# US 10,770,253 B2 · Switch arrangements for microelectromechanical systems > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,770,253 B2 - Document ID: US10770253B2 - Status: Granted - Kind: B2 - Application number: 16/174,416 - Filed: 2018-10-30 - Published: 2019-06-06 - Granted: 2020-09-08 - Earliest claimed: 2017-12-01 - Assignees: Qorvo US, Inc. - Applicants: Qorvo US, Inc. - Inventors: Nadim Khlat; Jonathan Hale Hammond - Web page: https://patentgrep.com/patent/US10770253B2 ## CPC - H01H 59/0009: {making use of micromechanics} - H01H 9/38: Auxiliary contacts on to which the arc is transferred from the main contacts (using arcing-horns H01H9/46) - H01H 9/40: Multiple main contacts for the purpose of dividing the current through, or potential drop along, the arc - H01H 2059/0063: {with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation} - H01H: ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES (contact cables H01B7/10; electrolytic self-interrupters H01G9/18; emergency protective circuit arrangements H02H; switching by electronic means without contact-making H03K17/00) ## Abstract Microelectromechanical system (MEMS) switches that provide low contact resistance over a large number of open and close contact cycles are disclosed. A MEMS switch device may include a plurality of parallel MEMS switches with a first MEMS switch that is configured differently in such a manner to close first and/or open last during open and close cycles. In this regard, the first MEMS switch may experience increased contact resistance over a large number of open and close cycles while other MEMS switches maintain a low contact resistance. In certain embodiments, the first MEMS switch is controlled by a different control signal to open and close differently than the other MEMS switches. In certain embodiments, a common control signal controls a plurality of MEMS switches and the first MEMS switch is mechanically different such that it opens and closes differently than other MEMS switches. ## Claims ### Claim 1 A microelectromechanical system (MEMS) switch device comprising: a first MEMS switch configured to receive a first MEMS switch control signal; a plurality of second MEMs switches configured to receive a second MEMS switch control signal that is different than the first MEMS switch control signal, wherein the first MEMS switch and the plurality of second MEMS switches are arranged in parallel with each other; and control circuitry configured to provide the first MEMS switch control signal and the second MEMS switch control signal. ### Claim 2 (depends on 1) The MEMS switch device of claim 1, wherein the first MEMS switch is configured to close before the plurality of second MEMS switches close during an open and close cycle. ### Claim 3 (depends on 2) The MEMS switch device of claim 2, wherein the first MEMS switch is configured to reopen after the plurality of second MEMS switches reopen during the open and close cycle. ### Claim 4 (depends on 1) The MEMS switch device of claim 1, wherein the first MEMS switch is configured to (i) close before the plurality of second MEMS switches close, (ii) reopen after the plurality of second MEMS switches close, (iii) close again before the plurality of second MEMS switches open, and (iv) reopen again after the plurality of second MEMS switches open during an open and close cycle. ### Claim 5 (depends on 1) The MEMS switch device of claim 1, further comprising a resistor configured in series with the first MEMS switch. ### Claim 6 (depends on 1) The MEMS switch device of claim 1, further comprising an additional MEMS switch arranged in parallel with the first MEMS switch and the plurality of second MEMS switches, wherein the additional MEMS switch is configured to receive the first MEMS switch control signal. ### Claim 7 (depends on 6) The MEMS switch device of claim 6, further comprising a resistor configured in series with the first MEMS switch and the additional MEMS switch. ### Claim 8 (depends on 1) The MEMS switch device of claim 1, further comprising a plurality of additional switches arranged in parallel with the first MEMS switch and the plurality of second MEMS switches, wherein the plurality of additional MEMS switches are configured to receive the first MEMS switch control signal. ### Claim 9 (depends on 1) The MEMS switch device of claim 1, further comprising a shunt device that is connected to ground. ### Claim 10 (depends on 9) The MEMS switch device of claim 9, wherein the shunt device comprises a shunt MEMS switch configured to receive a third MEMS switch control signal. ### Claim 11 (depends on 1) The MEMS switch device of claim 1, wherein the plurality of second MEMS switches comprises a range of about two to about one hundred MEMS switches. ### Claim 12 A method of operating a microelectromechanical system (MEMS) switch device comprising: providing a plurality of MEMS switches that are arranged in parallel with each other; closing a first MEMS switch of the plurality of MEMS switches before closing a second MEMS switch of the plurality of MEMS switches; and opening the second MEMS switch of the plurality of MEMS switches before opening the first MEMS switch of the plurality of MEMS switches. ### Claim 13 (depends on 12) The method of claim 12, wherein closing the first MEMS switch comprises sending a first MEMS switch control signal to the first MEMS switch, and closing the second MEMS switch comprises sending a second MEMS switch control signal to the second MEMS switch. ### Claim 14 (depends on 12) The method of claim 12, wherein closing the first MEMS switch and closing the second MEMS switch comprises sending a common MEMS switch control signal to both the first MEMS switch and the second MEMS switch. ### Claim 15 A microelectromechanical system (MEMS) switch device comprising: a plurality of MEMS switches that are arranged in parallel with each other, wherein the plurality of MEMS switches are configured to receive a common MEMS switch control signal; and control circuitry configured to provide the common MEMS switch control signal; wherein a first MEMS switch of the plurality of MEMS switches is configured to close before a second MEMS switch of the plurality of MEMS switches in response to the common MEMS switch control signal. ### Claim 16 (depends on 15) The MEMS switch device of claim 15, wherein the first MEMS switch of the plurality of MEMS switches is configured to open after the second MEMS switch of the plurality of MEMS switches in response to the common MEMS switch control signal. ### Claim 17 (depends on 15) The MEMS switch device of claim 15, wherein the first MEMS switch comprises a first switch contact over a substrate and the second MEMS switch comprises a second switch contact over the substrate, and in an open position, the first switch contact is configured closer to the substrate than the second switch contact. ### Claim 18 (depends on 15) The MEMS switch device of claim 15, wherein the first MEMS switch comprises a first actuator and the second MEMS switch comprises a second actuator, and the second actuator has a higher spring constant than the first actuator. ### Claim 19 (depends on 15) The MEMS switch device of claim 15, wherein the first MEMS switch comprises a lighter mass than the second MEMS switch. ### Claim 20 (depends on 15) The MEMS switch device of claim 15, wherein the plurality of MEMS switches comprises a range of about two to about one hundred MEMS switches.