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US 10,763,427 B2Granted
Hall element for 3-D sensing and method for producing the same
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsEng Huat Toh, Ruchil Kumar Jain, Yongshun Sun, Shyue Seng Tan
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Abstract
A method of forming a 3D Hall effect sensor and the resulting device are provided. Embodiments include forming a p-type well in a substrate; forming a first n-type well in a first region surrounded by the p-type well in top view; forming a second n-type well in a second region surrounding the p-type well; implanting n-type dopant in the first and second n-type wells; and implanting p-type dopant in the p-type well and the first n-type well.
Claims12
A device comprising:
- a p-type well formed in a substrate;
- a first n-type well formed in a first region surrounded by the p-type well in top view;
- a second n-type well formed in a second region surrounding the p-type well;
- an n-type dopant region in the first n-type well and the second n-type well, respectively;
- and
- a p-type dopant region in the p-type well and the first n-type well, respectively,
- wherein the first n-type well formed in the first region has a cross-shaped pattern in top view,
- wherein the second n-type well formed in the second region has a frame-shaped pattern in top view, and
- wherein the p-type well completely and continuously surrounds the cross-shaped first n-type well in top view.
6 more elements
A three dimensional Hall effect sensor comprising:
- a p-type well formed in a substrate;
- a first n-type well formed in a first region surrounded by the p-type well in top view;
- a second n-type well formed in a second region surrounding the p-type well;
- an n-type dopant region in the first n-type well and the second n-type well, respectively;
- and
- a p-type dopant region in the p-type well and the first n-type well, respectively,
- wherein the first n-type well is formed in the first region as a cross-shaped pattern in top view
- wherein the second n-type well is formed in the second region as a frame-shaped pattern in top view, and
- wherein the p-type well completely and continuously surrounds the cross-shaped n-type well in top view.
6 more elements
Dependencies are inferred from the claim text.