# US 10,767,802 B2 · Fluid apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,767,802 B2 - Document ID: US10767802B2 - Status: Granted - Kind: B2 - Application number: 15/909,019 - Filed: 2018-03-01 - Published: 2018-09-06 - Granted: 2020-09-08 - Earliest claimed: 2017-03-03 - Assignees: Surpass Industry Co., Ltd. - Applicants: Surpass Industry Co., Ltd. - Inventors: Masahiro Hasunuma - Web page: https://patentgrep.com/patent/US10767802B2 ## CPC - F16L 55/07: Arrangement or mounting of devices, e.g. valves, for venting or aerating or draining (apparatus for draining F16T) - F16K 1/32: Details (details of more general applicability F16K25/00 - F16K51/00) - F16L 37/32: at least one of two lift valves being opened automatically when the coupling is applied - F16L 37/34: at least one of the lift valves being of the sleeve type, i.e. a sleeve being telescoped over an inner cylindrical wall - H05F 3/02: by means of earthing connections - F16L: PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL - F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)} - H05F: STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY ## Abstract Provided is a plug device which includes: a body portion; and a valve element portion. A fluid flow passage is formed in the body portion. The fluid flow passage extends along an axis, and has a valve hole at one end thereof. The valve element portion is accommodated in the body portion in an advancing and retracting manner along the axis. A proximal end portion of the valve element portion is made of a conductive fluororesin material containing a fluororesin material and carbon nanotubes dispersed in the fluororesin material. The proximal end portion is conductive with a conductive member maintained at a ground potential. A volume resistivity of the conductive fluororesin material falls within a range of larger than 1.0x×103 Ω·cm and less than 1.0×104 Ω·cm. ## Claims ### Claim 1 A fluid apparatus that is installed in a piping through which a fluid used in a semiconductor manufacturing apparatus is allowed to flow, the fluid apparatus comprising: a body portion in which a fluid flow passage is formed, the fluid flow passage extending along an axis, and having a valve hole at one end of the fluid flow passage; and a valve element portion accommodated in the body portion in an advancing and retracting manner along the axis, wherein at least a portion of the valve element portion is made of a conductive fluororesin material containing a fluororesin material and carbon nanotubes dispersed in the fluororesin material, and is conductive with a grounding portion maintained at a ground potential, wherein a volume resistivity of the conductive fluororesin material falls within a range of larger than 1.0×103 Ω·cm and less than 1.0×104 Ω·cm, wherein the valve element portion has a tubular shape conforming to an inner peripheral surface of the body portion, the valve element portion comprising: a distal end portion, inserted into the valve hole, made of a non-conductive fluororesin material containing no carbon nanotubes; and a proximal end portion made of the conductive fluororesin material, the proximal end having: an inner space in communication with an other end of the fluid flow passage; and a flow hole allowing a fluid to flow between the inner space and the valve hole, wherein the body portion includes: a first body portion configured to support an outer peripheral surface of the valve element portion on a distal end side; and a second body portion configured to support an outer peripheral surface of the valve element portion on a proximal end side, the second body portion being disposed on an inner peripheral side of the first body portion, wherein the first body portion is made of a non-conductive fluororesin material containing no carbon nanotubes, and wherein the second body portion is made of the conductive fluororesin material, and is in contact with both a portion of the valve element portion, which is made of the conductive fluororesin material, and the grounding portion. ### Claim 2 (depends on 1) The fluid apparatus according to claim 1, wherein the conductive fluororesin material contains carbon nanotubes at a ratio of 0.020 weight % or more and 0.030 weight % or less. ### Claim 3 (depends on 2) The fluid apparatus according to claim 2, further comprising: a biasing force generating portion configured to generate a biasing force in a direction that the valve element portion is inserted into the valve hole. ### Claim 4 (depends on 1) The fluid apparatus according to claim 1, further comprising: a biasing force generating portion configured to generate a biasing force in a direction that the valve element portion is inserted into the valve hole. ### Claim 5 (depends on 1) The fluid apparatus according to claim 1, wherein the grounding portion is a metal member mounted on an end portion of the proximal end side of the body portion in a state of being in contact with the second body portion and is maintained at a ground potential. ### Claim 6 (depends on 1) The fluid apparatus according to claim 1, wherein the distal end portion of the valve element portion is integrally formed with the proximal end portion of the valve element portion, the distal end portion being made of a non-conductive fluororesin material containing no carbon nanotubes and the proximal end portion being made of the conductive fluororesin material.