Magnetoresistive device comprising chromium
AssigneeImec Vzw
InventorsJohan Swerts, Sebastien Couet
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AssigneeImec Vzw
InventorsJohan Swerts, Sebastien Couet
Estimating the term…
The disclosed technology generally relates to a magnetoresistive device and more particularly to a magnetoresistive device comprising chromium. According to an aspect, a method of forming a magnetoresistive device comprises forming a magnetic tunnel junction (MTJ) structure over a substrate. The MTJ structure includes, in a bottom-up direction away from the substrate, a free layer, a tunnel barrier layer and a reference layer. The method additionally includes forming a pinning layer over the MTJ structure, wherein the pinning layer pins a magnetization direction of the reference layer. The method additionally includes forming capping layer comprising chromium (Cr) over the pinning layer. The method further includes annealing the capping layer under a condition sufficient to cause diffusion of Cr from the capping layer into at least the pinning layer. According to another aspect, a magnetoresistive device is formed according to the method.
A magnetoresistive device, comprising:
A magnetoresistive device, comprising:
Dependencies are inferred from the claim text.