# US 10,768,408 B2 · Process for manufacturing a MEMS micromirror device, and associated device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,768,408 B2 - Document ID: US10768408B2 - Status: Granted - Kind: B2 - Application number: 15/465,019 - Filed: 2017-03-21 - Published: 2018-02-01 - Granted: 2020-09-08 - Earliest claimed: 2016-07-28 - Assignees: STMicroelectronics S.r.l. - Applicants: STMicroelectronics S.r.l. - Inventors: Enri Duqi; Lorenzo Baldo; Roberto Carminati; Flavio Francesco Villa - Web page: https://patentgrep.com/patent/US10768408B2 ## CPC - G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)} - B81B 7/02: containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) - B81C 1/00158: {Diaphragms, membranes (manufacture process for semi-permeable inorganic membranes B01D67/0039)} - B81C 1/00182: {Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer} - G02B 26/0841: {the reflecting element being moved or deformed by electrostatic means} - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - H04N 9/3191: {Testing thereof (testing of displays in general G09G3/006)} - B81B 2201/042: Micromirrors, not used as optical switches - B81B 2203/0127: Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function - B81B 2203/0315: Cavities - B81C 2201/0116: Thermal treatment for structural rearrangement of substrate atoms, e.g. for making buried cavities - B81C 2201/0177: Epitaxy, i.e. homo-epitaxy, hetero-epitaxy, GaAs-epitaxy - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass. ## Claims ### Claim 1 A process for manufacturing a micromirror device in MEMS technology, comprising the steps of: forming a buried cavity in a monolithic body of semiconductor material having a first and a second main surfaces, the buried cavity delimiting a suspended membrane arranged between the buried cavity and the first main surface; forming an opening in the monolithic body from the second main surface, the opening extending as far as and joining to the buried cavity; defining the suspended membrane to form a supporting frame and a mobile mass carried by the supporting frame and rotatable about an axis parallel to the first main surface, wherein the mobile mass has a width less than a width of the opening; and forming a reflecting region on top of the mobile mass. ### Claim 2 (depends on 1) The process according to claim 1, wherein forming the buried cavity comprises: forming within a substrate of monocrystalline semiconductor material a plurality of trenches extending from a face of the substrate and delimiting between them columns of semiconductor material; epitaxially growing, from the columns, a closing layer of semiconductor material, the closing layer closing the trenches at the top; and thermal annealing and causing migration of the semiconductor material of the columns towards the closing layer to form the monolithic body, the buried cavity and the suspended membrane. ### Claim 3 (depends on 1) The process according to claim 1, further comprising the step of: forming an electrical insulating region extending peripherally around the suspended membrane, along a line electrically separating the supporting frame from a fixed supporting region, from the first main surface of the monolithic body to the buried cavity. ### Claim 4 (depends on 3) The process according to claim 3, wherein forming the electrical insulating region comprises: forming a plurality of holes in the suspended membrane, the holes extending from the first main surface to the buried cavity and spaced from each other by suspension bridges; and completely thermally oxidizing the suspension bridges. ### Claim 5 (depends on 4) The process according to claim 4, wherein completely thermally oxidizing comprises growing oxide portions in the plurality of holes. ### Claim 6 (depends on 5) The process according to claim 5, wherein the oxide portions do not completely fill the plurality of holes. ### Claim 7 (depends on 4) The process according to claim 4, wherein the steps of forming the plurality of holes and defining the suspended membrane comprise: selectively removing portions of the suspended membrane and simultaneously forming the plurality of holes and a trench surrounding the mobile mass. ### Claim 8 (depends on 7) The process according to claim 7, wherein the trench delimits and separates mobile electrodes that are rigid with the mobile mass and fixed electrodes that are rigid with the supporting frame; the mobile and fixed electrodes being comb-fingered. ### Claim 9 (depends on 7) The process according to claim 7, wherein completely thermally oxidizing comprises forming an oxide layer on walls of the trench and of the buried cavity, wherein the oxide layer does not fill the trench. ### Claim 10 (depends on 9) The process according to claim 9, further comprising deep etching the semiconductor material of the monolithic body from the second main surface, and stopping etching at the oxide layer on the wall of the buried cavity. ### Claim 11 (depends on 9) The process according to claim 9, wherein forming the plurality of holes and completely thermally oxidizing are carried out before defining the suspended membrane. ### Claim 12 (depends on 11) The process according to claim 11, wherein, after completely thermally oxidizing and before defining the suspended membrane, the semiconductor material of the monolithic body is selectively removed underneath the buried cavity by deep etching, from the second main surface of the monolithic body, where the oxide layer on the wall of the buried cavity forms an etch-stop layer. ### Claim 13 A process, comprising: forming a buried cavity in a monolithic body of semiconductor material having a first main surface and a second main surface, the buried cavity delimiting a suspended membrane arranged between the buried cavity and the first main surface; forming an electrical insulating region extending completely through said suspended membrane and peripherally surrounding a supporting frame; defining in said suspended membrane a rotatable mobile mass carried by the supporting frame; removing a portion of the monolithic body of semiconductor material from the second main surface to reach the buried cavity to thereby form an opening having a width greater than a width of the rotatable mobile mass; and forming a reflecting region on a top surface of the rotatable mobile mass. ### Claim 14 (depends on 13) The process according to claim 13, wherein forming the buried cavity comprises: forming within a substrate of monocrystalline semiconductor material a plurality of trenches extending from a face of the substrate and delimiting between them columns of semiconductor material; epitaxially growing, from the columns, a closing layer of semiconductor material, the closing layer closing the trenches at the face of the substrate; and thermal annealing and causing migration of the semiconductor material of the columns towards the closing layer to form the monolithic body, the buried cavity and the suspended membrane. ### Claim 15 (depends on 13) The process according to claim 13, wherein forming the electrical insulating region comprises: forming a plurality of holes extending completely through the suspended membrane from the first main surface to the buried cavity and spaced from each other by suspension bridges; and completely thermally oxidizing the suspension bridges. ### Claim 16 (depends on 15) The process according to claim 15, wherein completely thermally oxidizing comprises growing oxide portions in the plurality of holes. ### Claim 17 (depends on 16) The process according to claim 16, wherein the oxide portions do not completely fill the plurality of holes. ### Claim 18 (depends on 15) The process according to claim 15, wherein defining the rotatable mobile mass comprises forming a trench, said trench further delimiting and separating mobile electrodes that are rigid with the rotatable mobile mass and fixed electrodes that are rigid with the supporting frame, wherein the mobile and fixed electrodes are interdigitate. ### Claim 19 (depends on 18) The process according to claim 18, wherein completely thermally oxidizing comprises forming an oxide layer on walls of the trench and of the buried cavity, but wherein said oxide layer does not fill the trench. ### Claim 20 A process for manufacturing a MEMS device, comprising the steps of: forming a buried cavity in a monolithic body of semiconductor material having a first and a second main surfaces, the buried cavity delimiting a suspended membrane arranged between the buried cavity and the first main surface; forming an opening in the monolithic body from the second main surface, the opening extending as far as and joining to the buried cavity; forming an electrical insulating region extending peripherally around the suspended membrane; forming a plurality of holes in the suspended membrane, the holes extending from the first main surface to the buried cavity and spaced from each other by suspension bridges to thereby form a mobile mass that is rotatable about an axis parallel to the first main surface, wherein the mobile mass has a width less than a width of the opening; and completely thermally oxidizing the suspension bridges. ### Claim 21 (depends on 20) The process according to claim 20, wherein the suspended membrane includes a supporting frame carrying the mobile mass, the process further comprising forming a reflecting region on top of the mobile mass. ### Claim 22 (depends on 21) The process according to claim 21, wherein the electrical insulating region extends peripherally around the suspended membrane, along a line electrically separating the supporting frame from a fixed supporting region, from the first main surface of the monolithic body to the buried cavity. ### Claim 23 (depends on 20) The process according to claim 20, wherein forming the buried cavity comprises: forming within a substrate of monocrystalline semiconductor material a plurality of trenches extending from a face of the substrate and delimiting between them columns of semiconductor material; epitaxially growing, from the columns, a closing layer of semiconductor material, the closing layer closing the trenches at tops thereof; and thermal annealing and causing migration of the semiconductor material of the columns towards the closing layer to form the monolithic body, the buried cavity and the suspended membrane. ### Claim 24 (depends on 20) The process according to claim 20, wherein completely thermally oxidizing comprises growing oxide portions in the plurality of holes. ### Claim 25 (depends on 24) The process according to claim 24, wherein the oxide portions do not completely fill the plurality of holes. ### Claim 26 (depends on 20) The process according to claim 20, wherein forming the plurality of holes and completely thermally oxidizing are carried out before delimiting the suspended membrane. ### Claim 27 (depends on 26) The process according to claim 26, further comprising, after completely thermally oxidizing and before delimiting the suspended membrane, selectively removing semiconductor material of the monolithic body underneath the buried cavity by deep etching, from the second surface of the monolithic body.