# US 10,770,355 B2 · Semiconductor devices with various line widths and method of manufacturing the same

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- Number: US 10,770,355 B2
- Document ID: US10770355B2
- Status: Granted
- Kind: B2
- Application number: 16/394,589
- Filed: 2019-04-25
- Published: 2020-02-20
- Granted: 2020-09-08
- Earliest claimed: 2018-08-17
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Je-min Yoo; Sang-deok Kwon; Yuri Masuoka
- Web page: https://patentgrep.com/patent/US10770355B2

## CPC

- H10D 84/038: {using silicon technology, e.g. SiGe}
- H10D 30/0212: {using self-aligned silicidation}
- H10D 64/017: {using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes}
- H10D 64/021: {using multiple gate spacer layers, e.g. bilayered sidewall spacers}
- H10D 84/0135: {Manufacturing their gate conductors}
- H10D 84/0142: {the gate conductors having different shapes or dimensions}
- H10D 84/0147: {Manufacturing their gate sidewall spacers}
- H10P 14/61: using masks
- H10D 64/256: {for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies (source or drain electrodes of TFTs H10D30/673)}
- H10D 64/518: {characterised by their lengths or sectional shapes}
- H10D 84/0158: {the components including FinFETs}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Provided are semiconductor devices having various line widths and a method of manufacturing the semiconductor device. The semiconductor device includes: a substrate including a first region and a second region, a plurality of first gate lines extending in a first direction in the first region and each having a first width in a second; a plurality of second gate lines extending in the first direction in the second region and each having a second width that is different from the first width in the second direction and a pitch that is the same as a pitch of the plurality of first gate lines; a spacer layer covering opposite side walls of each of the plurality of first gate lines and each of the plurality of second gate lines; and a first base layer arranged between the substrate and the spacer layer in the first region.

## Claims

### Claim 1

A method of manufacturing a semiconductor device, the method comprising:
forming a plurality of dummy gate structures on a substrate, the substrate including a first region and a second region, the plurality of dummy gate structures extending in a first direction and arranged in the first region and the second region, the plurality of dummy gate structures in the first region and the second region having uniform pitches in a second direction, the second direction being different from the first direction, the plurality of dummy gate structures in the first region and the second region having uniform widths in the second direction;
forming a first cover layer conformally covering, in the first region, the substrate and the plurality of dummy gate structures;
forming a second cover layer conformally covering the first cover layer in the first region and conformally covering, in the second region, the substrate and the plurality of dummy gate structures;
forming a spacer layer covering a) the second cover layer that covers opposite side walls of the plurality of dummy gate structures in the first region and b) the first cover layer that covers opposite side walls of the plurality of dummy gate structures in the second region;
forming a plurality of first gate spaces in the first region and a plurality of second gate spaces in the second region by removing together, from the first region and the second region, the plurality of dummy gate structures, a portion of the first cover layer, and a portion of the second cover layer; and
forming a) a plurality of first gate lines filling the plurality of first gate spaces and b) a plurality of second gate lines filling the plurality of second gate spaces.

### Claim 2 (depends on 1)

The method of claim 1, wherein the forming of the first cover layer comprises:
forming the first cover layer in both the first region and the second region, the first cover layer conformally covering the substrate and the plurality of dummy gate structures in the first region and the second region; and
removing the first cover layer formed in the second region.

### Claim 3 (depends on 1)

The method of claim 1, wherein, in the second direction, a first gap of each of the plurality of first gate spaces is greater than a second gap of each of the plurality of second gate spaces.

### Claim 4 (depends on 1)

The method of claim 1, wherein, in the second direction, a first width of each of the plurality of first gate lines is greater than a second width of each of the plurality of second gate lines.

### Claim 5 (depends on 4)

The method of claim 4, wherein a difference between the first width and the second width is twice a thickness of the first cover layer.

### Claim 6 (depends on 1)

The method of claim 1, wherein the substrate further comprises a third region,
the forming of the plurality of dummy gate structures comprises forming the plurality of dummy gate structures in the third region,
a. the forming of the first cover layer comprises,
forming the first cover layer in the first region, the second region, and the third region, the first cover layer conformally covering the substrate and the plurality of dummy gate structures, and
removing the first cover layer formed in the second region and the third region, and
b. the forming of the second cover layer comprises,
forming the second cover layer conformally covering the first cover layer in the first region and conformally covering the substrate and the plurality of dummy gate structures in the second region and the third region, and
removing the second cover layer formed in the third region.

### Claim 7 (depends on 6)

The method of claim 6, wherein the forming of the plurality of first gate spaces and the plurality of second gate spaces further comprises:
removing the plurality of dummy gate structures in the third region to further form a plurality of third gate spaces in the third region; and
forming a plurality of third gate lines respectively filling the plurality of third gate spaces.

### Claim 8 (depends on 7)

The method of claim 7, wherein the plurality of first gate lines, the plurality of second gate lines, and the plurality of third gate lines are simultaneously formed in the first region, the second region, and the third region, respectively.

### Claim 9 (depends on 7)

The method of claim 7, wherein a first width of each of the plurality of first gate lines in the second direction is greater than a second width of each of the plurality of second gate lines, and the second width of each of the second gate lines is greater than a third width of each of the plurality of third gate lines.

### Claim 10 (depends on 9)

The method of claim 9, wherein differences among the first width, the second width, and the third width are in proportion to differences between an upper surface of the substrate and a bottom surface of the spacer layer in the first region, the second region, and the third region, respectively.

### Claim 11

A method of manufacturing a semiconductor device, the method comprising:
preparing a substrate including a first region, a second region, a third region, and a fourth region;
forming a plurality of first dummy gate structures in the first region and the second region, the plurality of first dummy gate structures extending in a first direction and each having a first pitch in a second direction, the second direction different from the first direction, the plurality of first dummy gate structures having a first width in the second direction;
forming a plurality of second dummy gate structures in the third region and the fourth region, the plurality of second dummy gate structures extending in the first direction and each having a second pitch in the second direction, the second pitch being different from the first pitch, each of the plurality of second dummy gate structures having a second width in the second direction;
forming a first cover layer in the first region and the third region, the first cover layer conformally covering the substrate and the plurality of first dummy gate structures;
forming a second cover layer conformally covering a) the first cover layer in the first region and the third region, and b) the substrate in the second region and the further region and the plurality of first and second dummy gate structures in the second region and the fourth region;
forming a spacer layer covering opposite side walls of each of the plurality of first and second dummy gate structures in the first region and the third region, and covering opposite side walls of each of the plurality of first and second dummy gate structures in the second region and the fourth region;
forming a plurality of first gate spaces, a plurality of second gate spaces, a plurality of third gate spaces, and a plurality of fourth gate spaces respectively in the first region, the second region, the third region, and the fourth region by removing the plurality of first and second dummy gate structures, a portion of the first cover layer, and a portion of the second cover layer; and
forming a plurality of first gate lines filling the plurality of first gate spaces, a plurality of second gate lines filling the plurality of second gate spaces, a plurality of third gate lines filling the plurality of third gate spaces, and a plurality of fourth gate lines filling the plurality of fourth gate spaces.

### Claim 12 (depends on 11)

The method of claim 11, wherein the forming of the plurality of first gate spaces, the plurality of second gate spaces, the plurality of third gate spaces, and the plurality of fourth gate spaces comprises:
forming a first base layer in which a remaining portion of the first cover layer and a remaining portion of the second cover layer are stacked under the spacer layer in the first region and the third region; and
forming a second base layer including a remaining portion of the second cover layer under the spacer layer in the second region and the fourth region.

### Claim 13 (depends on 12)

The method of claim 12, wherein the plurality of first gate lines in the first region and the plurality of second gate lines in the second region are have the first pitch in the second direction, and the plurality of third gate lines in the third region and the plurality of fourth gate lines in the fourth region have the second pitch in the second direction, and
in the second direction, a third width of each of the plurality of first gate lines is greater than a fourth width of each of the plurality of second gate lines, and a fifth width of each of the plurality of third gate lines is greater than a sixth width of each of the plurality of fourth gate lines.

### Claim 14 (depends on 13)

The method of claim 13, wherein each of a difference between the third width and the fourth width and a difference between the fifth width and the sixth width is twice a difference between a thickness of the first base layer and a thickness of the second base layer.

### Claim 15 (depends on 11)

The method of claim 11, wherein the forming of the first cover layer comprises:
forming the first cover layer in the first region, the second region, the third region, and the fourth region, the first cover layer conformally covering the substrate and the plurality of first and second dummy gate structures; and
removing the first cover layer formed in the second region and the fourth region.

### Claim 16

A method of manufacturing a semiconductor device comprising:
forming a plurality of dummy gate structures on a substrate, the substrate including a first region and a second region, the plurality of dummy gate structures extending in a first direction and arranged in the first region and the second region, the plurality of dummy gate structures in the first region and the second region having uniform pitches in a second direction, the second direction being different from the first direction, the plurality of dummy gate structures in the first region and the second region having uniform widths in the second direction, the forming the plurality of dummy gate structures including forming the plurality of dummy gate structures in the first region and the second region using a first photomask, the first photomask including patterns corresponding to the dummy gate structures in the first region and the second region;
forming a first cover layer conformally covering, in the first region, the substrate and the plurality of dummy gate structures, the forming the first cover layer including using a second photomask, the second photomask including a pattern corresponding to the first region; and
forming a second cover layer conformally covering, in the first region, the first cover layer and conformally covering, in the second region, the substrate and the plurality of dummy gate structures.

### Claim 17 (depends on 16)

The method of claim 16, wherein the forming the plurality of dummy gates includes forming the plurality of dummy gates with a first photolithographic process, the first photolithographic process including at least one of a deep ultraviolet (DUV) photolithography technology, an immersion photolithography technology, a double patterning (DPT) technology, or an extreme ultraviolet (EUV) photolithography technology.

### Claim 18 (depends on 16)

The method of claim 16, wherein the forming the first covering layer includes forming the first covering layer with a second photolithographic process, wherein the second photolithographic process is not one of a deep ultraviolet (DUV) photolithography technology, an immersion photolithography technology, a double patterning (DPT) technology, or an extreme ultraviolet (EUV) photolithography technology.

### Claim 19 (depends on 16)

The method of claim 16, wherein the forming the plurality of dummy gate structures includes forming the plurality of dummy gate structures using a photolithography process having a first wavelength, and
wherein the forming the first cover layer includes forming the first cover layer using a photolithography process having a second wavelength greater than the first wavelength.

### Claim 20 (depends on 16)

The method of claim 16, wherein the forming the second cover layer includes forming the second cover layer using a third photomask, the third photomask including patterns corresponding to the first region and the second region.