# US 10,768,411 B2 · Hybrid MEMS scanning module > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,768,411 B2 - Document ID: US10768411B2 - Status: Granted - Kind: B2 - Application number: 16/425,997 - Filed: 2019-05-30 - Published: 2019-10-17 - Granted: 2020-09-08 - Earliest claimed: 2015-02-16 - Assignees: Apple Inc. - Applicants: Apple Inc. - Inventors: Raviv Erlich; Alexander Shpunt; Yuval Gerson - Web page: https://patentgrep.com/patent/US10768411B2 ## CPC - G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means} - G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)} - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support. ## Claims ### Claim 1 A scanning device, comprising: a base containing one or more rotational bearings disposed along a gimbal axis; a gimbal, comprising a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base; a mirror assembly, comprising a semiconductor substrate, which has been etched and coated to define: a support, which is fixed to the gimbal; at least one mirror, contained within the support; and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support; and a drive, comprising: a mirror drive assembly, which comprises at least one rotor comprising one or more permanent magnets, which are fixed to the at least one mirror, and a stator comprising at least one core, which is positioned in proximity to the at least one mirror and wound with one or more coils; a gimbal drive assembly, which is configured to rotate the gimbal about the gimbal axis; and drive circuitry, which is coupled to apply electrical currents to the gimbal drive assembly and to the one or more coils of the mirror drive assembly so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively. ### Claim 2 (depends on 1) The device according to claim 1, wherein the bearings comprise rolling-element bearings, comprising an outer race that is fixed to the base and an inner race that is fixed to the shaft of the gimbal. ### Claim 3 (depends on 1) The device according to claim 1, wherein the one or more rotational bearings comprise a pair of bearings disposed at opposing ends of the gimbal axis. ### Claim 4 (depends on 1) The device according to claim 1, wherein the at least one mirror axis is perpendicular to the gimbal axis. ### Claim 5 (depends on 1) The device according to claim 1, wherein the connecting member comprises hinges arranged along the at least one mirror axis. ### Claim 6 (depends on 5) The device according to claim 5, wherein the at least one mirror comprises an array of two or more mirrors contained within the support, and wherein the hinges comprise two or more pairs of hinges, which are connected respectively to the two or more mirrors and define respective, mutually parallel mirror axes about which the mirrors rotate. ### Claim 7 (depends on 6) The device according to claim 6, wherein the mirrors in the array are coupled together with a coupling strength sufficient to synchronize an oscillation of the mirrors about the respective mirror axes. ### Claim 8 (depends on 1) The device according to claim 1, wherein the drive is configured to cause the at least one mirror to rotate about the at least one mirror axis at a first frequency, while causing the gimbal to rotate about the gimbal axis at a second frequency, which is lower than the first frequency. ### Claim 9 (depends on 8) The device according to claim 8, wherein the first frequency is a resonant frequency of rotation of the at least one mirror within the support. ### Claim 10 (depends on 8) The device according to claim 8, wherein the gimbal drive assembly comprises: a stator assembly, which is fixed to the base and comprises at least one further core and one or more further coils comprising conductive wire wound on the at least one further core; and at least one further rotor, comprising one or more further permanent magnets, which are fixed to the shaft of the gimbal. ### Claim 11 (depends on 10) The device according to claim 10, wherein the drive circuitry is coupled to apply the electrical currents at the second frequency to the one or more further coils and at the first frequency to the one or more coils wound on the stator of the mirror drive assembly. ### Claim 12 (depends on 1) The device according to claim 1, wherein the one or more permanent magnets are fixed to a back side of the at least one mirror, and wherein the at least one core has a front end positioned in proximity to the back side of the at least one mirror. ### Claim 13 (depends on 12) The device according to claim 12, wherein at least one core is fixed to the base. ### Claim 14 (depends on 12) The device according to claim 12, wherein the one or more permanent magnets are recessed into the back side of the at least one mirror. ### Claim 15 A method for producing a scanning device, the method comprising: etching and coating a semiconductor substrate so as to define: at least one mirror; a support surrounding the at least one mirror; and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support; fixing the support to a gimbal having a shaft; fitting the shaft into one or more rotational bearings that are held by a base on a gimbal axis, so that the gimbal rotates about the gimbal axis relative to the base; fixing at least one rotor, comprising one or more permanent magnets, to the at least one mirror; positioning a stator, comprising at least one core wound with one or more coils, in proximity to the at least one mirror; coupling a gimbal drive assembly to rotate the gimbal about the gimbal axis; and applying electrical currents to the gimbal drive assembly and to the one or more coils of the stator so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively. ### Claim 16 (depends on 15) The method according to claim 15, wherein fitting the shaft comprises inserting the shaft into a pair of bearings disposed at opposing ends of the gimbal axis. ### Claim 17 (depends on 15) The method according to claim 15, wherein the at least one mirror axis is perpendicular to the gimbal axis. ### Claim 18 (depends on 15) The method according to claim 15, wherein applying the electrical currents causes the at least one mirror to rotate about the at least one mirror axis at a first frequency, while causing the gimbal to rotate about the gimbal axis at a second frequency, which is lower than the first frequency. ### Claim 19 (depends on 18) The method according to claim 18, wherein the first frequency is a resonant frequency of rotation of the at least one mirror within the support. ### Claim 20 (depends on 18) The method according to claim 18, wherein fixing the at least one rotor comprises fixing the one or more permanent magnets to a back side of the at least one mirror, and wherein positioning the stator comprises positioning a front end of the at least one core in proximity to the back side of the at least one mirror.