# US 10,768,410 B2 · Detection of amplitude, regulation of amplitude and detection of direction of an oscillation of an oscillatory body > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,768,410 B2 - Document ID: US10768410B2 - Status: Granted - Kind: B2 - Application number: 16/437,922 - Filed: 2019-06-11 - Published: 2020-01-16 - Granted: 2020-09-08 - Earliest claimed: 2018-07-13 - Assignees: Infineon Technologies AG - Applicants: Infineon Technologies AG - Inventors: Christoph Steiner; Stephan Gerhard Albert; Franz Michael Darrer; Marcus Edward Hennecke; Hendrikus Van Lierop; Thomas Thurner - Web page: https://patentgrep.com/patent/US10768410B2 ## CPC - G02B 26/0841: {the reflecting element being moved or deformed by electrostatic means} - G01L 1/14: by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators - G01R 27/2605: {Measuring capacitance (capacitive sensors G01D5/24)} - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - H03B 5/30: with frequency-determining element being electromechanical resonator - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H03B: GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS (generators adapted for electrophonic musical instruments G10H; masers or lasers H01S; generation of oscillations in plasma H05H) ## Abstract A device is provided for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body. The device comprises a detection circuit for detecting a signal representing a measure of the change in capacitance; and an evaluation circuit for determining information from the signal, wherein the evaluation circuit is designed to calculate the amplitude of the oscillation of the oscillatory body from the determined information and an ascertained period of the oscillation of the oscillatory body and/or to regulate the amplitude of the oscillation of the oscillatory body using the determined information and the ascertained period of the oscillation of the oscillatory body. ## Claims ### Claim 1 A device for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body, wherein the device comprises: a detection circuit to detect a signal representing a measure of the change in the capacitance; and an evaluation circuit to: ascertain a pulse width of a pulse in the signal before a crossing through a reference position of the oscillation; determine information from the pulse width, wherein the information includes a measure of a time interval between a predetermined event in the signal corresponding to an angular position of the oscillatory body, and a point in time of the crossing; and at least one of: calculate the amplitude from the information and an ascertained period of the oscillation, or regulate the amplitude using the information and the ascertained period. ### Claim 2 (depends on 1) The device as claimed in claim 1, wherein the predetermined event is a temporal position of the pulse. ### Claim 3 (depends on 2) The device as claimed in claim 2, wherein the evaluation circuit is further to: ascertain the temporal position of the pulse based on the pulse width. ### Claim 4 (depends on 1) The device as claimed in claim 1, wherein the evaluation circuit is further to: measure a maximum value of the signal, define a threshold using the maximum value, and perform a threshold value comparison of the signal with the threshold; and wherein the evaluation circuit, when ascertaining the pulse width, is to ascertain the pulse width using a result of the threshold value comparison. ### Claim 5 (depends on 4) The device as claimed in claim 4, wherein the evaluation circuit when ascertaining the pulse width, is to: ascertain a width between a first point in time, at which the signal exceeds the threshold, and a second point in time, at which the signal falls below the threshold. ### Claim 6 (depends on 4) The device as claimed in claim 4, wherein the evaluation circuit, when ascertaining the pulse width, is to: ascertain a width between a first point in time, at which the signal exceeds the threshold, and a second point in time, at which the signal has the crossing through the reference position after the first point in time. ### Claim 7 (depends on 1) The device as claimed in claim 1, wherein the evaluation circuit, when ascertaining the pulse width, is to: ascertain the pulse width by fitting a model curve to the signal. ### Claim 8 (depends on 1) The device as claimed in claim 1, wherein the device further comprises: a monitoring unit to: detect a maximum value of the signal in order to check whether the maximum value lies within a predetermined range, and output a malfunction signal based on the maximum value lying outside the predetermined range. ### Claim 9 (depends on 1) A microelectromechanical system (MEMS) device comprising: the oscillatory body to oscillate about the oscillation axis as claimed in claim 1; the device as claimed in claim 1; and a driver device designed to drive the oscillatory body, wherein the driver device comprises: the at least one electrode of the oscillatory body, the stationary electrode, and a driver circuit designed to apply a variable voltage between the at least one electrode of the oscillatory body and the stationary electrode. ### Claim 10 (depends on 9) The MEMS device as claimed in claim 9, wherein the MEMS device further comprises a regulating circuit designed to regulate the variable voltage applied between the at least one electrode of the oscillatory body and the stationary electrode using the information. ### Claim 11 (depends on 10) The MEMS device as claimed in claim 10, wherein the regulating circuit is further designed to regulate a phase difference between the variable voltage applied between the at least one electrode of the oscillatory body and the stationary electrode and the oscillation of the oscillatory body. ### Claim 12 (depends on 1) The device as claimed in claim 1, wherein the signal is a current between the at least one electrode and the stationary electrode. ### Claim 13 A device for detecting a direction in which an oscillatory body moves during an oscillation about an oscillation axis, the device comprising: the oscillatory body comprising at least one movable electrode; a first stationary electrode on a first side of the oscillation axis and a second stationary electrode on a second side of the oscillation axis, wherein a first change in a first capacitance between the at least one movable electrode and the first stationary electrode and a second change in a second capacitance between the at least one movable electrode and the second stationary electrode take place during the oscillation, a detection circuit to: detect a first signal representing a measure of the first change in the first capacitance over time before a crossing through a reference position of the oscillation, and detect a second signal representing a measure of the second change in the second capacitance over time before the crossing through the reference position of the oscillation; and an evaluation circuit to: determine an asymmetry of a difference of the first signal and the second signal with respect to an oscillation angle, and determine, using the asymmetry, the direction in which the oscillatory body moves during the oscillation before the crossing through the reference position of the oscillation. ### Claim 14 (depends on 13) The device as claimed in claim 13, wherein the at least one movable electrode and/or the first stationary electrode and the second stationary electrode comprise a first layer having a first thickness and a second layer having a second thickness, the second thickness being different than the first thickness. ### Claim 15 (depends on 13) The device as claimed in claim 13, wherein the evaluation circuit is further to: compare a first maximum value, associated with the first signal before the crossing through the reference position of the oscillation, and a second maximum value associated with the second signal before the crossing through the reference position of the oscillation; and wherein the evaluation circuit, when determining the direction, is to: determine the direction depending on which the first maximum value or the second maximum value is greater. ### Claim 16 (depends on 13) A microelectromechanical system (MEMS) device comprising: the device as claimed in claim 13; and another device to detect an amplitude of the oscillation of the oscillatory body, wherein the other device includes another evaluation circuit to determine information using a signal of the first signal and the second signal whose maximum value is lower. ### Claim 17 A method for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body, wherein the method comprises: detecting a signal, representing a measure of the change in capacitance, over time; ascertaining a pulse width of a pulse in the signal before a crossing through a reference position of the oscillation; determining information from the pulse width, the information being a measure of a time interval between a point in time of a predetermined event in the signal, corresponding to an angular position of the oscillatory body, and a point in time of the crossing; determining a period of the oscillation; and at least one of: calculating the amplitude based on the information and the period of the oscillation, or regulating the amplitude using the information and the period of the oscillation. ### Claim 18 (depends on 17) The method as claimed in claim 17, wherein the predetermined event is a temporal position of the pulse. ### Claim 19 (depends on 18) The method as claimed in claim 18, further comprising: ascertaining the temporal position of the pulse based on the pulse width. ### Claim 20 (depends on 17) The method as claimed in claim 17, wherein ascertaining the pulse width comprises: measuring a maximum value of the signal, defining a threshold using the maximum value, performing a threshold value comparison of the signal with the threshold, and ascertaining the pulse width using a result of the threshold value comparison. ### Claim 21 (depends on 20) The method as claimed in claim 20, wherein the pulse width is ascertained between a first point in time, at which the signal exceeds the threshold, and a second point in time, at which the signal falls below the threshold. ### Claim 22 (depends on 20) The method as claimed in claim 20, wherein the pulse width is ascertained between a first point in time, at which the signal exceeds the threshold, and a second point in time, at which the signal has the crossing through the reference position after the first point in time. ### Claim 23 (depends on 17) The method as claimed in claim 17, wherein ascertaining the pulse width comprises fitting a model curve to the signal. ### Claim 24 (depends on 17) The method as claimed in claim 17, further comprising: detecting a maximum value of the signal, checking whether the maximum value lies within a predetermined range, and outputting a malfunction signal based on the maximum value lying outside the predetermined range. ### Claim 25 (depends on 17) The method as claimed in claim 17, further comprising regulating a drive voltage applied between the at least one electrode of the oscillatory body and the stationary electrode using the information. ### Claim 26 (depends on 17) The method as claimed in claim 17, wherein the signal is a current between the at least one electrode and the stationary electrode. ### Claim 27 A method for detecting a direction in which an oscillatory body moves during an oscillation about an oscillation axis, wherein the oscillatory body comprises at least one movable electrode, wherein a first stationary electrode is arranged on a first side of the oscillation axis and a second stationary electrode is arranged on a second side of the oscillation axis, wherein a first change in a first capacitance between the at least one movable electrode and the first stationary electrode and a second change in a second capacitance between the at least one movable electrode and the second stationary electrode take place during the oscillation of the oscillatory body, wherein the method comprises: detecting a first signal representing a measure of the first change in the first capacitance over time before a crossing through a reference position of the oscillation; detecting a second signal representing a measure of the second change in the second capacitance over time before the crossing through the reference position of the oscillation; determining an asymmetry of a difference of the first signal and the second signal with respect to an oscillation angle; and determining, using the asymmetry, the direction in which the oscillatory body moves during the oscillation before the crossing through the reference position of the oscillation. ### Claim 28 (depends on 27) The method as claimed in claim 27, wherein determining the direction comprises: comparing a first maximum value, associated with the first signal before the crossing through the reference position of the oscillation, and a second maximum value associated with the second signal before the crossing through the reference position of the oscillation, and determining the direction depending on which of the first maximum value or the second maximum value is greater.