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US 10,763,379 B2Granted
Integrated photodetector waveguide structure with alignment tolerance
AssigneeInternational Business Machines Corporation
InventorsSolomon Assefa, Bruce W. Porth, Steven M. Shank
Life of this patent
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Abstract
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
Claims20
A sensor structure:
- a photodetector landed and directly on a planar top surface of a waveguide structure, adjacent to one or more shallow trench isolation (STI) structures;
- and
- an encapsulating material of a single material fully encapsulating and surrounding the photodetector, wherein the encapsulating material extends across and directly contacts a top surface of the photodetector, and the encapsulating material is landed fully on and within confines of the waveguide structure.
Dependencies are inferred from the claim text.