# US 10,768,612 B2 · Method for back end planning and scheduling

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- Number: US 10,768,612 B2
- Document ID: US10768612B2
- Status: Granted
- Kind: B2
- Application number: 15/971,709
- Filed: 2018-05-04
- Published: 2018-12-06
- Granted: 2020-09-08
- Earliest claimed: 2017-06-02
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: David Everton Norman
- Web page: https://patentgrep.com/patent/US10768612B2

## CPC

- G05B 19/41865: {characterised by job scheduling, process planning, material flow}
- G05B 19/41885: {characterised by modeling, simulation of the manufacturing system}
- G05B 2219/32343: Derive control behaviour, decisions from simulation, behaviour modelling
- G05B 2219/34418: Scheduler for sequential control, task planning, control sequence
- Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

Embodiments presented herein provide techniques for planning and scheduling in a factory. The technique begins by generating a bottleneck loading plan from a plurality of inputs. A simulation is run using the bottleneck loading plan. The factory is simulated using decisions made based on the bottleneck loading plan and a lot-to-machine schedule is generated with the simulation bottleneck loading plan.

## Claims

### Claim 1

A method for back end planning and scheduling a factory, the method comprising:
generating a bottleneck loading plan for one or more families of equipment from a plurality of inputs;
generating a simulation of the factory using the bottleneck loading plan;
creating a model for the factory by running the simulation of the factory and using decisions based on the bottleneck loading plan and a block based workflow; and
generating a lot-to-machine schedule with the model to control one of,
one or more processes related to fabrication of semiconductor substrates; and
one or more processes related to cutting, assembly, and testing of a semiconductor die on semiconductor substrates;
publishing the lot-to-machine schedule to the factory;
implementing what each equipment should work on next based on the generated lot-to-machine schedule;
monitoring real-time factory data of the implemented schedule;
comparing the real time factory data of the implemented schedule to the generated lot-to-machine schedule to determine a deviation; and
providing a notification if the deviation exceeds a threshold.

### Claim 2 (depends on 1)

The method of claim 1 wherein the inputs are demands, raw materials, and a factory state.

### Claim 3 (depends on 1)

The method of claim 1 wherein lot-to-machine schedules are based on time buckets, wherein the time buckets include one of one day, one shift, and a half day.

### Claim 4 (depends on 1)

The method of claim 1 wherein the bottleneck loading plan comprises:
determining individual factory equipment for which the next lot has to wait for a current lot to complete prior to using the individual factory equipment.

### Claim 5 (depends on 1)

The method of claim 1 further comprising:
generating a new bottleneck loading plan from real-time data;
running a simulation using the new bottleneck loading plan; and
publishing a new schedule to the factory.

### Claim 6

A non-transitory computer-readable medium containing computer program code that, when executed by a processor, performs an operation for back end planning and scheduling a factory, the operation comprising:
generating a bottleneck loading plan from a plurality of inputs;
running a simulation using the bottleneck loading plan;
simulating the factory using decisions made based on the bottleneck loading plan; and generating a lot-to-machine schedule with the model to control one of,
one or more processes related to fabrication of semiconductor substrates; and
one or more processes related to cutting, assembly, and testing of a semiconductor die on semiconductor substrates;
publishing the lot-to-machine schedule to the factory;
implementing what each equipment should work on next based on the generated lot-to-machine schedule;
monitoring real-time factory data of the implemented schedule;
comparing the real time factory data of the implemented schedule to the generated lot-to-machine schedule to determine a deviation; and
providing a notification if the deviation exceeds a threshold.

### Claim 7 (depends on 6)

The non-transitory computer-readable medium of claim 6 wherein the inputs are demands, raw materials, and a factory state.

### Claim 8 (depends on 6)

The non-transitory computer-readable medium of claim 6 wherein lot-to-machine schedules are based on time buckets, wherein the time buckets include one of one day, one shift, and a half day.

### Claim 9 (depends on 6)

The non-transitory computer-readable medium of claim 6 wherein the bottleneck loading plan comprises:
determining individual factory equipment for which the next lot has to wait for a current lot to complete prior to using the individual factory equipment.

### Claim 10 (depends on 6)

The non-transitory computer-readable medium of claim 6 further comprising:
generating a new bottleneck loading plan from real-time data;
running a simulation using the new bottleneck loading plan; and
publishing a new schedule to the factory.

### Claim 11

A planning and scheduling system for a factory, wherein the factory comprises a plurality of work orders and one or more tools for processing the work orders, the scheduling system comprising:
at least one processor; and
a memory containing a program that, when executed by the at least one processor, performs an operation for planning and scheduling the factory, the operation comprising:
generating a bottleneck loading plan from a plurality of inputs;
running a simulation using the bottleneck loading plan;
simulating the factory using decisions made based on the bottleneck loading plan;
creating a model for the factory by running the simulation of the factory and using decisions based on the bottleneck loading plan and a block based workflow; and
generating a lot-to-machine schedule with the model to control one of,
one or more processes related to fabrication of semiconductor substrates; and
one or more processes related to cutting, assembly, and testing of a semiconductor die on semiconductor substrates;
publishing the lot-to-machine schedule to the factory;
implementing what each equipment should work on next based on the generated lot-to-machine schedule;
monitoring real-time factory data of the implemented schedule;
comparing the real time factory data of the implemented schedule to the generated lot-to-machine schedule to determine a deviation; and
providing a notification if the deviation exceeds a threshold.

### Claim 12 (depends on 11)

The system of claim 11 wherein lot-to-machine schedules are based on time buckets, wherein the time buckets include one of one day, one shift, and a half day.

### Claim 13 (depends on 11)

The system of claim 11 wherein the bottleneck loading plan comprises:
determining individual factory equipment for which the next lot has to wait for a current lot to complete prior to using the individual factory equipment.

### Claim 14 (depends on 11)

The system of claim 11 further comprising:
generating a new bottleneck loading plan from real-time data;
running a simulation using the new bottleneck loading plan; and
publishing a new schedule to the factory.