# US 10,766,117 B2 · Retaining ring with shaped surface

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- Number: US 10,766,117 B2
- Document ID: US10766117B2
- Status: Granted
- Kind: B2
- Application number: 15/908,605
- Filed: 2018-02-28
- Published: 2018-07-05
- Granted: 2020-09-08
- Earliest claimed: 2003-11-13
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Douglas R. McAllister; Jian Lin; Stacy Meyer; Sidney P. Huey; Jeonghoon Oh; Trung T. Doan; Jeffrey P. Schmidt; Martin S. Wohlert; Kerry F. Hughes; James C. Wang; Danny Cam Toan Lu; Romain Beau De Lamenie; Venkata R. Balagani; Aden Martin Allen; Michael Jon Fong
- Web page: https://patentgrep.com/patent/US10766117B2

## CPC

- B24B 37/32: Retaining rings
- Y10T 29/49815: Disassembling
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.

## Claims

### Claim 1

A retaining ring comprising:
an annular body having a bottom surface, an inner surface, an outer surface and a top surface configured for attachment to a carrier head, an inner edge between the inner surface and the bottom surface having a first radius of curvature, and an outer edge between the outer surface and the bottom surface having a second radius of curvature that is different from the first radius of curvature.

### Claim 2 (depends on 1)

The retaining ring of claim 1, wherein the first radius of curvature is greater than the second radius of curvature.

### Claim 3 (depends on 1)

The retaining ring of claim 1, wherein the first radius of curvature is less than the second radius of curvature.