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US 10,763,643 B2Granted
Laser devices
AssigneesImec Vzw, Katholieke Universiteit Leuven, KU LEUVEN R&D, Universiteit Gent
InventorsJoris Van Campenhout, Clement Merckling, Maria Ioanna Pantouvaki, Ashwyn Srinivasan, Irina Kulkova
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Abstract
An electrically-operated semiconductor laser device and method for forming the laser device are provided. The laser device includes a fin structure to which a waveguide is optically coupled. The waveguide is optically coupled to passive waveguides at either end thereof. The fin structure includes an array of fin elements, each fin element comprising Group III-V materials.
Claims8
A laser device comprising:
- at least one fin element configured to generate light when electrically stimulated, the at least one fin element comprising a body portion formed on a silicon substrate and a contact portion comprising a contact layer of indium-gallium-arsenide (In(Ga)As), p+ type material arranged over the body portion, wherein the body portion comprises an annealed epitaxially grown Group III-V material and wherein the contact portion comprises an active layer formed over the body portion, the active layer being located between the contact layer and the body portion and spaced therefrom by respective layers of p+ doped and n+ doped indium-phosphide, InP, and an etch stop layer formed over the p+ doped layer and around the contact layer;
- an overlay waveguide configured to be optically coupled to the at least one fin element;
- and
- passive waveguides optically coupled to each end of the overlay waveguide,
- wherein light generated in the at least one fin and the overlay waveguide is coupled into at least one of the passive waveguides,
- wherein a region is defined between the etch stop layer and the silicon substrate, wherein the at least one fin element is disposed in at least a portion of the region, wherein a shallow trench isolation (STI) layer is disposed in at least a second portion of the region, wherein the fin element has a dimensional height/depth aspect ratio greater than 1, and wherein a pre-metal dielectric (PMD) layer is located over the etch stop layer in a section of the etch stop layer that is located over the shallow trench isolation (STI) layer.
3 more elements
A laser device comprising:
- a plurality of fin elements configured to generate light when electrically stimulated, each fin element comprising a body portion and a contact portion comprising a contact layer of indium-gallium-arsenide (In(Ga)As), p+ type material arranged over the body portion, wherein the body portion comprises an annealed epitaxially grown Group III-V material formed on a silicon substrate, wherein the plurality of fin elements are separated from each other by a distance of less than a first order Bragg grating period, and wherein the contact portion comprises an active layer formed over the body portion, the active layer being located between the contact layer and the body portion and spaced therefrom by respective layers of p+ doped and n+ doped indium-phosphide, InP, and an etch stop layer formed over the p+ doped layer and around the contact layer;
- an overlay waveguide configured to be optically coupled to the plurality of fin elements,
- wherein a region is defined between the etch stop layer and the silicon substrate, wherein the at least one fin element is disposed in at least a portion of the region, wherein a shallow trench isolation (STI) layer is disposed in at least a second portion of the region, wherein the fin element has a dimensional height/depth aspect ratio greater than 1, and wherein a pre-metal dielectric (PMD) layer is located over the etch stop layer in a section of the etch stop layer that is located over the shallow trench isolation (STI) layer.
Dependencies are inferred from the claim text.