# US 10,770,314 B2 · Semiconductor device, tool, and method of manufacturing

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- Number: US 10,770,314 B2
- Document ID: US10770314B2
- Status: Granted
- Kind: B2
- Application number: 15/666,063
- Filed: 2017-08-01
- Published: 2018-12-06
- Granted: 2020-09-08
- Earliest claimed: 2017-05-31
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Meng-Hsien Li; Hsin-Hsien Lu
- Web page: https://patentgrep.com/patent/US10770314B2

## CPC

- H10P 72/0404: {for general liquid treatment, e.g. etching followed by cleaning}
- B08B 3/08: the liquid having chemical or dissolving effect
- B08B 7/0035: {by radiant energy, e.g. UV, laser, light beam or the like}
- H01J 37/32899: {Multiple chambers, e.g. cluster tools}
- H10P 50/283: {by chemical means}
- H10P 70/234: {the processing being the formation of vias or contact holes}
- H10P 72/0406: {for cleaning followed by drying, rinsing, stripping, blasting or the like}
- H10W 20/033: {in openings in dielectrics}
- H10W 20/056: {by filling conductive material into holes, grooves or trenches}
- H10W 20/081: {by forming openings in the dielectric parts}
- H10W 20/088: {involving partial etching of via holes}
- H10W 20/075: {of multilayered thin functional dielectric layers}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A semiconductor device is manufactured using a cleaning process. The cleaning process utilizes a semiconductor manufacturing tool that has a wet cleaning section and a plasma cleaning section. The semiconductor device is placed within a wet cleaning chamber within the wet cleaning section, where a wet cleaning process is performed. Once completed, and without breaking atmosphere, the semiconductor device is removed from the wet cleaning section and placed within a plasma cleaning chamber within the plasma cleaning section. A plasma clean is then performed.

## Claims

### Claim 1

A method of manufacturing a semiconductor device, the method comprising:
forming an opening through a dielectric layer to expose a conductive element of a semiconductor wafer, the opening exposing first sidewalls of the dielectric layer;
placing the semiconductor wafer into a first processing tool;
wet cleaning the opening within the first processing tool using a first etchant comprising an oxidizer and a solvent, the oxidizer comprising hydrogen peroxide, ozone water, or phosphate salt, wherein the first sidewalls of the dielectric layer are exposed by the opening during the wet cleaning;
plasma cleaning the opening within the first processing tool after the wet cleaning, wherein the first sidewalls of the dielectric layer are exposed by the opening during the plasma cleaning; and
forming a barrier layer along the first sidewalls of the dielectric layer and along an upper surface of the conductive element after the wet cleaning and the plasma cleaning, the barrier layer contacting the upper surface of the conductive element.

### Claim 2 (depends on 1)

The method of claim 1, wherein the wet cleaning is performed at least in part using a spin on process.

### Claim 3 (depends on 1)

The method of claim 1, wherein the plasma cleaning releases charges on the semiconductor wafer.

### Claim 4 (depends on 3)

The method of claim 3, wherein the plasma cleaning generates plasma from nitrogen or hydrogen.

### Claim 5 (depends on 1)

The method of claim 1, wherein forming the opening through the dielectric layer leaves residues in the opening, wherein the residues comprise a fluorinated polymer.

### Claim 6 (depends on 1)

The method of claim 1, wherein the wet cleaning is performed in a wet etching station of the first processing tool, wherein the method further comprises:
recycling the first etchant for the wet cleaning, wherein recycling the first etchant comprises:
collecting, in a feed tank, the first etchant from an output of the wet etching station;
analyzing the first etchant from the output of the wet etching station to determine a makeup amount of an effective component of the first etchant, wherein the makeup amount is determined to recover an effectiveness of the first etchant;
adding the determined makeup amount of the effective component into the feed tank; and
after the adding, supplying the first etchant in the feed tank to the wet etching station.

### Claim 7

A method of manufacturing a semiconductor device, the method comprising:
exposing a conductive layer disposed in a first dielectric layer of a semiconductor wafer by forming an opening through a second dielectric layer over the conductive layer;
removing residue by contacting a liquid etchant to the second dielectric layer and the conductive layer, wherein the residue comprises a fluorinated polymer, and the liquid etchant comprises hydrogen peroxide, ozone water, or phosphate salt, wherein the contacting the liquid etchant is performed in a first wet etching chamber of a first processing tool, wherein during the removing the residue, the liquid etchant contacts sidewalls of the second dielectric layer exposed by the opening;
performing a plasma cleaning after the removing the residue, wherein the performing the plasma cleaning is performed within a plasma treatment chamber of the first processing tool, wherein the sidewalls of the second dielectric layer are exposed by the opening during the plasma cleaning; and
forming a barrier layer in the opening after performing the plasma cleaning, the barrier layer extending along and contacting an upper surface of the conductive layer and the sidewalls of the second dielectric layer.

### Claim 8 (depends on 7)

The method of claim 7, wherein the plasma cleaning is performed using a gas source comprising nitrogen or hydrogen.

### Claim 9 (depends on 7)

The method of claim 7, wherein the plasma cleaning releases charges from dielectric layer.

### Claim 10 (depends on 7)

The method of claim 7, wherein the liquid etchant comprises an oxidant within a solvent.

### Claim 11 (depends on 7)

The method of claim 7, wherein the liquid etchant further comprises an inhibitor.

### Claim 12 (depends on 7)

The method of claim 7, wherein the conductive layer and the first dielectric layer have a coplanar upper surface facing the second dielectric layer.

### Claim 13

A method of cleaning a semiconductor wafer, the method comprising:
placing the semiconductor wafer onto a spin chuck, the semiconductor wafer having a conductive feature embedded in a first dielectric layer and a second dielectric layer over the conductive feature, wherein the second dielectric layer has an opening that exposes the conductive feature and exposes first sidewalls of the second dielectric layer;
dispensing a wet etchant onto the semiconductor wafer while the semiconductor wafer is spinning, the wet etchant in direct contact with the first sidewalls of the second dielectric layer, the wet etchant comprising an oxidizer and an organic solvent, the oxidizer comprising hydrogen peroxide, ozone water, or phosphate salt;
removing the semiconductor wafer from the spin chuck and placing the semiconductor wafer onto a mounting platform within a plasma treatment chamber without breaking to an external atmosphere;
plasma treating the first sidewalls of the second dielectric layer using a gas source comprising diazene (N2H2) or hydrazine (N2H4); and
forming a barrier layer lining the first sidewalls of the second dielectric layer after the plasma treating, wherein the barrier layer extends along and contacts an upper surface of the conductive feature facing the second dielectric layer.

### Claim 14 (depends on 13)

The method of claim 13, wherein the plasma treating the semiconductor wafer further comprises releasing charges from the semiconductor wafer.

### Claim 15 (depends on 14)

The method of claim 14, wherein the gas source of the plasma treating further comprises nitrogen or hydrogen.

### Claim 16 (depends on 13)

The method of claim 13, further comprising plating a conductive material onto the barrier layer.

### Claim 17 (depends on 13)

The method of claim 13, wherein the dispensing the wet etchant and the plasma treating the semiconductor wafer are performed in a same processing tool without breaking to an exterior atmosphere.

### Claim 18 (depends on 13)

The method of claim 13, wherein the mounting platform includes a first electrode, where performing the plasma treating comprises:
supplying a treatment gas into the plasma treatment chamber;
igniting the treatment gas into plasma by applying a first radio frequency (RF) power source to the first electrode and applying a second RF power source to a second electrode disposed over the first electrode, wherein a first RF frequency of the first RF power source is lower than a second RF frequency of the second RF power source; and
after igniting the treatment gas, increasing a first power of the first RF power source and a second power of the second RF power source.

### Claim 19 (depends on 18)

The method of claim 18, wherein the first electrode is inside the plasma treatment chamber, and the second electrode is outside the plasma treatment chamber.

### Claim 20 (depends on 13)

The method of claim 13, wherein a concentration of the oxidizer in the wet etchant is less than about 25%, and a concentration of the organic solvent in the wet etchant is between about 5% and about 50%.