Lateral current injection electro-optical device with well-separated doped III-V layers structured as photonic crystals
AssigneeInternational Business Machines Corporation
InventorsCharles Caër, Lukas Czornomaz
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Abstract
A lateral current injection electro-optical device includes a slab having a pair of structured, doped layers of III-V semiconductor materials arranged side-by-side in the slab, the pair including an n-doped layer and a p-doped layer, each of the p-doped layer and the n-doped layer includes a two-dimensional photonic crystal, and a separation section extending between the pair of structured layers, the separation section separates the pair of structured layers, the separation section includes current blocking trenches, and an active region of III-V semiconductor gain materials between the current blocking trenches that form a photonic crystal cavity.
Claims10
A method for fabricating an electro-optical device, the method comprising:
- forming a pair of structured doped layers of III-V semiconductor materials on a slab, the pair of structured doped layers are arranged side-by-side in the slab, the pair of structure doped layers comprising an n-doped layer and a p-doped layer, wherein each of the p-doped layer and the n-doped layer comprises a two-dimensional photonic crystal, the n-doped layer is further structured to form an output waveguide core comprising a tapered portion protruding from an edge of the n-doped layer and extending parallel to an extraction portion of the output waveguide core formed as a line defect in a lattice of holes of the n-doped layer, wherein one or more rows of holes in the lattice of holes are missing at a level of the line defect;
- and
- forming a separation section extending between the pair of structured doped layers, the separation section separates the pair of structured doped layers, wherein the separation section comprises:
- current blocking trenches, and
- an active region of III-V semiconductor gain materials between the current blocking trenches that form a photonic crystal cavity.
Dependencies are inferred from the claim text.