# US 10,767,979 B2 · Optical measurement device and optical measurement method

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- Number: US 10,767,979 B2
- Document ID: US10767979B2
- Status: Granted
- Kind: B2
- Application number: 16/248,811
- Filed: 2019-01-16
- Published: 2019-09-19
- Granted: 2020-09-08
- Earliest claimed: 2018-03-13
- Assignees: OMRON Corporation
- Applicants: OMRON Corporation
- Inventors: Jun Takashima; Tomonori Kondo
- Web page: https://patentgrep.com/patent/US10767979B2

## CPC

- G01B 11/14: for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00)
- G01B 11/026: {by measuring distance between sensor and object (G01B11/0608 takes precedence)}
- G01N 21/01: Arrangements or apparatus for facilitating the optical investigation
- G01B 2210/50: Using chromatic effects to achieve wavelength-dependent depth resolution
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

An error of a measured distance is reduced. An optical measurement device (100) includes: a light source (10), which emits lights; a sensor head (30), which condenses reflected lights reflected by a target (TA); a light reception portion (40), which is configured in a manner that each of a plurality of pixels is capable of detecting a light reception amount, and which obtains a light reception amount distribution signal of each pixel for the condensed reflected lights; a measurement portion (51), which measures a distance from the optical measurement device (100) to the target (TA) based on the light reception amount distribution signal; and a correction portion (52), which corrects the measured distance that is measured based on a predefined characteristic value in a waveform of the light reception amount distribution signal.

## Claims

### Claim 1

An optical measurement device, comprising:
a light source, which emits lights;
an optical system, which condenses reflected lights reflected by a target;
a light reception portion, which is configured in a manner that each of a plurality of pixels is capable of detecting a light reception amount, and which obtains a light reception amount distribution signal of each pixel for the reflected lights being condensed; and
a processor, which measures a distance from the optical measurement device to the target based on the light reception amount distribution signal, and
corrects an error of the measured distance which is caused by a chromatic aberration of the optical system based on a predefined characteristic value in a waveform of the light reception amount distribution signal, wherein the predefined characteristic value is a half-value width.

### Claim 2 (depends on 1)

The optical measurement device according to claim 1, further comprising:
a memory, which stores a correlative relationship between the predefined characteristic value and an error value of the distance being measured,
wherein the processor acquires the predefined characteristic value from the waveform of the light reception amount distribution signal; and
wherein the processor obtains the error value of the distance being measured based on the correlative relationship and the predefined characteristic value being acquired, and subtracts the error value from the distance being measured.

### Claim 3 (depends on 2)

The optical measurement device according to claim 2, wherein
the correlative relationship is expressed by a numerical formula which uses the predefined characteristic value as an independent variable and the error value of the distance being measured as a dependent variable.

### Claim 4 (depends on 2)

The optical measurement device according to claim 2, further comprising
an interface which is used to input information of the correlative relationship.

### Claim 5 (depends on 1)

The optical measurement device according to claim 1, wherein
the optical system comprises a single condenser lens which is used to condense the reflected lights.

### Claim 6 (depends on 1)

The optical measurement device according to claim 1, wherein
the lights comprise a plurality of wavelength components;
the optical system generates the chromatic aberration along an optical axis direction to the lights and irradiates the lights to which the chromatic aberration is generated to the target; and
the light reception portion is configured to be detect the light reception amount for each wavelength component.

### Claim 7

An optical measurement method used by an optical measurement device, comprising:
a step in which a light source emits lights;
a step in which an optical system condenses reflected lights reflected by a target;
a step in which a light reception portion obtains a light reception amount distribution signal of each pixel for the reflected lights being condensed, and in which the light reception portion is configured in a manner that each of a plurality of pixels is capable of detecting a light reception amount;
a step in which a processor measures a distance from the optical measurement device to the target based on the light reception amount distribution signal; and
a step in which the processor corrects an error of the measured distance which is caused by a chromatic aberration of the optical system based on a predefined characteristic value in a waveform of the light reception amount distribution signal, wherein the predefined characteristic value is a half-value width.

### Claim 8 (depends on 7)

The optical measurement method according to claim 7, further comprising:
a step in which a memory stores a correlative relationship between the predefined characteristic value and an error value of the distance being measured; and
a step in which the processor acquires the predefined characteristic value from a waveform of the light reception amount distribution signal, wherein
the step of correction comprises that the processor obtains the error value of the distance being measured based on the correlative relationship and the predefined characteristic value being acquired, and that the processor subtracts the error value from the distance being measured.

### Claim 9 (depends on 8)

The optical measurement method according to claim 8, wherein
the correlative relationship is expressed by a numerical formula which uses the predefined characteristic value as an independent variable and the error value of the distance being measured as a dependent variable.

### Claim 10 (depends on 8)

The optical measurement method according to claim 8, further comprising
a step in which information of the correlative relationship is input into an interface.

### Claim 11 (depends on 7)

The optical measurement method according to claim 7, wherein
the optical system comprises a single condenser lens which is used to condense the reflected lights.

### Claim 12 (depends on 7)

The optical measurement method according to claim 7, wherein
the lights comprise a plurality of wavelength components;
a step is further included in which the optical system generates the chromatic aberration along an optical axis direction to the lights and irradiates the lights to which the chromatic aberration is generated to the target; and
a step in which the light reception portion is configured to detect the light reception amount for each wavelength component.

### Claim 13 (depends on 1)

The optical measurement device according to claim 1, wherein the processor corrects the error of the measured distance based on a slope formed between a midpoint of the half-value width at a half of a peak light reception amount in the waveform of the light reception amount distribution signal and a maximum point indicating the peak light reception amount in the waveform of the light reception amount distribution signal.

### Claim 14 (depends on 1)

The optical measure device according to claim 1, wherein the error of the measured distance includes a shift in waveform of the light reception amount distribution signal caused by a peak light reception amount.
