# US 10,770,337 B2 · Lift pin assembly, substrate support apparatus and substrate processing apparatus having the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,770,337 B2 - Document ID: US10770337B2 - Status: Granted - Kind: B2 - Application number: 15/944,909 - Filed: 2018-04-04 - Published: 2019-03-14 - Granted: 2020-09-08 - Earliest claimed: 2017-09-12 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Ja-Woo Lee; Seung-Won Shin; Su-Ho Lee - Web page: https://patentgrep.com/patent/US10770337B2 ## CPC - H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins} - G03F 7/70691: {Handling of masks or workpieces} - G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details} - G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving} - H01J 37/32715: {Workpiece holder} - H01J 37/32733: {Means for moving the material to be treated} - H10P 72/0421: {for drying etching} - H10P 72/722: {Details of electrostatic chucks} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A lift pin assembly includes a lift pin having a first longitudinal axis substantially parallel with a first direction, a pin connection block combined with a lower end portion of the lift pin and including a first guide recess in a lower end portion of the pin connection block, the first guide recess extending in a second direction substantially perpendicular to the first direction, and a lift pin holder having a second longitudinal axis substantially parallel with the first direction and including a first sliding portion to be received movably in the second direction within the first guide recess by an eccentricity distance of the second longitudinal axis from the first longitudinal axis when the lift pin holder is connected to the lower end portion of the pin connection block. ## Claims ### Claim 1 A lift pin assembly, comprising: a lift pin having a first longitudinal axis substantially parallel with a first direction; a pin connection block combined with a lower end portion of the lift pin, the pin connection block comprising a first guide recess formed in a side surface of the pin connection block in a lower end portion of the pin connection block, the first guide recess extending in a second direction substantially perpendicular to the first direction, and the side surface of the pin connection block extending in the first direction; and a lift pin holder having a second longitudinal axis substantially parallel with the first direction, the lift pin holder comprising a first sliding portion to be received movably in the second direction within the first guide recess by an eccentricity distance of the second longitudinal axis from the first longitudinal axis when the lift pin holder is connected to the lower end portion of the pin connection block. ### Claim 2 (depends on 1) The lift pin assembly of claim 1, wherein when the first longitudinal axis is arranged coaxially with the second longitudinal axis, the first sliding portion is spaced apart from an inner surface of the first guide recess by a predetermined distance. ### Claim 3 (depends on 1) The lift pin assembly of claim 1, wherein the first sliding portion has an outer diameter of a first size, and the first guide recess has an inner diameter of a second size greater than the first size. ### Claim 4 (depends on 1) The lift pin assembly of claim 1, wherein the pin connection block has a third longitudinal axis and the third longitudinal axis coincides with the first longitudinal axis when the lift pin is combined with the pin connection block. ### Claim 5 (depends on 1) The lift pin assembly of claim 1, wherein the pin connection block comprises a fastening hole to receive the lower end portion of the lift pin and to be connected threadedly with the lower end portion of the lift pin. ### Claim 6 (depends on 5) The lift pin assembly of claim 5, further comprising a securing ring for combining with the lower end portion of the lift pin which penetrates through and protrudes from the fastening hole of the pin connection block. ### Claim 7 (depends on 1) The lift pin assembly of claim 1, wherein the pin connection block comprises a second guide recess in communication with the first guide recess and extending in the second direction, and wherein the lift pin holder comprises a second sliding portion to be received movably in the second direction within the second guide recess while a movement of the second sliding portion in the first direction is limited. ### Claim 8 (depends on 7) The lift pin assembly of claim 7, wherein when the first longitudinal axis is arranged coaxially with the second longitudinal axis, the second sliding portion is spaced apart from an inner surface of the second guide recess by a predetermined distance. ### Claim 9 (depends on 7) The lift pin assembly of claim 7, wherein the second sliding portion has an outer diameter of a third size, and wherein the second guide recess has an outer diameter of a fourth size greater than the third size. ### Claim 10 (depends on 9) The lift pin assembly of claim 9, wherein the outer diameter of the second sliding portion is greater than the first guide recess. ### Claim 11 A lift pin assembly, comprising: a lift pin having a first longitudinal axis substantially parallel with a first direction; a pin connection block combined with a lower end portion of the lift pin, the pin connection block comprising a first guide recess and a second guide recess formed in a side surface of the pin connection block in a lower end portion of the pin connection block, wherein the first guide recess and the second guide recess are in communication with each other and extend in a second direction substantially perpendicular to the first direction respectively, and wherein the side surface of the pin connection block extends in the first direction a lift pin holder having a second longitudinal axis substantially parallel with the first direction, the lift pin holder comprising a first sliding portion to be received movably in the second direction within the first guide recess by an eccentricity distance of the second longitudinal axis from the first longitudinal axis when the lift pin holder is connected to the lower end portion of the pin connection block and a second sliding portion to be received movably in the second direction within the second guide recess while a movement of the second sliding portion in the first direction is limited. ### Claim 12 (depends on 11) The lift pin assembly of claim 11, wherein when the first longitudinal axis is arranged coaxially with the second longitudinal axis, the first sliding portion is spaced apart from an inner surface of the first guide recess by a first distance and the second sliding portion is spaced apart from an inner surface of the second guide recess by at least the first distance. ### Claim 13 (depends on 11) The lift pin assembly of claim 11, wherein the first sliding portion has an outer diameter of a first size, the first guide recess has an inner diameter of a second size greater than the first size, the second sliding portion has an outer diameter of a third size, and the second guide recess has an outer diameter of a fourth size greater than the third size. ### Claim 14 (depends on 11) The lift pin assembly of claim 11, wherein the pin connection block comprises a fastening hole to receive the lower end portion of the lift pin and to be connected threadedly with the lower end portion of the lift pin. ### Claim 15 (depends on 11) The lift pin assembly of claim 11, wherein the first and second guide recesses have first and second open portions through which the first and second sliding portions are inserted, respectively. ### Claim 16 A lift pin assembly, comprising; a lift pin having a first longitudinal axis substantially parallel with a first direction; a lift pin holder having a second longitudinal axis; and a pin connection block combined with a lower end portion of the lift pin and connected to an upper end portion of the lift pin holder such that the lift pin is movable in a horizontal direction with respect to the lift pin holder by an eccentricity distance of the first longitudinal axis from the second longitudinal axis, wherein the pin connection block comprises a first guide recess formed in a side surface of the pin connection block, the side surface of the pin connection block extending in the first direction, and wherein the lift pin holder comprises a first sliding portion to be received within the first guide recess. ### Claim 17 (depends on 16) The lift pin assembly of claim 16, wherein the first guide recess is formed in a lower end portion of the pin connection block and extends in a direction substantially perpendicular to an extending direction of the pin connection block, and the first sliding portion is movable in the horizontal direction with respect to the lift pin holder within the first guide recess when the lift pin holder is connected to the lower end portion of the pin connection block. ### Claim 18 (depends on 17) The lift pin assembly of claim 17, wherein the first sliding portion has an outer diameter of a first size, and wherein the first guide recess has an inner diameter of a second size greater than the first size. ### Claim 19 (depends on 17) The lift pin assembly of claim 17, wherein the pin connection block comprises a second guide recess in communication with the first guide recess that extends in the direction substantially perpendicular to the extending direction of the pin connection block, and the lift pin holder comprises a second sliding portion to be received movably in the horizontal direction with respect to the lift pin holder within the second guide recess while a movement of the second sliding portion in the extending direction of the pin connection block is limited. ### Claim 20 (depends on 19) The lift pin assembly of claim 19, wherein the second sliding portion has an outer diameter of a third size, and wherein the second guide recess has an outer diameter of a fourth size greater than the third size.