# US 10,770,334 B2 · Substrate holding device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,770,334 B2 - Document ID: US10770334B2 - Status: Granted - Kind: B2 - Application number: 15/600,867 - Filed: 2017-05-22 - Published: 2017-11-30 - Granted: 2020-09-08 - Earliest claimed: 2016-05-25 - Assignees: Ngk Spark Plug Co., Ltd. - Applicants: Ngk Spark Plug Co., Ltd. - Inventors: Tomohiro Ishino; Shinya Kikuchi - Web page: https://patentgrep.com/patent/US10770334B2 ## CPC - H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks - H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection} - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/3412: {Batch transfer of wafers} - H10P 72/7611: {characterised by edge profile or support profile} - H10P 72/7614: {characterised by a plurality of individual support members, e.g. support posts or protrusions} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove. ## Claims ### Claim 1 A substrate holding device comprising: a base body having a flat plate-like shape and including: an upper surface; a lower surface; and a plurality of upper protrusions protruding upward from the upper surface; the base body defining: an elongated groove that opens on the lower surface with a bottom surface of the groove positioned a depth away from the lower surface of the base body; and at least one gas hole extending from the upper surface to the bottom surface of the elongated groove; the base body further including a plurality of first lower protrusions protruding downward from the bottom surface of the elongated groove. ### Claim 2 (depends on 1) The substrate holding device according to claim 1, wherein a first loop-shaped lower protrusion that surrounds the elongated groove in a loop shape and a second loop-shaped lower protrusion that surrounds the first loop-shaped lower protrusion in a loop shape are formed on the lower surface of the base body so as to protrude downward, and wherein a second lower protrusion that protrudes downward from the lower surface of the base body is formed between the first loop-shaped lower protrusion and the second loop-shaped lower protrusion. ### Claim 3 (depends on 2) The substrate holding device according to claim 2, wherein lower end surfaces of the first lower protrusions and a lower end surface of the second lower protrusion are located on substantially the same plane, and wherein a lower end surface of the first loop-shaped lower protrusion and a lower end surface of the second loop-shaped lower protrusion are located lower than the lower end surfaces of the first and second lower protrusions by between 1 μm and 5 μm. ### Claim 4 (depends on 1) The substrate holding device according to claim 1, wherein each of the first lower protrusions has a frustum shape with a base angle of 70° or more and 85° or less. ### Claim 5 (depends on 4) The substrate holding device according to claim 4, wherein each of the first lower protrusions has a conical frustum shape. ### Claim 6 (depends on 1) The substrate holding device according to claim 1, wherein the base body defines at least two gas holes extending from the upper surface to the elongated groove and each of the plurality of first lower protrusions is aligned between two of the at least two gas holes. ### Claim 7 (depends on 2) The substrate holding device according to claim 2, wherein the first loop-shaped lower protrusion is positioned adjacent to the elongated groove and the second loop-shaped lower protrusion is positioned adjacent to an outer periphery of the base body. ### Claim 8 (depends on 1) The substrate holding device according to claim 1, wherein the elongated groove is located on only one side of the lower surface. ### Claim 9 (depends on 1) The substrate holding device according to claim 1, wherein no gas holes extend through the base body outside of the elongated groove. ### Claim 10 (depends on 2) The substrate holding device according to claim 2, wherein no gas holes are defined between the first loop-shaped lower protrusion and the second loop-shaped lower protrusion. ### Claim 11 A substrate holding device comprising: a base body having a flat plate-like shape and including: an upper surface; a lower surface; and a plurality of upper protrusions protruding upward from the upper surface; the base body defining: an elongated groove that opens on the lower surface with a bottom surface of the elongated groove positioned a depth away from the lower surface of the base body, the elongated groove extending radially from a center of the base body in one direction; and one or more gas holes extending through the base body from the upper surface of the base body to the bottom surface of the elongated groove with each of the gas holes located within the elongated groove; the base body further including a plurality of first lower protrusions protruding downward in-from the bottom surface of the elongated groove. ### Claim 12 (depends on 11) The substrate holding device according to claim 11, wherein a first loop-shaped lower protrusion that surrounds the elongated groove in a loop shape and a second loop-shaped lower protrusion that surrounds the first loop-shaped lower protrusion in a loop shape are formed on the lower surface of the base body so as to protrude downward, and wherein a second lower protrusion that protrudes downward from the lower surface of the base body is formed between the first loop-shaped lower protrusion and the second loop-shaped lower protrusion. ### Claim 13 (depends on 12) The substrate holding device according to claim 12, wherein lower end surfaces of the first lower protrusions and a lower end surface of the second lower protrusion are located on substantially the same plane, and wherein a lower end surface of the first loop-shaped lower protrusion and a lower end surface of the second loop-shaped lower protrusion are located lower than the lower end surfaces of the first and second lower protrusions by between 1 μm and 5 μm. ### Claim 14 (depends on 11) The substrate holding device according to claim 11, wherein each of the first lower protrusions has a frustum shape with a base angle of 70° or more and 85° or less. ### Claim 15 (depends on 14) The substrate holding device according to claim 14, wherein each of the first lower protrusions has a conical frustum shape. ### Claim 16 (depends on 11) The substrate holding device according to claim 11, wherein the base body defines at least two gas holes extending from the upper surface to the elongated groove and each of the plurality of first lower protrusions is aligned between two of the at least two gas holes. ### Claim 17 (depends on 12) The substrate holding device according to claim 12, wherein the first loop-shaped lower protrusion is positioned adjacent to the elongated groove and the second loop-shaped lower protrusion is positioned adjacent to an outer periphery of the base body. ### Claim 18 A substrate holding device comprising: a base body having a flat plate-like shape and including: an upper surface; a lower surface; and a plurality of upper protrusions protruding upward from the upper surface; the base body defining: an elongated groove that opens on the lower surface; and at least one gas hole extending from the upper surface to the elongated groove; the base body further including a plurality of first lower protrusions protruding downward in the elongated groove, each of the first lower protrusions having a frustum shape with a base angle of 700 or more and 85′ or less. ### Claim 19 (depends on 18) The substrate holding device according to claim 18, wherein a first loop-shaped lower protrusion that surrounds the elongated groove in a loop shape and a second loop-shaped lower protrusion that surrounds the first loop-shaped lower protrusion in a loop shape are formed on the lower surface of the base body so as to protrude downward, and wherein a plurality of second lower protrusions that protrude downward from the lower surface of the base body are formed between the first loop-shaped lower protrusion and the second loop-shaped lower protrusion, each of the second lower protrusions having a frustum shape with a base angle less than the base angle of each of the first lower protrusions. ### Claim 20 (depends on 19) The substrate holding device according to claim 19, wherein lower end surfaces of the first lower protrusions and a lower end surface of the second lower protrusion are located on substantially the same plane, and wherein a lower end surface of the first loop-shaped lower protrusion and a lower end surface of the second loop-shaped lower protrusion are located lower than the lower end surfaces of the first and second lower protrusions by between 1 μm and 5 μm.