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US 10,763,434 B2Granted
Mask plate, organic light-emitting diode display panel, manufacturing methods thereof, and display device
AssigneeBoe Technology Group Co., Ltd.
InventorCan Zhang
Life of this patent
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Abstract
The present disclosure in some embodiments provides a mask plate, including: a metal mask plate body provided with a plurality of first openings; and an insulation film arranged on the metal mask plate body and provided with a plurality of second openings. An orthogonal projection of at least one second opening in the plurality of second openings onto the metal mask plate body falls within the corresponding first opening or first openings.
Claims19
A mask plate used for a substrate to be vaporized, comprising:
- a metal mask plate body proximal to the substrate to be vaporized, the metal mask plate body being provided with a plurality of first openings;
- and
- an insulation film arranged on the metal mask plate body and distal to the substrate to be vaporized, provided with a plurality of second openings,
- wherein an area of an orthogonal projection of at least one second opening in the plurality of second openings onto the metal mask plate body is smaller than that of the corresponding first opening or first openings;
- wherein the insulation film is divided by the plurality of second openings into a plurality of insulation patterns, and a cross section of each insulation pattern in a direction perpendicular to the metal mask plate body is of a trapezoidal shape;
- and
- wherein the cross section of each insulation pattern from top to bottom in a direction perpendicular to the metal mask plate body is of an inverted-trapezoidal shape.
4 more elements
A method for manufacturing a mask plate used for a substrate to be vaporized, comprising:
- providing a metal mask plate body proximal to the substrate to be vaporized, the metal mask plate body being provided with a plurality of first openings;
- forming an insulation film on the metal mask plate body distal to the substrate to be vaporized;
- and
- forming a plurality of second openings in the insulation film through a patterning process, wherein an area of an orthogonal projection of at least one second opening in the plurality of second openings onto the metal mask plate body is smaller than that of the corresponding first opening,
- wherein the insulation film is divided by the plurality of second openings into a plurality of insulation patterns, and a cross section of each insulation pattern in a direction perpendicular to the metal mask plate body is of a trapezoidal shape;
- and
- wherein the cross section of each insulation pattern from top to bottom in a direction perpendicular to the metal mask plate body is of an inverted-trapezoidal shape.
4 more elements
Dependencies are inferred from the claim text.