# US 10,768,131 B2 · Sensor substrate arrangement for a particulate sensor device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,768,131 B2 - Document ID: US10768131B2 - Status: Granted - Kind: B2 - Application number: 15/752,133 - Filed: 2016-11-09 - Published: 2018-08-23 - Granted: 2020-09-08 - Earliest claimed: 2015-11-25 - Assignees: KYOCERA Corporation - Applicants: KYOCERA Corporation - Inventors: Hidekazu Otomaru; Takashi Kimura - Web page: https://patentgrep.com/patent/US10768131B2 ## CPC - G01N 27/04: by investigating resistance - B01D 46/0084: {provided with safety means} - G01N 15/0606: {by collecting particles on a support} - G01N 15/0656: {using electric, e.g. electrostatic methods or magnetic methods (by investigating individual particles G01N15/1031, G01N15/12)} - G01N 2015/0046: {in gas, e.g. smoke} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28) ## Abstract There are provided a sensor substrate and a sensor device which have high detection accuracy. A sensor substrate includes an insulating substrate; sensing electrodes disposed in the insulating substrate, the sensing electrodes being columnar and being composed of at least one pair of positive and negative sensing electrodes, in the at least one pair of positive and negative sensing electrodes, part of a positive electrode and part of a negative electrode being each exposed from one surface of the insulating substrate; and innerlayer wiring lines embedded within the insulating substrate, the innerlayer wiring lines corresponding to the positive electrode and the negative electrode, respectively, in the at least one pair of positive and negative sensing electrodes. ## Claims ### Claim 1 A sensor substrate, comprising: an insulating substrate having a first surface; sensing electrodes disposed in the insulating substrate, the sensing electrodes being columnar and being composed of at least two pairs of positive and negative sensing electrodes, in the at least two pairs of positive and negative sensing electrodes, a first part of a positive electrode and a second part of a negative electrode being each exposed from the first surface of the insulating substrate; and innerlayer wiring lines embedded within the insulating substrate, the innerlayer wiring lines corresponding to the positive electrode and the negative electrode, respectively, in the at least two pairs of positive and negative sensing electrodes, wherein the innerlayer wiring lines comprises first lines corresponding each of the positive electrode in the at least two pairs of positive and negative sensing electrode and comprises second lines corresponding each of the positive electrode in the at least two pairs of positive and negative sensing electrode. ### Claim 2 (depends on 1) The sensor substrate according to claim 1, wherein remaining parts of the at least two pairs of positive and negative sensing electrodes, exclusive of the first part of the positive electrode and the second part of the negative electrode, are embedded within the insulating substrate, and the first part of the positive electrode is a first upper surface of the positive electrode and the second part of the negative electrode a second upper surface of the negative electrode, and the first upper surface and the second upper surface are exposed so as to be flush with the first surface of the insulating substrate. ### Claim 3 (depends on 1) The sensor substrate according to claim 1, wherein the sensing electrodes have a columnar shape which has an axis extending so as to intersect the first surface of the insulating substrate. ### Claim 4 (depends on 3) The sensor substrate according to claim 3, wherein the columnar shape of the sending electrodes is a circular cylinder, a quadrangular prism, or an octagonal prism. ### Claim 5 (depends on 4) The sensor substrate according to claim 4, wherein the first part of the positive electrode and the second part of the negative electrode are similar to each other in shape. ### Claim 6 (depends on 1) The sensor substrate according to claim 1, wherein each of the first lines and the second lines is connected to an outside. ### Claim 7 (depends on 1) The sensor substrate according to claim 1, further comprising: a heat-generating electrode embedded within the insulating substrate. ### Claim 8 (depends on 1) A sensor device, comprising: the sensor substrate according to claim 1; and a power source which supplies electric power to the at least one pair of positive and negative sensing electrodes via the innerlayer wiring lines. ### Claim 9 A sensor substrate, comprising: an insulating substrate having a first surface; sensing electrodes disposed in the insulating substrate and composed of at least one pair of positive and negative sensing electrodes; and innerlayer wiring lines embedded within the insulating substrate and corresponding to the positive electrode and the negative electrode, respectively, in the at least one pair of positive and negative sensing electrodes, wherein, in the at least one pair of positive and negative sensing electrodes, a first part of a positive electrode and a second part of a negative electrode being each exposed from the first surface of the insulating substrate, and the insulating substrate is provided with a groove located between the at least one pair of positive and negative sensing electrodes, the groove being opened to the first surface and being concaved from the first surface. ### Claim 10 (depends on 9) The sensor substrate according to claim 9, wherein the at least one pair of positive and negative sensing electrodes is a pair of columnar sensing electrodes disposed so as to face the groove. ### Claim 11 (depends on 10) The sensor substrate according to claim 10, wherein the at least one pair of positive and negative sensing electrodes extends to a bottom-side end of the groove. ### Claim 12 (depends on 10) The sensor substrate according to claim 10, wherein, in the groove, an opening width is larger than a bottom width. ### Claim 13 (depends on 10) A sensor device, comprising: the sensor substrate according to claim 10; and a power supply section which supplies a potential to the at least one pair of positive and negative sensing electrodes. ### Claim 14 (depends on 10) The sensor substrate according to claim 10, wherein, in a plane view, an outer edge of the groove surrounds the at least one pair of positive and negative sensing electrodes. ### Claim 15 (depends on 10) The sensor substrate according to claim 10, wherein said groove additionally comprises an inner surface, and wherein each of said pair of columnar sensing electrodes comprises an outer side, each said outer side being kept in contact with said inner surface of said groove.