Dual-column-parallel CCD sensor and inspection systems using a sensor
AssigneeKLA-Tencor Corporation
InventorsYung-Ho Alex Chuang, Jingjing Zhang, Sharon Zamek, John Fielden, Devis Contarato, David L. Brown
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AssigneeKLA-Tencor Corporation
InventorsYung-Ho Alex Chuang, Jingjing Zhang, Sharon Zamek, John Fielden, Devis Contarato, David L. Brown
Estimating the term…
A dual-column-parallel image CCD sensor utilizes a dual-column-parallel readout circuit including two pairs of cross-connected transfer gates to alternately transfer pixel data (charges) from a pair of adjacent pixel columns to a shared output circuit at high speed with low noise. Charges transferred along the two adjacent pixel columns at a line clock rate are alternately passed by the transfer gates to a summing gate that is operated at twice the line clock rate to pass the image charges to the shared output circuit. A symmetrical Y-shaped diffusion is utilized in one embodiment to merge the image charges from the two pixel columns. A method of driving the dual-column-parallel CCD sensor with line clock synchronization is also described. A method of inspecting a sample using the dual-column-parallel CCD sensor is also described.
An image sensor including:
An image sensor comprising:
Dependencies are inferred from the claim text.