of each of the first vertical channels is narrower than a width of the first vertical channel above the constricted opening, and wherein an opening of each of the second vertical channels to the horizontal channel directly above the horizontal channel is wider than the constricted opening to the horizontal channel of each of the first vertical channels.

### Claim 11 (depends on 10)

The fluidic cooling system of claim 10, wherein the integrated circuit package comprises a heat spreader, wherein the fluid routing device is attached to the heat spreader, and wherein the horizontal channel is open on one side such that fluid coolant in the horizontal channel directly contacts a surface of the heat spreader.

### Claim 12 (depends on 10)

The fluidic cooling system of claim 10, wherein the integrated circuit package comprises an integrated circuit die.

### Claim 13 (depends on 10)

The fluidic cooling system of claim 10, wherein the fluid routing device comprises a groove in its bottom surface that surrounds the first and second vertical channels, and
wherein the integrated circuit package comprises an O-ring that is inside an entire length of the groove causing the fluid routing device to be connected to the integrated circuit package.

### Claim 14 (depends on 10)

The fluidic cooling system of claim 10, wherein the integrated circuit package comprises a groove in its top surface,
wherein the fluid routing device comprises an O-ring attached to its bottom surface that surrounds the first and second vertical channels, and wherein the O-ring is inside an entire length of the groove causing the fluid routing device to be connected to the integrated circuit package.

### Claim 15 (depends on 10)

The fluidic cooling system of claim 10, wherein the first vertical channels comprise at least three vertical channels, and wherein the second vertical channels comprise at least three vertical channels.

### Claim 16

A method for cooling an integrated circuit package, the method comprising:
providing fluid coolant from a fluid inlet in a fluid routing device to first vertical channels in the fluid routing device;
providing the fluid coolant vertically down through the first vertical channels to a horizontal channel in the fluid routing device, wherein the horizontal channel is directly open to each of the first vertical channels such that the fluid coolant flows from the first vertical channels to the horizontal channel without passing through other channels in the fluid routing device, wherein each of the first vertical channels has a constricted opening to the horizontal channel directly above the horizontal channel, and wherein a width of the constricted opening of each of the first vertical channels is narrower than a width of the first vertical channel above the constricted opening;
providing the fluid coolant horizontally through the horizontal channel such that the fluid coolant in the horizontal channel directly contacts the integrated circuit package as the fluid coolant flows through the horizontal channel, wherein the integrated circuit package is attached to the fluid routing device;
providing the fluid coolant vertically up through second vertical channels in the fluid routing device away from the horizontal channel, wherein each of the second vertical channels is directly open to the horizontal channel such that the fluid coolant flows from the horizontal channel to the second vertical channels without passing through other channels in the fluid routing device, wherein the first vertical channels are interleaved between the second vertical channels, and wherein an opening of each of the second vertical channels to the horizontal channel directly above the horizontal channel is wider than the constricted opening to the horizontal channel of each of the first vertical channels; and
providing the fluid coolant from the second vertical channels out through a fluid outlet in the fluid routing device.

### Claim 17 (depends on 16)

The method of claim 16, wherein the first vertical channels comprise at least three vertical channels, and wherein the second vertical channels comprise at least three vertical channels.

### Claim 18 (depends on 16)

The method of claim 16, wherein the integrated circuit package comprises an integrated circuit die.

### Claim 19 (depends on 16)

The method of claim 16, wherein each of the first and second vertical channels is rectangular in shape from a bottom up perspective of the fluid routing device.
