# US 10,767,653 B2 · Vacuum pump > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,767,653 B2 - Document ID: US10767653B2 - Status: Granted - Kind: B2 - Application number: 16/060,191 - Filed: 2016-12-13 - Published: 2018-12-20 - Granted: 2020-09-08 - Earliest claimed: 2015-12-14 - Assignees: Edwards Limited - Applicants: Edwards Limited - Inventors: Alan Ernest Kinnaird Holbrook; Paul Milner - Web page: https://patentgrep.com/patent/US10767653B2 ## CPC - F04D 19/042: {Turbomolecular vacuum pumps} - F04D 29/056: Bearings - F04D 29/0563: {Bearings cartridges} - F04D 29/601: {specially adapted for elastic fluid pumps} - F04D 29/668: {damping or preventing mechanical vibrations} - F04D 19/048: {comprising magnetic bearings} - F05D 2250/51: Inlet - F04D: NON-POSITIVE-DISPLACEMENT PUMPS (engine fuel-injection pumps F02M; ion pumps H01J41/12; electrodynamic pumps H02K44/02) - F05D: INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS ## Abstract The present invention relates to a turbo-molecular vacuum pump comprising bearings for supporting the drive shaft and/or the rotor in relation to a pump body, wherein a first bearing is coupled to the rotor and disposed on supporting mount at the high vacuum side of the rotor and radial struts extend from the supporting mount and form an integral part of the body; the invention is characterised in that the radial struts comprise a hinge portion that can flex to allow relative movement of the inlet flange with respect to the supporting mount to reduce distortion effects. ## Claims ### Claim 1 A turbo-molecular vacuum pump comprising: a body having an inlet flange disposed at a high vacuum side for connecting the turbo-molecular vacuum pump with a chamber to be evacuated, and an outlet port disposed at a low vacuum side for exhausting pumped gases from the turbo-molecular vacuum pump; disposed within the body there is a stator and a rotor arranged to move relative to the stator such that, during use, gas molecules are urged from the inlet flange towards the outlet port, the rotor is coupled to a motor by a drive shaft for driving the rotor in a rotary motion; and bearings for supporting the drive shaft and the rotor in relation to the body, wherein a first bearing is coupled to the rotor and disposed on supporting mount at the high vacuum side of the rotor, radial struts extend from the supporting mount and form an integral part of the body; characterized in that the radial struts comprise a hinge portion that can flex to allow relative movement of the inlet flange with respect to the supporting mount. ### Claim 2 (depends on 1) The turbo-molecular vacuum pump according to claim 1, wherein the first bearing is a passive magnetic bearing. ### Claim 3 (depends on 1) The turbo-molecular vacuum pump according to claim 1, wherein the radial struts form an integral part of the inlet flange. ### Claim 4 (depends on 1) The turbo-molecular vacuum pump according to claim 1, wherein the hinge portion comprises a notch in the radial strut. ### Claim 5 (depends on 4) The turbo-molecular vacuum pump according to claim 4, wherein an axial depth of the radial strut at the notch is sufficient to prevent axial movement of the supporting mount relative to the body during normal operation of the turbo-molecular vacuum pump. ### Claim 6 (depends on 4) The turbo-molecular vacuum pump according to claim 4, wherein an axial depth of the radial strut at the notch is sufficient to allow the inlet flange to distort when a clamping force is applied without causing the supporting mount to move relative to the body. ### Claim 7 (depends on 4) The turbo-molecular vacuum pump according to claim 4, wherein an axial depth of the notch is between 80% and 10% of an maximum axial depth of the radial strut, or wherein the axial depth of the notch is between 50% and 20% of the maximum axial depth of the radial strut, or wherein the axial depth of the notch is 33% of the maximum axial depth of the radial strut. ### Claim 8 (depends on 4) The turbo-molecular vacuum pump according to claim 4, wherein the notch is formed in the radial strut at a position where the axial strut meets the body. ### Claim 9 A body for a turbo-molecular vacuum pump, comprising: an inlet flange disposed at a high vacuum side of the body for connecting the body with a chamber to be evacuated, and an outlet port disposed at a low vacuum side for exhausting pumped gases from the body; a cavity arranged to accommodate within the body a pumping stator and a rotor arranged such that, during use, gas molecules are urged from the inlet flange towards the outlet port, a motor and a drive shaft for driving the rotor in a rotary motion; and, at the high vacuum side, a supporting mount arranged to locate a portion of a first bearing that cooperates with another portion of the first bearing for supporting the drive shaft and the rotor in relation to the body, wherein, radial struts extend from the supporting mount and form an integral part of the body; characterized in that the radial struts comprise a hinge portion that can flex to avow relative movement of the inlet flange with respect to the supporting mount. ### Claim 10 (depends on 9) The body according to claim 9, wherein the first bearing is a passive magnetic bearing. ### Claim 11 (depends on 9) The body according to claim 9, wherein the radial struts form an integral part of the inlet flange. ### Claim 12 (depends on 9) The body according to claim 9, wherein the hinge portion comprises a notch in the radial strut. ### Claim 13 (depends on 12) The body according to claim 12, wherein an axial depth of the radial strut at the notch is sufficient to prevent axial movement of the supporting mount relative to the body during normal operation of the turbo-molecular vacuum pump. ### Claim 14 (depends on 12) The body according to claim 12, wherein an axial depth of the radial strut at the notch is sufficient to allow the inlet flange to distort when a clamping force is applied without causing the supporting mount to move relative to the body. ### Claim 15 (depends on 12) The body according to claim 12, wherein an axial depth of the notch is between 80% and 10% of an maximum axial depth of the radial strut, or wherein the axial depth of the notch is between 50% and 20% of the maximum axial depth of the radial strut, wherein the axial depth of the notch is 33% of the maximum axial depth of the radial strut. ### Claim 16 (depends on 12) The body according to claim 12, wherein the notch is formed in the radial strut at a position where the radial strut meets the body.