# US 10,768,206 B2 · Loop-back probe test and verification method

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- Number: US 10,768,206 B2
- Document ID: US10768206B2
- Status: Granted
- Kind: B2
- Application number: 15/188,024
- Filed: 2016-06-21
- Published: 2016-12-29
- Granted: 2020-09-08
- Earliest claimed: 2015-06-24
- Assignees: Integrated Technology Corporation
- Applicants: Integrated Technology Corporation
- Inventors: Rodney E. Schwartz; John K. Geist; Daniel Kosecki
- Web page: https://patentgrep.com/patent/US10768206B2

## CPC

- G01R 1/06794: {Devices for sensing when probes are in contact, or in position to contact, with measured object}
- G01R 31/2891: {related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A method is provided for using a loop-back test device to verify continuity between loop-back probes electrically connected to each other on a probe card, the loop-back test device including a first conductive region electrically connected to a substrate, a second conductive region electrically isolated from the substrate, the second conductive region spaced apart from the first conductive region such that when a first loop-back probe contacts the first conductive region a second loop-back probe contacts the second conductive region, The method includes placing the first loop-back probe in electrical contact with the first conductive region, and placing the second loop-back probe in electrical contact with the second conductive region. Continuity between the substrate and the second conductive region is then measured.

## Claims

### Claim 1

A method of using a loop-back test device to verify continuity between loop-back probes electrically connected to each other on a probe card, the loop-back test device including a first conductive region electrically connected to a substrate, a second conductive region electrically isolated from the substrate, the second conductive region spaced apart from the first conductive region such that when a first loop-back probe contacts the first conductive region a second loop-back probe contacts the second conductive region, the method comprising:
placing the first loop-back probe in electrical contact with the first conductive region;
placing the second loop-back probe in electrical contact with the second conductive region;
placing a third probe of the probe card in electrical contact with the second conductive region, wherein on the probe card the third probe is electrically isolated from the first and second loop-back probes; and
measuring continuity between the substrate and the second conductive region via the first loop-back probe, the second loop-back probe and the third probe.

### Claim 2 (depends on 1)

The method according to claim 1, wherein measuring continuity includes electrically connecting the substrate to a first measurement terminal of a continuity measurement device, and electrically connecting the second conductive region to a second measurement terminal of the continuity measurement device.

### Claim 3 (depends on 1)

The method according to claim 1, further comprising using a semiconductor wafer as the loop-back test device.

### Claim 4 (depends on 1)

The method according to claim 1, further comprising using a chuck of a probe card analyzer as the loop-back test device.

### Claim 5

A method of using a loop-back test device to verify continuity between loop-back probes electrically connected to each other on a probe card, the loop-back test device including a first conductive region electrically connected to a substrate, a second conductive region electrically isolated from the substrate, the second conductive region spaced apart from the first conductive region such that when a first loop-back probe contacts the first conductive region a second loop-back probe contacts the second conductive region, and a reference mark arranged on a side of the substrate opposite the first conductive region, the reference mark aligned with the first conductive region to indicate a position of the first conductive region, the method comprising:
placing the first loop-back probe in electrical contact with the first conductive region;
placing the second loop-back probe in electrical contact with the second conductive region;
measuring continuity between the substrate and the second conductive region;
the loop-back test device further including a reference mark arranged on a side of the substrate opposite the first conductive region, the reference mark aligned with the first conductive, region to indicate a position of the first conductive region, the method comprising:
aligning the loop-back test device on a chuck of a probe card analyzer such that the reference mark is in a field of view of an optical detector of the analyzer;
obtaining via the optical detector an image of the reference mark;
determining a position of the reference mark within the image; and
establishing a position of the first conductive region based on the determined position of the reference mark in the image.

### Claim 6 (depends on 5)

The method according to claim 5, wherein determining the position of the reference mark comprises digitally capturing a video image of the reference mark.

### Claim 7 (depends on 5)

The method according to claim 5, wherein determining the position of the reference mark comprises using a pointing device to manually identify a center of the reference mark.

### Claim 8 (depends on 5)

The method according to claim 5, wherein determining the position of the reference mark comprises using a probe having a known position within an array of probes, and moving the chuck such that the probe having the known position points to the center of the first conductive region.

### Claim 9

A method of using a loop-back test device to verify continuity between loop-back probes having a direct electrical connection to each other on a probe card, the loop-back test device including a first conductive region electrically connected to a substrate, a second conductive region electrically isolated from the substrate, the second conductive region spaced apart from the first conductive region such that when a first loop-back probe contacts the first conductive region a second loop-back probe contacts the second conductive region, the method comprising:
placing the first loop-back probe in electrical contact with the first conductive region;
placing the second loop-back probe in electrical contact with the second conductive region; and
measuring continuity between the substrate and the second conductive region.
