Metal rail conductors for non-planar semiconductor devices
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Liang Chen, Chih-Ming Lai, Ching-Wei Tsai, Charles Chew-Yuen Young, Jiann-Tyng Tzeng, Kuo-Cheng Ching, Ru-Gun Liu, Wei-Hao Wu, Yi-Hsiung Lin, Chia-Hao Chang, Lei-Chun Chou
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