Resistive memory and method for fabricating the same and applications thereof
AssigneeMacronix International Co., Ltd.
InventorsPo-Hao Tseng, Dai-Ying Lee, Erh-Kun Lai
Life of this patent
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Abstract
A resistive memory includes a semiconductor substrate, a dielectric layer, an insulating layer and a metal electrode layer. The semiconductor substrate has a top surface and a recess extending downwards into the semiconductor substrate from the top surface. The dielectric layer is disposed on the semiconductor substrate and has a first through-hole aligning the recess. The insulating layer is disposed in the first through-hole and the recess. The metal electrode layer is disposed on the insulating layer by which the metal electrode layer is isolated from the semiconductor substrate.
Claims7
A method for fabricating a resistive memory device, comprising:
- providing a semiconductor substrate having a gate structure, a first doping region and a second doping region, wherein the gate structure is formed on a top surface of the semiconductor substrate;
- the first doping region and the second doping region are formed in the semiconductor substrate, adjacent to the gate structure and separated from each other;
- forming a dielectric layer on the top surface to cover on the first doping region and the second doping region;
- performing a first etching process to form a first through-hole in the dielectric layer, so as to expose a portion of the first doping region, meanwhile, to form a recess extending downwards into the first doping region from the top surface;
- forming an insulating layer in the first through-hole and the recess;
- forming a metal electrode layer on the insulating layer to make the metal electrode layer being isolated from the first doping region by the insulating layer;
- performing a second etching process to form a second through-hole in the dielectric layer to expose a portion of the second doping region;
- and
- forming a via plug electrically contacting to the second doping region in the second through-hole.
Dependencies are inferred from the claim text.