Methods and systems for purifying hydrogen peroxide solutions
AssigneeRASIRC, Inc.
InventorsDaniel Alvarez, Jr., Christopher Ramos, Jeffrey J. Spiegelman
Life of this patent
Estimating the term…
Abstract
Compositions, methods, devices, and systems for purifying a source liquid from a replenishment stock solution that includes stabilizing agents, such as metal ions, prior to vaporization. Certain embodiments effect the purification with a solid perfluoronated ionomer, such as a perfluoronated ionomer membrane. Advantageously, source liquids purified in this manner provide feed stocks for production of ultra-pure gaseous reagents. As well, performance characteristics of membrane-based vaporizers relying on transport processes are improved.
Claims28
A method of improving performance of a membrane-based vaporizer system, the method comprising:
- a) providing in a reservoir of a membrane-based vaporizer system a stabilized liquid solution comprising 10 weight % or more hydrogen peroxide or hydrazine and one or more cations;
- b) contacting the stabilized liquid solution with a perfluorinated ion exchange polymer to produce a purified liquid solution having 50 weight % or more of the one or more cations removed therefrom;
- c) conveying the purified liquid solution to contact a perfluorinated ion exchange membrane of the membrane-based vaporizer system;
- d) allowing hydrogen peroxide or hydrazine vapor to pass through the perfluorinated ion exchange membrane into a head space of the membrane-based vaporizer system;
- and
- e) delivering a stable concentration of the vapor from the head space to a critical process or application,
- thereby improving performance of the membrane-based vaporizer system by preventing the stabilized liquid solution from reaching the perfluorinated ion exchange membrane of the membrane-based vaporizer system.
A method of improving performance of a membrane-based vaporizer system, the method consisting of:
- a) providing in a reservoir of a membrane-based vaporizer system a stabilized liquid solution of 10 weight % or more of hydrogen peroxide, wherein the stabilized liquid solution contains one or more cations;
- b) contacting the stabilized liquid solution with a perfluorinated ion exchange polymer to produce a purified liquid solution having 80 weight % or more of the one or more cations removed therefrom;
- c) conveying the purified liquid solution to contact a perfluorinated ion exchange membrane in the membrane-based vaporizer system;
- d) allowing hydrogen peroxide vapor to pass through the perfluorinated ion exchange membrane into a head space of the membrane-based vaporizer system;
- and
- e) delivering a stable concentration of the vapor from the head space to a critical process or application,
- thereby improving performance of the membrane-based vaporizer system by preventing the stabilized liquid solution from reaching the perfluorinated ion exchange membrane of the membrane-based vaporizer system.
Dependencies are inferred from the claim text.