Laminated heater with different heater trace materials

A substrate support for a substrate processing system, the substrate support comprising:

• a plurality of annular heating zones;
• a baseplate;
• at least one of a heating layer and a ceramic layer arranged on the baseplate;
• a plurality of heating elements provided within the at least one of the heating layer and the ceramic layer, wherein the plurality of heating elements comprises a first material having a first electrical resistance;
• wiring provided through the baseplate in a first zone of the plurality of heating zones;
• and
• an electrical connection routed from the wiring in the first zone to a first heating element of the plurality of heating elements, wherein the first heating element is arranged in a second zone of the plurality of heating zones, wherein the electrical connection crosses from the first zone to the second zone to connect to the first heating element arranged in the second zone and does not connect to any heating elements arranged in the first zone, and wherein the electrical connection comprises a second material having a second electrical resistance that is less than the first electrical resistance.