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US 10,765,005 B2Granted
Embedding component with pre-connected pillar in component carrier
AssigneeAT&S Austria Technologie & Systemtechnik Aktiengesellschaft
InventorsHannes Stahr, Hannes Voraberger, Andreas Zluc, Bettina Schuster
Life of this patent
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Abstract
A method of manufacturing a component carrier is disclosed. The method includes galvanically depositing at least part of at least one electrically conductive pillar on a component, and inserting the at least one electrically conductive pillar and an electrically insulating layer structure into one another.
Claims11
A method of manufacturing a component carrier, the method comprising:
- galvanically depositing at least part of at least one electrically conductive pillar on a component;
- providing an electrically insulating layer structure, wherein the electrically insulating layer structure is a non-uniform electrically insulating layer structure having at least one protrusion for accommodating the at least one electrically conductive pillar;
- and
- after providing the electrically insulating layer structure, mechanically pressing the at least one electrically conductive pillar and the electrically insulating layer structure into one another, so that the at least one electrically conductive pillar is inserted into the electrically insulating layer structure so deep that a free end of the at least one electrically conductive pillar protrudes beyond the electrically insulating layer structure and is thereby exposed, wherein the inserting by mechanically pressing comprises one of moving the at least one electrically conductive pillar into the stationary electrically insulating layer structure, and moving the electrically insulating layer structure into the stationary at least one electrically conductive pillar;
- the component comprises a semiconductor chip being electrically contacted by a plurality of electrically conductive pillars;
- forming an electrically conductive trace structure, embedding the trace structure in a patterned electrically insulating matrix, the patterned electrically insulating matrix comprising a recess which is filled by the protrusion, attaching the electrically insulating layer structure to the matrix with embedded trace structure, and the inserting by mechanically pressing, and optionally fixing, the at least one electrically conductive pillar of the component into the electrically insulating layer structure extending into the recess of the matrix;
- the component comprises the at least one electrically conductive pillar either on only one main surface thereof or on both opposing main surfaces thereof.
4 more elements
A method of manufacturing a component carrier, the method comprising:
- galvanically depositing at least part of at least one electrically conductive pillar on a component;
- providing an electrically insulating layer structure, wherein the electrically insulating layer structure is a non-uniform electrically insulating layer structure having at least one protrusion for accommodating the at least one electrically conductive pillar;
- and
- after providing the electrically insulating layer structure, mechanically pressing the at least one electrically conductive pillar and the electrically insulating layer structure into one another, so that the at least one electrically conductive pillar is inserted into the electrically insulating layer structure so deep that a free end of the at least one electrically conductive pillar protrudes beyond the electrically insulating layer structure and is thereby exposed, wherein the inserting comprises one of moving the at least one electrically conductive pillar into the stationary electrically insulating layer structure, and moving the electrically insulating layer structure into the stationary at least one electrically conductive pillar;
- the component comprises a semiconductor chip being electrically contacted by a plurality of electrically conductive pillars;
- the component comprises the at least one electrically conductive pillar either on only one main surface thereof or on both opposing main surfaces thereof;
- after the at least one electrically conductive pillar is inserted into the electrically insulating layer structure, performing at least one further processing step, and subsequently removing the electrically insulating layer structure from the component and the at least one electrically conductive pillar.
4 more elements
Dependencies are inferred from the claim text.