# US 10,766,085 B2 · Work processing apparatus and method for manufacturing a processed work > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,766,085 B2 - Document ID: US10766085B2 - Status: Granted - Kind: B2 - Application number: 16/496,919 - Filed: 2018-03-23 - Published: 2020-04-23 - Granted: 2020-09-08 - Earliest claimed: 2017-03-30 - Assignees: Origin Company, Limited - Applicants: Origin Company, Limited - Inventors: Jun Matsuda; Tatsuo Okubo; Naoto Ozawa - Web page: https://patentgrep.com/patent/US10766085B2 ## CPC - B23K 1/008: Soldering within a furnace (B23K1/012 takes precedence) - H05B 3/28: heating conductor embedded in insulating material - B01D 1/0017: {Use of electrical or wave energy (B01D1/0029 takes precedence)} - B23K 3/08: Auxiliary devices therefor - B23K 31/02: relating to soldering or welding - B23K 35/3618: {Carboxylic acids or salts} - F28D 20/00: Heat storage plants or apparatus in general; Regenerative heat-exchange apparatus not covered by groups F28D17/00 or F28D19/00 - F28D 20/0056: {using solid heat storage material (F28D20/0052 takes precedence)} - F28F 3/12: Elements constructed in the shape of a hollow panel, e.g. with channels {(F28D1/02, F28D1/03 take precedence)} - F28D 2021/0064: {Vaporizers, e.g. evaporators} - H05B 2203/014: Heaters using resistive wires or cables not provided for in H05B3/54 - H05B 2203/021: Heaters specially adapted for heating liquids - Y02E 60/14: Thermal energy storage - B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28) - F28D: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT (fluid heaters having heat generating means and heat transferring means F24H; furnaces F27; details of heat-exchange apparatus of general) - F28F: DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION (water and air traps, air venting F16) - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION ## Abstract To provide a work processing apparatus equipped with a vaporizer that requires no carrier gas and can vaporize a vaporization target liquid having a relatively high flow rate, and a method for manufacturing a processed work. A vaporizer 1 includes a vaporization part 10 including a heat storage body 11 having a heat capacity higher than that of a vaporization target liquid Fq by a predetermined ratio, and a heat supplier 20 for supplying heat to the vaporization part 10. The predetermined ratio is a ratio of heat capacity at which a temperature drop of the heat storage body 11 by heat transfer from the heat storage body 11 to the liquid Fq flowing through a path 12 is within a predetermined range, wherein the amount of heat transferred from the heat storage body 11 to the liquid Fq is an amount of heat necessary to vaporize the liquid Fq at a planned proportion. A work processing apparatus 100 includes the vaporizer 1, a chamber 5, and a vacuum pump 6 for creating a negative pressure in the chamber 5. The method of manufacturing a processed work includes taking the work W into the chamber 5, supplying a processing gas Fg generated in the vaporizer 1 into the chamber 5, and performing predetermined processing on the work W under an atmosphere of the processing gas Fg in the chamber 5. ## Claims ### Claim 1 A work processing apparatus, comprising: a vaporizer having: a vaporization part including a heat storage body having a heat capacity higher than that of a vaporization target liquid by a predetermined ratio, the vaporization target liquid being a carboxylic acid; and a heat supplier for supplying heat to the vaporization part; a chamber for processing a work therein, the chamber being configured to be able to be airtight from outside, where a flow path in the vaporizer through which the vaporization target liquid flows and an inside of the chamber are communicated with each other; and a vacuum pump for creating a negative pressure in the inside of the chamber and an inside of the flow path through which the vaporization target liquid flows; wherein the heat storage body has a heat storage body flow path formed therein, the heat storage body flow path being a flow path through which the vaporization target liquid flows; and wherein the predetermined ratio is a ratio of heat capacity at which a temperature drop of the heat storage body by heat transfer from the heat storage body to the vaporization target liquid flowing through the heat storage body flow path is within a predetermined range, wherein the amount of heat transferred from the heat storage body to the vaporization target liquid is an amount of heat necessary to vaporize the vaporization target liquid at a planned proportion. ### Claim 2 A work processing apparatus, comprising: a vaporizer having a vaporization part including a heat storage body formed of a metal block, the heat storage body having a heat storage body flow path formed therein by boring holes in the block, the heat storage body flow path being a flow path through which a vaporization target liquid flows, the vaporization target liquid being a carboxylic acid, and a heat supplier for supplying heat to the vaporization part; a chamber for processing a work therein, the chamber being configured to be able to be airtight from outside, where a flow path in the vaporizer through which the vaporization target liquid flows and an inside of the chamber are communicated with each other; and a vacuum pump for creating a negative pressure in the inside of the chamber and an inside of the flow path through which the vaporization target liquid flows. ### Claim 3 (depends on 1) The work processing apparatus of claim 1, wherein the heat supplier includes an embedded heater embedded in the heat storage body. ### Claim 4 (depends on 1) The work processing apparatus of claim 1, wherein the vaporization part is configured to include a low-heat capacity flow path forming member on a downstream side of the heat storage body with respect to a flow direction of the vaporization target liquid, the low-heat capacity flow path forming member being a member forming a flow path through which the vaporization target liquid flows and having a heat capacity lower than that of the heat storage body; and wherein the heat supplier is configured to include a downstream side heater for heating the low-heat capacity flow path forming member. ### Claim 5 (depends on 1) The work processing apparatus of claim 1, wherein the heat storage body flow path is formed to include a bent portion. ### Claim 6 (depends on 1) A method for manufacturing a processed work using the work processing apparatus of claim 1, the method comprising: a take in step of taking the work into the chamber; a processing gas supply step of supplying a processing gas generated by vaporizing the vaporization target liquid in the vaporizer into the chamber; and a work processing step of performing predetermined processing on the work under an atmosphere of the processing gas in the chamber. ### Claim 7 (depends on 2) The work processing apparatus of claim 2, wherein the heat supplier includes an embedded heater embedded in the heat storage body. ### Claim 8 (depends on 2) The work processing apparatus of claim 2, wherein the vaporization part is configured to include a low-heat capacity flow path forming member on a downstream side of the heat storage body with respect to a flow direction of the vaporization target liquid, the low-heat capacity flow path forming member being a member forming a flow path through which the vaporization target liquid flows and having a heat capacity lower than that of the heat storage body; and wherein the heat supplier is configured to include a downstream side heater for heating the low-heat capacity flow path forming member. ### Claim 9 (depends on 2) The work processing apparatus of claim 2, wherein the heat storage body flow path is formed to include a bent portion. ### Claim 10 (depends on 2) A method for manufacturing a processed work using the work processing apparatus of claim 2, the method comprising: a take in step of taking the work into the chamber; a processing gas supply step of supplying a processing gas generated by vaporizing the vaporization target liquid in the vaporizer into the chamber; and a work processing step of performing predetermined processing on the work under an atmosphere of the processing gas in the chamber.