# US 10,766,822 B2 · Thermal spray material and thermal spray coated article

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- Number: US 10,766,822 B2
- Document ID: US10766822B2
- Status: Granted
- Kind: B2
- Application number: 16/258,449
- Filed: 2019-01-25
- Published: 2019-05-23
- Granted: 2020-09-08
- Earliest claimed: 2016-11-07
- Assignees: Tokyo Electron Limited; Fujimi Incorporated
- Applicants: Tokyo Electron Limited; Fujimi Incorporated
- Inventors: Nobuyuki Nagayama; Hiroyuki Ibe; Takaya Masuda
- Web page: https://patentgrep.com/patent/US10766822B2

## CPC

- C04B 35/505: based on yttrium oxide
- C04B 35/5152: {based on halogenides other than fluorides}
- C04B 35/553: based on fluorides
- C04B 35/62222: {obtaining ceramic coatings (coating of mortars, concrete, artificial or natural stone or ceramics C04B41/45; laminated ceramic products B32B18/00; coating of glass C03C17/00, applying ceramic coatings on silicon for semi-conductor purposes H10W; coating metallic materials C23)}
- C04B 35/62655: {Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying}
- C04B 35/62695: {Granulation or pelletising (devices for shaping artificial aggregates from ceramic mixtures B28B1/004)}
- C04B 41/00: After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone (conditioning of the materials prior to shaping C04B40/00; applying liquids or other fluent materials to surfaces, in general B05; grinding or polishing B24; apparatus or processes for treating or working shaped articles of clay or other ceramic compositions, slag or mixtures containing cementitious material B28B11/00; working stone or stone-like materials B28D; glazes, other than cold glazes, C03C8/00; etching, surface-brightening or pickling compositions C09K13/00)
- C23C 4/04: characterised by the coating material
- C04B 2235/3224: Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B 2235/3225: Yttrium oxide or oxide-forming salts thereof
- C04B 2235/445: Fluoride containing anions, e.g. fluosilicate
- C04B 2235/5436: micrometer sized, i.e. from 1 to 100 micron
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O—X) and a rare earth element halide (REX3).

## Claims

### Claim 1

A thermal spray coated article, comprising:
a substrate; and
a thermal sprayed coating provided on the surface of the substrate, wherein the thermal sprayed coating comprises:
a rare earth element, oxygen, and a halogen element as constituent elements; and
a mixed crystal of a rare earth element oxyhalide and a rare earth element halide.

### Claim 2 (depends on 1)

The thermal spray coated article according to claim 1, wherein the thermal sprayed coating comprises the rare earth element oxyhalide as a main component.

### Claim 3 (depends on 1)

The thermal spray coated article according to claim 1, substantially being free from a rare earth element oxide that is an oxide of the rare earth element.

### Claim 4 (depends on 1)

The thermal spray coated article according to claim 1, comprising:
yttrium as the rare earth element;
fluorine as the halogen element; and
a mixed crystal of yttrium oxyfluoride and yttrium fluoride as the mixed crystal of the rare earth element oxyhalide and the rare earth element halide.

### Claim 5

A thermal spray coated article comprising:
a substrate; and
a thermal sprayed coating provided on the surface of the substrate, wherein the thermal spray coating comprises:
a rare earth element, oxygen, and a halogen element as constituent elements; and
a mixed crystal of a rare earth element oxyhalide and rare earth element oxide.

### Claim 6 (depends on 5)

The thermal spray coated article according to claim 5, substantially being free from a rare earth element halide that is a halide of the rare earth element.

### Claim 7 (depends on 5)

The thermal spray coated article according to claim 5, comprising:
yttrium as the rare earth element;
fluorine as the halogen element; and
a mixed crystal of yttrium oxyfluoride and yttrium oxide as the mixed crystal of the rare earth element oxyhalide and the rare earth element oxide.