# US 10,766,054 B2 · Substrate processing method and substrate processing apparatus

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- Number: US 10,766,054 B2
- Document ID: US10766054B2
- Status: Granted
- Kind: B2
- Application number: 15/710,868
- Filed: 2017-09-21
- Published: 2018-03-29
- Granted: 2020-09-08
- Earliest claimed: 2016-09-27
- Assignees: SCREEN Holdings Co., Ltd.
- Applicants: SCREEN Holdings Co., Ltd.
- Inventors: Yasunori Kanematsu
- Web page: https://patentgrep.com/patent/US10766054B2

## CPC

- B05D 1/002: {the substrate being rotated}
- B05D 3/002: {Pretreatement}
- H10D 48/04: of devices having bodies comprising selenium or tellurium in uncombined form
- H10P 70/20: {Cleaning during device manufacture}
- H10P 72/0448: {Apparatus for applying a liquid, a resin, an ink or the like}
- B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A substrate processing method comprises: a liquid film forming step of forming a liquid film of a rinsing liquid on a pattern forming surface of a substrate formed with a pattern; a liquid pool forming step of forming a liquid pool of an organic solvent by supplying the organic solvent to the liquid film near a center of rotation of the substrate; a replacement step of replacing the rinsing liquid constituting the liquid film with the organic solvent by supplying the organic solvent to the liquid pool while rotating the substrate at a rotational speed higher than in the liquid pool forming step; an application step of applying a filler solution to the pattern forming surface coated with the organic solvent; and a filling step of causing a filler contained in the filler solution and applied to the pattern forming surface to sink and filling concave portions of the pattern with the filler.

## Claims

### Claim 1

A substrate processing method, comprising:
a liquid film forming step of forming a liquid film puddle of a rinsing liquid on a pattern forming surface of a substrate formed with a pattern;
a liquid pool forming step of forming a liquid pool of an organic solvent by supplying the organic solvent to the liquid film puddle near a center of rotation of the substrate while maintaining the puddle;
after the liquid pool forming step, a replacement step of replacing the rinsing liquid constituting the liquid film with the organic solvent by supplying the organic solvent to the liquid pool while rotating the substrate at a rotational speed higher than in the liquid pool forming step;
an application step of applying a filler solution to the pattern forming surface coated with the organic solvent;
a filling step of causing a filler contained in the filler solution and applied to the pattern forming surface to sink and fill concave portions of the pattern with the filler;
a rinsing step of rinsing the pattern forming surface by supplying the rinsing liquid to the pattern forming surface while rotating the substrate at a first rotational speed, wherein:
the liquid film forming step includes a step of decelerating the rotational speed of the substrate to a second rotational speed lower than the first rotational speed, the step being performed following the rinsing step;
the liquid pool forming step includes a step of setting the rotational speed of the substrate equal to or lower than the second rotational speed; and
the rotation of the substrate is stopped and the organic solvent is supplied in the liquid pool forming step.

### Claim 2 (depends on 1)

The substrate processing method according to claim 1, further comprising:
a finishing step of discharging the organic solvent and an excess of the filler solution from the pattern forming surface while causing the filler to remain in the concave portions of the pattern by rotating the substrate, the finishing step being performed following the filling step.

### Claim 3 (depends on 2)

The substrate processing method according to claim 2, wherein:
the finishing step includes a gas supplying step of supplying inert gas to a central portion of the pattern forming surface in tandem with the rotation of the substrate.

### Claim 4 (depends on 3)

The substrate processing method according to claim 3, wherein:
the finishing step includes a cleaning liquid supplying step of supplying a cleaning liquid to a central portion of a principal surface of the substrate on a side opposite to the pattern forming surface in tandem with the rotation of the substrate.

### Claim 5 (depends on 1)

The substrate processing method according to claim 1, wherein:
the rotation of the substrate is stopped and the organic solvent is supplied in the liquid pool forming step.

### Claim 6 (depends on 1)

The substrate processing method according to claim 1, further comprising:
a chemical step of supplying a chemical to the pattern forming surface while rotating the substrate at the first rotational speed, before the rinsing step.

### Claim 7 (depends on 1)

The substrate processing method according to claim 1, wherein:
the filling step includes a first spin-off process in which a rotational speed of the substrate is reduced to a rotational speed that is lower than that in the application step, a filler sinking process in which the rotational speed of the substrate is maintained at said rotational speed in said first spin-off process, and a second spin-off process in which the rotational speed of the substrate is accelerated to a higher rotational speed than in said filler sinking process.