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US 10,763,382 B2Granted
Backside configured surface plasmonic structure for infrared photodetector and imaging focal plane array enhancement
AssigneeUniversity of Massachusetts
InventorsXuejun Lu, Guiru Gu, Puminun Vasinajindakaw
Life of this patent
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Abstract
The invention relates to quantum dot and photodetector technology, and more particularly, to quantum dot infrared photodetectors (QDIPs) and focal plane array. The invention further relates to devices and methods for the enhancement of the photocurrent of quantum dot infrared photodetectors in focal plane arrays.
Claims3
A method, comprising:
- (a) increasing the photocurrent by reflecting light with a backside configured surface plasmon structure integrated into a quantum dot infrared photodetector,
- (b) decreasing the dark current with an indium bump on top of silicon nitride passivation layer surrounding the backside configured surface plasmon structure, and
- (c) enhancing the photocurrent spectrum response of said quantum dot infrared photodetector by at least four times.
Dependencies are inferred from the claim text.