# US 10,766,805 B2 · Edge polishing a glass substrate after cutting > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,766,805 B2 - Document ID: US10766805B2 - Status: Granted - Kind: B2 - Application number: 15/792,279 - Filed: 2017-10-24 - Published: 2019-02-07 - Granted: 2020-09-08 - Earliest claimed: 2017-08-07 - Assignees: Seagate Technology LLC - Applicants: Seagate Technology LLC - Inventors: Joachim Walter Ahner; David Marcus Tung; Daniel T. Jennings; Robin Davies; Ian J. Beresford - Web page: https://patentgrep.com/patent/US10766805B2 ## CPC - C03B 33/102: {involving a focussed radiation beam, e.g. lasers} - B23K 10/003: {Scarfing, desurfacing or deburring} - B23K 26/0006: {taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence)} - B23K 26/042: Automatically aligning the laser beam - B23K 26/046: Automatically focusing the laser beam - B23K 26/064: by means of optical elements, e.g. lenses, mirrors or prisms - B23K 26/0643: {comprising mirrors} - B23K 26/0648: {comprising lenses} - B23K 26/067: Dividing the beam into multiple beams, e.g. multi-focusing - B23K 26/0676: {into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations} - B23K 26/0853: {Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane} - B23K 26/3576: {Diminishing rugosity, e.g. by grinding, polishing or smoothing} - B23K 26/361: for deburring or mechanical trimming (B23K26/351 takes precedence) - B23K 26/38: by boring or cutting - B23K 26/402: involving non-metallic material, e.g. isolators - C03B 33/0222: {Scoring using a focussed radiation beam, e.g. laser} - C03B 33/082: {using a focussed radiation beam, e.g. laser (C03B33/0855 takes precedence)} - B23K 2103/54: {Glass} - C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES - B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM ## Abstract A method includes projecting energy onto an annular edge of a glass substrate. The annular edge includes a first roughness. The first roughness is reduced to a second roughness with the energy. The energy reduces the first roughness without changing a roundness of the annular edge of the glass substrate. ## Claims ### Claim 1 A method comprising: projecting plasma onto an annular edge of a glass substrate, wherein the annular edge has a first roughness; directing at least one laser beam onto the annular edge; and guiding the plasma with the at least one laser beam to reduce the first roughness to a second roughness with the plasma, wherein the plasma reduces the first roughness without changing a roundness of the annular edge of the glass substrate. ### Claim 2 (depends on 1) The method of claim 1, wherein the reducing includes ablating portions of the annular edge. ### Claim 3 (depends on 1) The method of claim 1, wherein the reducing includes applying heat to reflow the annular edge. ### Claim 4 (depends on 1) The method of claim 1, wherein the plasma is projected from a plasma torch. ### Claim 5 (depends on 1) The method of claim 1, wherein the second roughness is below 0.5 μm rms. ### Claim 6 A method comprising: generating a plasma column at an edge of a glass substrate, wherein the edge of the glass substrate includes a distribution of feature dimensions including higher feature dimensions and lower feature dimensions; directing at least one laser beam onto the edge of the glass substrate; rotating the edge of the glass substrate through the plasma column; and guiding the plasma column with the at least one laser beam to heat and reflow the edge of the glass substrate, wherein the reflowing reduces the higher feature dimensions to the lower feature dimensions. ### Claim 7 (depends on 6) The method of claim 6, wherein a roundness of the edge of the glass substrate is unaffected by the reflowing. ### Claim 8 (depends on 6) The method of claim 6, further comprising: generating an additional energy column at the edge of the glass substrate, the additional energy column including at least one of a focused light beam and a plasma; rotating the edge of a glass substrate through the additional energy column; and further reducing the higher feature dimensions to the lower feature dimensions with the additional energy column. ### Claim 9 (depends on 8) The method of claim 8, wherein the further reducing includes ablating the higher feature dimensions. ### Claim 10 (depends on 8) The method of claim 8, wherein the additional energy column is laser guided plasma. ### Claim 11 (depends on 6) The method of claim 6, wherein the plasma column is generated from a plasma torch. ### Claim 12 A method comprising: applying a first energy, a second energy, and a third energy to an annular edge of a glass substrate, the first energy including a plasma and the second energy and third energy each including a laser beam; using the second and the third energy to guide the first energy onto the edge of the glass substrate to increase smoothness of the annular edge of the glass substrate, wherein a roundness of the annular edge remains the same after the applying the first energy, the second energy, and the third energy, the annular edge of the glass substrate includes higher features and lower features, and increasing the smoothness of the annular edge reduces a number of the higher features to increase a number of the lower features. ### Claim 13 (depends on 12) The method of claim 12, further comprising rotating the annular edge of the glass substrate through the first energy, the second energy, and the third energy. ### Claim 14 (depends on 12) The method of claim 12, wherein the first energy is projected from a plasma torch. ### Claim 15 (depends on 12) The method of claim 12, wherein increasing the smoothness includes applying heat to reflow the annular edge of the glass substrate.